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摘要:
在光学系统中使用非球面可以有效校正像差，改善像质，进而简化系统结构；并且增大系统口径可以从根本上提高系统的分辨本领，因此在基础科学研究、天文学宇宙探测以及国防安全等领域都对大口径非球面镜有着迫切需求。大口径非球面的制造在现代光学制造工程中扮演着重要的角色。本文以大口径非球面镜的先进制造为主题，对大口径非球面镜的光学加工技术，特别是研磨抛光技术及其过程中所采用的面形检测方法进行了综述，特别总结了新一代先进光学制造的技术特征，展望了未来大口径非球面镜的制造策略。
Abstract:The aspheric surface can correct the system aberration and improve the image quality in the optical imaging system, in addition to that it can simplify the system structure significantly; On the other hand, the resolution of imaging system can be increased by improving the system aperture. Therefore, in the domain of basic scientific research, astronomical cosmological exploration and military defense security the large-aperture aspheric mirrors are all highly required. The manufacturing of large-aperture aspheric mirrors plays a critical role in modern optical engineering. This paper focuses on the advanced manufacturing techniques of large-aperture aspheric mirrors. The optical manufacturing technologies, especially the grinding and polishing techniques of large-aperture aspheric mirrors in the past half century and the surface shape testing methods during the grinding and polishing process, are reviewed. In particular, it summarizes the technical characteristics of advanced (new generation) optical manufacturing, and looks forward to the future manufacturing strategy of large-diameter aspheric mirrors.
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Key words:
- large-aperture aspheric mirror /
- optical manufacturing /
- optical testing
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Overview: In optical imaging system, the aspheric surfaces possess outstanding aberration correction capability comparing to traditional spherical surfaces. Using asphere in optic design can simplify the optical system dramatically, which is especially beneficial to many space-based optical systems. Therefore, aspheric optics are playing an increasingly important role in modern optical system. It is known to us the system aperture determines the system's resolution based on Rayleigh criterion, therefore, the system aperture is getting larger and larger to obtain a keener resolution. In this paper we first introduced the rushing needs of large-aperture aspheric mirrors in modern optical engineering, e.g. high-resolution earth observation camera, high-power laser weapon, large ground- or space-based telescope, inertial confinement fusion (ICF), and also modern EUV lithography machine. There's no doubt that the manufacturing of large-aperture aspheric mirror is of great interest in modern optical engineering. Over the past century, lots of manufacturing techniques are developed, and we summarized the optical manufacturing and optical testing techniques of large-aperture aspheric mirror based on our practical optical manufacturing experience in our institute. In optical manufacturing, the grinding and polishing process are of critical importance, therefore we mainly focus on the representative polishing and testing techniques. For optical polishing, we classified the techniques into three generations, the first generation is traditional mechanical polishing which is an indeterministic processing tool; the second generation is computer controlled optical surfacing (CCOS) which is deterministic and already widely used for large-aperture mirror manufacturing in our country; the third generation is called controllable adaptive polishing, e.g. stressed/active lap polishing, bonnet polishing, magnetorheological finishing (MRF) polishing, ion beam figuring (IBF), et al. The controllable adaptive polishing techniques are advanced and are necessary for high accuracy large-aperture aspheric mirrors. Optical testing techniques are also reviewed. They are classified by different principles, e.g. coordinate measurement techniques, geometric light methods and physical optics methods (interferometry). Different methods can serve for different procedures during the grinding and polishing process. Generally speaking, large dynamic range, high accuracy, and also more adaptive testing techniques is the trend of optical testing. But one should bear in mind that the manufacture of large-aperture aspheric mirror is a complex and long process, no testing methods can cover the whole process, typically more than three testing methods are needed to ensure the optical manufacturing. In the third part we summarized the technical characteristics of advanced (new generation) optical manufacturing, and looked forward to the future manufacturing strategy of large-diameter aspheric mirrors.
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图 12 国防科大研发的磁流变抛光设备(a)及工作图(b)
Figure 12. (a) The MRF equipment manufactured by National University of Defense Technology; (b) The working diagram
图 16 国防科技大学研发的离子束抛光机
Figure 16. IBF machine manufactured by National University of Defense and Technology
图 19 中科院光电所1.3 m主镜精磨阶段激光跟踪仪面形检测
Figure 19. The surface testing of Φ1.3 m primary mirror using laser track in IOE, CAS
图 20 (a) 激光跟踪仪检测结果；(b)三坐标测量结果；(c)二者面形之差
Figure 20. (a) The surface measured by laser track; (b) The surface measured by CMM; (c) The difference between laser track and CMM
图 26 (a) 结构光测试结果；(b) Zygo干涉仪测试结果
Figure 26. (a) Surface error measured by structured light system; (b) Surface error map measured by Zygo interferometer
图 31 (a) 中科院光电所研制的红外干涉仪检测现场图；(b)红外检测最终结果
Figure 31. (a) Asphere testing using the infrared interferometer manufactured by IOE, CAS; (b) The final testing results of infrared interferometer
图 36 利用Offner补偿器检测1.3 m口径非球面主镜现场图(a)及检测结果(b)
Figure 36. (a) The diagram of null test of Φ1.3 m aspheric surface using Offner corrector; (b) The surface error map
图 37 CGH零位检测非球面光路示意图及CGH实物图
Figure 37. (a) The schematic of null test of aspheric surface using CGH; (b) The practical CGH
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