An oblique incidence dynamic phase-shifting interferometer based on inclination angle deflection is proposed to quickly obtain the surface distribution of optical surface with flatness of micron dimension. A 2×2 point source array is introduced into a Michelson interference system, and the incidence angle of each point source on the interferometer cavity is adjusted precisely to induce equal phase shift. Spatial separation is realized in combination with a lens array. The four phase-shifting interferograms are captured simultaneously on a single CCD, thereby realizing dynamic measurement. The flatness of a 35 mm aperture silicon wafer is measured at oblique incidence angle of 68°, the root mean square (RMS) is 1.631 μm and peak-to-valley (PV) is 9.082 μm. The experimental results indicate that the proposed interferometer overcomes the disturbance of vibration environment and extends the measurement range of interferometer with high precision by introducing the simultaneous phase-shifting interferometry based on inclination angle deflection into the oblique incidence interference system.
Oblique incidence dynamic phase-shifting interferometer based on inclination angle deflection
First published at:Aug 01, 2019
1 Malacara D. Optical Shop Testing[M]. 3rd ed. New York: John Wiley & Sons, 2007: 33-59.
2 Vannoni M, Martìn I F. Surface measurements in "grazing incidence" interferometry for long x-ray mirrors: theoretical limits and practical implementations[J]. Proceedings of SPIE, 2016, 9962: 996207. DOI:10.1117/12.2238623
3 Mizutani Y, Iwata T, Otani Y. Time-resolved vibrational surface profile measurement of ultrasonic motor using stroboscopic oblique incidence interferometer[J]. Proceedings of SPIE, 2010, 7855: 78550N. DOI:10.1117/12.871749
4 Wen H, Kemble C K, Bennett E E. Theory of oblique and grazing incidence Talbot-Lau interferometers and demonstration in a compact source x-ray reflective interferometer[J]. Optics Express, 2011, 19(25): 25093-25112. DOI:10.1364/OE.19.025093
5 Szwaykowski P, Bushroe F N, Castonguay R J. Interferometric system with reduced vibration sensitivity and related method: 8004687.B2[P]. 2011-12-09.
6 Millerd J E, Brock N J, Hayes J B, et al. Pixelated phase-mask dynamic interferometer[J]. Proceedings of SPIE, 2004, 5531: 304-310. DOI:10.1117/12.560807
7 Kimbrough B T. Pixelated mask spatial carrier phase shifting interferometry algorithms and associated errors[J]. Applied Optics, 2006, 45(19): 4554-4562. DOI:10.1364/AO.45.004554
8 Yu Y J, Peng J, Wang Z Q. Spatial phase-shifting interferential system on polarization interference and grating beam-splitting: phase-shifting error testing[J]. Journal of Physics: Conference Series, 2006, 48(1): 992-997. DOI:10.1088/1742-6596/48/1/185
9 Zhu W H, Chen L, Zheng D H, et al. Dynamic Fizeau interferometer based on the lateral displacements of the point sources[J]. Optics and Lasers in Engineering, 2017, 91: 216-220. DOI:10.1016/j.optlaseng.2016.12.007
10 Robledo-Sanchez C, Juarez-Salazar R, Meneses-Fabian C, et al. Phase-shifting interferometry based on the lateral displacement of the light source[J]. Optics Express, 2013, 21(14): 17228-17233. DOI:10.1364/OE.21.017228
11 Langenbeck P. Interferometry for Precision Measurement[M]. Bellingham, Washington: SPIE, 2014: 39-53.
12 Born M, Wolf E. Principles of Optics[M]. 7th ed. Cambridge: Cambridge University Press, 1999: 261-270.
13 Geary J M. Introduction to Lens Design[M]. Viriginia: Willmann Bell, Inc, 2002: 389-396.
National Natural Science Foundation of China (U1731115)
Get Citation: Liu Zhiyuan, Chen Lei, Zhu Wenhua, et al. Oblique incidence dynamic phase-shifting interferometer based on inclination angle deflection[J]. Opto-Electronic Engineering, 2019, 46(8): 180516.