Design of long-wavelength infrared polarizer based on sub-wavelength aluminum-ZnSe grating

Huang Zhanhua; Ma Xiaoqing; Zhu Pan; Zhang Yanan; Cai Huaiyu; Zhang Yinxin

doi:10.3969/j.issn.1003-501X.2017.07.001

Article navigation > Opto-Electronic Engineering > 2017 Vol. 44 > No. 7 > 663-669

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Huang Zhanhua, Ma Xiaoqing, Zhu Pan, et al. Design of long-wavelength infrared polarizer based on sub-wavelength aluminum-ZnSe grating[J]. Opto-Electronic Engineering, 2017, 44(7): 663-669. doi: 10.3969/j.issn.1003-501X.2017.07.001

Citation:

Huang Zhanhua, Ma Xiaoqing, Zhu Pan, et al. Design of long-wavelength infrared polarizer based on sub-wavelength aluminum-ZnSe grating[J]. Opto-Electronic Engineering, 2017, 44(7): 663-669. doi: 10.3969/j.issn.1003-501X.2017.07.001

Design of long-wavelength infrared polarizer based on sub-wavelength aluminum-ZnSe grating

1.
College of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin 300072, China
2.
Key Laboratory of Opto-electronics Information Technology (Tianjin University), Ministry of Education, Tianjin 300072, China

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Corresponding author: Ma Xiaoqing, E-mail: maxiaoqing@tju.edu.cn

Received Date 18 March 2017

Revised Date 11 April 2017

Published Date 15 July 2017

Abstract

Abstract

A dual-layered sub-wavelength grating consisting of two kinds of materials, aluminum and ZnSe, is developed to improve the performance of polarimetric elements in long-wavelength infrared (LWIR) polarization imaging system. Parameters of the designed grating's morphological structure are optimized on the basis of analyzing the effects on the polarization performance through the rigorous coupled wave theory, which helpfully calculates the diffraction efficiency. With a rectangular profile, the grating designed for applications in LWIR band has periods of 1 μm and 50%-fill-factor. The depths of aluminum and ZnSe in the grating region are 0.6 μm and 0.4 μm respectively. A TM transmission greater than 87.54% with an extinction ratio exceeding 47 dB is achieved in the 7~15 μm band when the angle of incidence is from zero to sixty degree. The grating maintains an extinction ratio better than 50 dB and TM transmission over 90.80% above 10.6 μm incident wavelength, which is superior to single-layered aluminum gratings with the same depth in the transmission performance in comparison. The simulation results show that this grating has excellent polarization performance in the broad LWIR band.
- diffractive optics /
- dual-layered sub-wavelength gratings /
- rigorous coupled wave analysis (RCWA) /
- wire-grid polarizer(WGP) /
- long-wavelength infrared(LWIR)

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References

[1]	Yemelyanov K M, Lin S S, Luis W Q, et al. Bio-inspired display of polarization information using selected visual cues[J]. Proceedings of the SPIE, 2003, 5158: 71‒84. doi: 10.1117/12.506084 CrossRef Google Scholar
[2]	Lin S S, Yemelyanov K M, Pugh E N, et al. Polarization en-hanced visual surveillance techniques[C]// IEEE International Conference on Networking, Sensing and Control, 2004, 1: 216‒221.https://ieeexplore.ieee.org/document/1297437/ Google Scholar
[3]	Gartley M G. Polarimetric modeling of remotely sensed scenes in the thermal infrared[D]. Rochester: Rochester Institute of Technology, 2007.http://scholarworks.rit.edu/cgi/viewcontent.cgi?article=9247&=&context=theses&=&sei-redir=1&referer=http%253A%252F%252Fcn.bing.com%252Fsearch%253Fq%253DPolarimetric%252Bmodeling%252Bof%252Bremotely%252Bsensed%252Bscenes%252Bin%252Bthe%252Bthermal%252Binf%2526qs%253Dn%2526form%253DQBRE%2526sp%253D-1%2526pq%253Dpolarimetric%252Bmodeling%252Bof%252Bremotely%252Bsensed%252Bscenes%252Bin%252Bthe%252Bthermal%252Binf%2526sc%253D0-66%2526sk%253D%2526cvid%253DACDC179B6E6248A5A1A939734A7F325B#search=%22Polarimetric%20modeling%20remotely%20sensed%20scenes%20thermal%20inf%22 Google Scholar
[4]	张娜, 褚金奎, 赵开春, 等.基于严格耦合波理论的亚波长金属光栅偏振器设计[J].传感技术学报, 2006, 19(5): 1739‒1743. Google Scholar Zhang Na, Chu Jinkui, Zhao Kaichun, et al. The design of the subwavelength wire-grid polarizers based on rigorous cou-ple-wave theory[J]. Chinese Journal of Sensors and Actuators, 2006, 19(5): 1739‒1743. Google Scholar
[5]	孟凡涛, 褚金奎, 韩志涛, 等.亚波长金属光栅偏振器设计[J].纳米技术与精密工程, 2007, 5(4): 269‒272. Google Scholar Meng Fantao, Chu Jinkui, Han Zhitao, et al. Design of the sub-wavelength wire-grid polarizers[J]. Nanotechnology and Precision Engineering, 2007, 5(4): 269‒272. Google Scholar
[6]	Chen C M, Niu Peilun, Sung C K, et al. Fabricating bi-layered metallic wire-grid polarizers by nanoimprint and O₂ plasma etching[J]. Microelectronic Engineering, 2013, 102: 53‒59. doi: 10.1016/j.mee.2012.05.025 CrossRef Google Scholar
[7]	周阳. 全息深亚波长光栅技术研究[D]. 苏州: 苏州大学, 2015. Google Scholar Zhou Yang. The research of deep-subwavelength grating by holographic-immersion lithography[D]. Suzhou: Soochow Uni-versity, 2015.http://cdmd.cnki.com.cn/Article/CDMD-10285-1015406116.htm Google Scholar
[8]	廖艳林, 韩正甫, 曹卓良.亚波长金属/电介质双层光栅偏振片[J].中国科学技术大学学报, 2005, 35(5): 650‒655. Google Scholar Liao Yanlin, Han Zhengfu, Cao Zhuoliang. Polarizer based on double layer subwavelength metal dielectric grating structure[J]. Journal of University of Science and Technology of China, 2005, 35(5): 650‒655. Google Scholar
[9]	李以贵, 杉山进.基于X光光刻的亚波长光栅[J].纳米技术与精密工程, 2007, 5(4): 249‒252. Google Scholar Li Yigui, Sugiyama S. Sub-wavelength gratings based on X-ray lithography[J]. Nanotechnology and Precision Engineering, 2007, 5(4): 249‒252. Google Scholar
[10]	Ebbesen T W, Lezec H J, Ghaemi H F, et al. Extraordinary optical transmission through sub-wavelength hole arrays[J]. Nature, 1998, 391(6668): 667‒669. doi: 10.1038/35570 CrossRef Google Scholar
[11]	Brundrett D L, Glytsis E N, Gaylord T K. Homogeneous layer models for high-spatial-frequency dielectric surface-relief grat-ings: conical diffraction and antireflection designs[J]. Applied Optics, 1994, 33(13): 2695‒2706. doi: 10.1364/AO.33.002695 CrossRef Google Scholar
[12]	郭庆. 金属光栅偏振器设计及其工艺仿真[D]. 大连: 大连理工大学, 2009. Google Scholar Guo Qing. The designing and fabrication process simulation of the wire-grid polarizer[D]. Dalian: Dalian University of Technol-ogy, 2009.http://cdmd.cnki.com.cn/Article/CDMD-10141-2010020627.htm Google Scholar
[13]	Moharam M G, Pommet D A, Grann E B, et al. Stable imple-mentation of the rigorous coupled-wave analysis for sur-face-relief gratings: enhanced transmittance matrix approach[J]. Journal of the Optical Society of America A, 1995, 12(5): 1077‒1086. doi: 10.1364/JOSAA.12.001077 CrossRef Google Scholar
[14]	康果果, 谭峤峰, 陈伟力, 等.亚波长金属线栅的设计、制备及偏振成像实验研究[J].物理学报, 2011, 60(1): 337‒343. Google Scholar Kang Guoguo, Tan Qiaofeng, Chen Weili, et al. Design and fabrication of sub-wavelength metal wire-grid and its application to experimental study of polarimetric imaging[J]. Acta Physica Sinica, 2011, 60(1): 337‒343. Google Scholar
[15]	张亮, 李承芳. 150 nm亚波长铝光栅的近红外偏振特性[J].中国激光, 2006, 33(4): 467‒471. Google Scholar Zhang Liang, Li Chengfang. Polarization effect of 150nm subwavelength aluminum wire grating in near infrared[J]. Chi-nese Journal of Lasers, 2006, 33(4): 467‒471. Google Scholar
[16]	Hasman E, Bomzon Z, Niv A, et al. Polarization beam-splitters and optical switches based on space-variant comput-er-generated subwavelength quasi-periodic structures[J]. Optics Communications, 2002, 209(1-3): 45‒54. doi: 10.1016/S0030-4018(02)01598-5 CrossRef Google Scholar
[17]	周传宏, 王磊, 聂娅, 等.介质光栅导模共振耦合波分析[J].物理学报, 2002, 51(1): 68‒73. doi: 10.7498/aps.51.68 CrossRef Google Scholar Zhou Chuanhong, Wang Lei, Nie Ya, et al. The rigorous coupled-wave analysis of guided-mode resonance in dielectric gratings[J]. Acta Physica Sinica, 2002, 51(1): 68‒73. doi: 10.7498/aps.51.68 CrossRef Google Scholar
[18]	曾海芳. 红外偏振成像的关键技术研究[D]. 南京: 南京理工大学, 2012.http://cdmd.cnki.com.cn/Article/CDMD-10288-1012320221.htm Google Scholar
[19]	卓丽霞. 亚波长金属光栅结构的红外特性研究[D]. 成都: 电子科技大学, 2011.http://cdmd.cnki.com.cn/Article/CDMD-10614-1011194236.htm Google Scholar

Overview

Overview

Abstract: Polarization measurement is able to effectively solve the problems that are beyond the reach of conventional photometry. When it comes to long-wavelength infrared (LWIR) polarization imaging system, polarization device plays a vital role in measuring the targets’ radiation and reflection and distinguishing them from busy background, which compensates for the lack of traditional thermal imaging if the difference in temperature is unobservable. Sub-wavelength wire-grid polarizer (WGP) is characterized by small volume and compact structure with the micro- or nano-manufacturing technology. It is a grating structure whose period is smaller than the incident wavelength and when that is smaller than the critical one, the grating will only have zero-ordered diffraction, which helps improve the utilization ratio of polarization information. A dual-layered sub-wavelength grating consisting of two kinds of materials, aluminum and ZnSe, is developed to improve the performance of polarimetric elements in LWIR polarization imaging system. Parameters of the designed grating’s morphological structure are optimized on the basis of analyzing the effects on the polarization performances through the rigorous coupled wave theory, which helps describe the diffraction of electromagnetic waves by periodic grating structures and calculate diffractive efficiencies of different orders. With a rectangular profile, the grating designed for applications in LWIR band has a structure of 1μm-period and 50%-fill-factor. The depths of aluminum and ZnSe in the grating region are 0.6 μm and 0.4 μm respectively. A TM transmission greater than 87.54% with an extinction ratio exceeding 47 dB is achieved in the 7 μm ~15 μm band when the angle of incidence is from zero to sixty degree. The grating maintains an extinction ratio better than 50 dB and TM transmission over 90.80% above 10.6 μm incident wavelength, which is superior to single-layered aluminum gratings with the same depth in the transmission performance in comparison. The structure is featured for the excessive etching on substrate, resulting in a series of air grooves. Therefore, the dielectric grating layer beneath the metal wire grid is formed. This method for improving polarization performances is easier to implement than coating anti-reflective films. It is investigated that the TM transmission increases with the depths of both metal and dielectric layers when the extinction ratio is dominated by the depth of metal layer, while the single-layered ZnSe grating shows little potential in extinction ability for the lack of metal component. Compared with the existed designs of WGP, the simulation results show that the TM transmission and extinction ratio are effectively improved in broad LWIR band with the proposed structure. Besides, the angle-tolerance indicates that the design has great capability in applications with wide field angle.