Picosecond laser microfabrication of infrared antireflective functional surface on As<sub>2</sub>Se<sub>3</sub> glass

Qiang Yang; Lingfei Ji; Bo Xu; Tianyang Yan; Wenhao Wang; Zhenyuan Lin

doi:10.3969/j.issn.1003-501X.2017.12.008

Article navigation > Opto-Electronic Engineering > 2017 Vol. 44 > No. 12 > 1200-1209

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Qiang Yang, Lingfei Ji, Bo Xu, et al. Picosecond laser microfabrication of infrared antireflective functional surface on As2Se3 glass[J]. Opto-Electronic Engineering, 2017, 44(12): 1200-1209. doi: 10.3969/j.issn.1003-501X.2017.12.008

Citation:

Qiang Yang, Lingfei Ji, Bo Xu, et al. Picosecond laser microfabrication of infrared antireflective functional surface on As₂Se₃ glass[J]. Opto-Electronic Engineering, 2017, 44(12): 1200-1209. doi: 10.3969/j.issn.1003-501X.2017.12.008

Picosecond laser microfabrication of infrared antireflective functional surface on As₂Se₃ glass

1.
Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
2.
China Building Materials Academy, Beijing 100024, China

Fund Project:

More Information

Corresponding author: Lingfei Ji, E-mail: ncltji@bjut.edu.cn

Received Date 27 October 2017

Revised Date 20 November 2017

Published Date 15 December 2017

Abstract

Abstract

Large-scale periodic dot matrix anti-reflective microstructures were fabricated on the surface by using UV picosecond laser with rapid line scanning to improve the infrared transmittance of As₂Se₃ glass. In the study, the laser ablation threshold of As₂Se₃ glass was concluded and the optimal line scanning method was designed. The transmittance of the fabricated chalcogenide glass increased about 10.0 % and 5.2% in wavelength ranged from 11.0 μm~12.4 μm and 13.0 μm~14.2 μm, respectively. In addition, the wettability of the glass was not damaged by laser scanning. The processing was carried out in air condition showing low cost, high controllability and high efficiency. It only took 3.65 s to finish the fabrication of 8 mm×8 mm surface structures. Both the size and space of the surface microstructure unit can be controlled according to the application requirement. The removal of the chalcogenide glass induced by laser was mainly based on "cold fabrication" in which no obvious thermal effects inducing the element change on the surface were observed. Higher laser energy could induce obvious thermal effect resulting in melting of the ablation points and bump of the crater edges.
- picosecond laser /
- As₂Se₃ chalcogenide glass /
- surface micro-structure /
- antireflection /
- contact angle

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References

[1]	戴世勋, 陈惠广, 李茂忠, 等.硫系玻璃及其在红外光学系统中的应用[J].红外与激光工程, 2012, 41(4): 847‒852. Google Scholar Dai Shixun, Chen Huiguang, Li Maozhong, et al. Chalcogenide glasses and their infrared optical applications[J]. Infrared and Laser Engineering, 2012, 41(4): 847‒852. Google Scholar
[2]	Goubet E, Katz J, Porikli F. Pedestrian tracking using thermal infrared imaging[J]. Proceedings of SPIE, 2006, 6206: 62062C. Google Scholar
[3]	付秀华, 姜洪妍, 张静, 等.基于硫系玻璃的短中波红外减反膜研制[J].中国激光, 2017, 44(9): 903002. Google Scholar Fu Xiuhua, Jiang Hongyan, Zhang Jing, et al. Preparation of short and medium wave infrared anti-reflective coating based on chalcogenide glass[J]. Chinese Journal of Lasers, 2017, 44(9): 903002. Google Scholar
[4]	Bernhard C G, Miller W H. A corneal nipple pattern in insect compound eyes[J]. Acta Physiologica Scandinavica, 1962, 56(3‒4): 385‒386. doi: 10.1111/apha.1962.56.issue-3-4 CrossRef Google Scholar
[5]	Raguin D H, Morris G M. Antireflection structured surfaces for the infrared spectral region[J]. Applied Optics, 1993, 32(7): 1154‒1167. doi: 10.1364/AO.32.001154 CrossRef Google Scholar
[6]	Denatale J F, Hood P J, Flintoff J F, et al. Fabrication and characterization of diamond moth eye antireflective surfaces on Ge[J]. Journal of Applied Physics, 1992, 71(3): 1388‒1393. doi: 10.1063/1.351259 CrossRef Google Scholar
[7]	Southwell W H. Pyramid-array surface-relief structures producing antireflection index matching on optical surfaces[J]. Journal of the Optical Society of America A, 1991, 8(3): 549‒553. Google Scholar
[8]	Wilson S J, Hutley M C. The optical properties of 'moth eye' antireflection surfaces[J]. Optica Acta: International Journal of Optics, 1982, 29(7): 993‒1009. doi: 10.1080/713820946 CrossRef Google Scholar
[9]	MacLeod B D, Hobbs D S, Sabatino E. Moldable AR microstructures for improved laser transmission and damage resistance in CIRCM fiber optic beam delivery systems[J]. Proceedings of SPIE, 2011, 8016: 80160Q. doi: 10.1117/12.883281 CrossRef Google Scholar
[10]	Hobbs D S, MacLeod B D, Riccobono J R. Update on the development of high performance anti-reflecting surface relief micro-structures[J]. Proceedings of SPIE, 2007, 6545: 65450Y. doi: 10.1117/12.720672 CrossRef Google Scholar
[11]	Hobbs D S, MacLeod B D. Design, fabrication, and measured performance of anti-reflecting surface textures in infrared transmitting materials[J]. Proceedings of SPIE, 2005, 5786: 349‒364. doi: 10.1117/12.604532 CrossRef Google Scholar
[12]	冯献飞, 邓军, 刘明, 等.用于短波红外探测器的微透镜阵列制作[J].光电工程, 2017, 44(6): 633‒637. Google Scholar Feng Xianfei, Deng Jun, Liu Ming, et al. Microlens array for shortwave infrared detectors[J]. Opto-Electronic Engineering, 2017, 44(6): 633‒637. Google Scholar
[13]	苗向阳. 太阳能玻璃的加工及应用技术研究[D]. 北京: 中国建筑材料科学研究总院, 2009. Google Scholar Miao Xiangyang. Study of treatment and application of solar glass[D]. Beijing: China Building Materials Academy, 2009. Google Scholar
[14]	Abbott M, Cotter J. Optical and electrical properties of laser texturing for high-efficiency solar cells[J]. Progress in Photovoltaics: Research and Applications, 2006, 14(3): 225‒235. doi: 10.1002/(ISSN)1099-159X CrossRef Google Scholar
[15]	Wang Quanji, Zhou Weidong. Direct fabrication of cone array microstructure on monocrystalline silicon surface by femtosecond laser texturing[J]. Optical Materials, 2017, 72: 508‒512. doi: 10.1016/j.optmat.2017.06.046 CrossRef Google Scholar
[16]	何超. 光伏玻璃表面激光织构化技术研究[D]. 北京: 北京工业大学, 2012. Google Scholar He Chao. Study on laser texturization on the surface of solar glass[D]. Beijing: Beijing University of Technology, 2012. Google Scholar
[17]	Ji Lingfei, Lv Xiaozhan, Wu Yan, et al. High performance light trapping structures for Si-based photoelectronics fabricated by hybrid picosecond laser irradiation and chemical corrosion[J]. Proceedings of SPIE, 2015, 9351: 93511R. doi: 10.1117/12.2077959 CrossRef Google Scholar
[18]	Ji Lingfei, Lv Xiaozhan, Wu Yan, et al. Hydrophobic light-trapping structures fabricated on silicon surfaces by picosecond laser texturing and chemical etching[J]. Journal of Photonics for Energy, 2015, 5(1): 053094. doi: 10.1117/1.JPE.5.053094 CrossRef Google Scholar
[19]	吕晓占, 季凌飞, 吴燕, 等.皮秒激光-化学复合法制备高效减反射晶硅表面微结构研究[J].中国激光, 2015, 42(4): 0403006. Google Scholar Lv Xiaozhan, Ji Lingfei, Wu Yan, et al. Fabrication of high performance anti-reflection silicon surface by picosecond laser scanning irradiation with chemical corrosion[J]. Chinese Journal of Lasers, 2015, 42(4): 0403006. Google Scholar
[20]	Liu J M. Simple technique for measurements of pulsed Gaussian-beam spot sizes[J]. Optics Letters, 1982, 7(5): 196‒198. doi: 10.1364/OL.7.000196 CrossRef Google Scholar
[21]	Li Jun, Drabold D A. First-principles molecular-dynamics study of glassy As₂Se₃[J]. Physical Review B, 2000, 61(18): 11998‒12004. doi: 10.1103/PhysRevB.61.11998 CrossRef Google Scholar
[22]	董亭亭. 仿生蛾眼抗反射微结构光学机理研究[D]. 长春: 长春理工大学, 2016. Google Scholar Dong Tingting. Research on optical mechanism of bionic moth-eye antireflection microstructure[D]. Changchun: Changchun University of Science and Technology, 2016. Google Scholar
[23]	李林翰. 红外窗口用硫化锌表面亚波长结构的制备与保护[D]. 哈尔滨: 哈尔滨工业大学, 2015. Google Scholar Li Linhan. Preparation and protection of ZnS surface sub-wavelength structure for infrared window[D]. Harbin: Harbin Institute of Technology, 2015. Google Scholar
[24]	陈鹏杰. 亚波长结构宽波段抗反射工艺的研究[D]. 成都: 电子科技大学, 2013. Google Scholar Chen Pengjie. Study on broadband antireflective subwavelength structures process[D]. Chengdu: University of Electronic Science and Technology of China, 2013. Google Scholar
[25]	You Chenyang, Dai Shixun, Zhang Peiqing, et al. Mid-infrared femtosecond laser-induced damages in As₂S₃ and As₂Se₃ chalcogenide glasses[J]. Scientific Reports, 2017, 7(1): 6497. doi: 10.1038/s41598-017-06592-3 CrossRef Google Scholar
[26]	Cassie A B D, Baxter S. Wettability of porous surfaces[J]. Transactions of the Faraday Society, 1944, 40: 546‒551. doi: 10.1039/tf9444000546 CrossRef Google Scholar

Overview

Overview

Chalcogenide glasses are formed of chalcogen of S, Se, Te with doping of a certain of other metal elements. Due to the lower refractive index, temperature coefficient and good infrared transmittance, it has been recognized as the ideal materials for a new generation temperature non-refrigerated infrared optical system. In order to decrease the large reflection losses, researches on multi-layer thin-film coatings for anti-reflection (AR) with good performance were performed. However, disadvantages of the method are needed to be overcome, such as high costs and short lifetimes. Recently, surface micro-structures have been shown to be a good alternative potential to multi-layer thin-film AR coatings in many infrared and visible-band applications.
Large-scale periodic dot matrix anti-reflective microstructures were fabricated on the surface by using UV picosecond laser with rapid line scanning to improve the infrared transmittance of As₂Se₃ glass. In the study, the laser ablation threshold of As₂Se₃ glass was concluded and the optimal line scanning method was designed. The transmittance of the fabricated chalcogenide glass increased about 10.0 % and 5.2 % in wavelength ranged from 11.0 μm~12.4 μm and 13.0 μm~14.2 μm, respectively. In addition, the static contact angles of the treated samples were increased from 71° to 84° of the untreated ones, which means there was no significant change in the wettability. The processing was carried out in air condition showing low cost, high controllability and high efficiency. Since the ultra-short pulse laser duty ratio is very small, the laser rapid scanning can be used to achieve single-pulse point by point processing on the sample surface. It only took 3.65 s to finish the fabrication of 8 mm×8 mm surface structures. Both the size and space of the surface microstructure unit can be controlled according to the application requirement. The morphology of the surface microstructure is controllable by changing the laser parameters (single pulse energy, defocus, etc.) and interval depends on the laser scanning speed, laser pulse frequency and scanning path. The removal of the chalcogenide glass induced by laser was mainly based on "cold fabrication" in which no obvious thermal effects inducing the element change on the surface were observed. Higher laser energy could induce obvious thermal effect resulting in melting of the ablation points and bump of the crater edges. The results can be provided as a guide for the laser rapid fabrication of anti-reflection micro-structure, which is suitable for the applications in infrared optical material and other optical materials in a low-cost and controllable way.