With the continuous development of modern optics, such as EUV, DUV lithography and the advanced light source, the surface interferometric measurement with higher accuracy has become an important challenge. The surface accuracy as one of key technical parameters will be required to nanometer, sub-nanometer, even picometer. The surface interferometric measurement with higher accuracy push the limits of surface metrology, has important research significance and application value. This paper analyzes the development trends of surface interferometric measurement with higher accuracy and reports the related research progress of Institute of Optics and Electronics, Chinese Academy of Sciences.
The research progress of surface interferometric measurement with higher accuracy
First published at:Aug 31, 2020
1 Dörband B, Seitz G. Interferometric testing of optical surfaces at its current limit[J]. Optik, 2001, 112(9): 392–398. DOI:10.1078/0030-4026-00081
2 Featured News from SPIE[EB/OL]. https://www.spie.org/news/taking-optical-precision-to-the-extreme?SSO=1.
3 He Y W, Hou X, Wu Y Q, et al. Modeling Fizeau interferometer based on ray tracing with Zemax[J]. Proceedings of SPIE, 2015, 9677: 96770G.
4 Gu W, Song W H, Wu G F, et al. Model-based multi-fringe interferometry using Zernike polynomials[J]. Optics and Lasers in Engineering, 2018, 105: 198–200. DOI:10.1016/j.optlaseng.2018.01.020
5 He Y W, Hou X, Quan H Y, et al. Retrace error reconstruction based on point characteristic function[J]. Optics Express, 2015, 23(22): 28216–28223. DOI:10.1364/OE.23.028216
6 Wang H, Zhou F, Wang L P, et al. Analysis and metrology of reproducibility of high-precision optic mount[J]. Chinese Journal of Lasers, 2013, 40(12): 1208001.
7 Zhao S W, Tian A L, Wang D D, et al. Influence of the clamping and gravity deformation on absolute test of large plane[J]. Acta Photonica Sinica, 2018, 47(2): 0212004.
8 Fritz B S. Absolute calibration of an optical flat[J]. Proceedings of SPIE, 1983, 433: 123–130. DOI:10.1117/12.936799
9 Quan H Y, Hou X, Wu F, et al. Absolute measurement of optical flats based on basic iterative methods[J]. Optics Express, 2015, 23(12): 16305–16319. DOI:10.1364/OE.23.016305
10 Song W H, Wu F, Hou X, et al. Absolute measurement of flats with the method of shift-rotation[J]. Optical Review, 2013, 20(5): 374–377. DOI:10.1007/s10043-013-0067-5
11 Song W H, Hou X, Wu F, et al. Absolute interferometric shift-rotation method with pixel-level spatial frequency resolution[J]. Optics and Lasers in Engineering, 2014, 54: 68–72. DOI:10.1016/j.optlaseng.2013.10.015
12 Truax B E. Absolute interferometric testing of spherical surfaces[J]. Proceedings of SPIE, 1991, 1400: 61–68. DOI:10.1117/12.26111
13 Hou X, Yang P, Wu F, et al. Comparative experimental study on absolute measurement of spherical surface with two-sphere method[J]. Optics and Lasers in Engineering, 2011, 49(7): 833–840. DOI:10.1016/j.optlaseng.2011.03.002
14 Song W H, Li S F, Hou X, et al. Absolute calibration for Fizeau interferometer with the global optimized shift-rotation method[J]. Optics and Lasers in Engineering, 2014, 54: 49–54. DOI:10.1016/j.optlaseng.2013.10.005
15 Song W H, Wu F, Hou X, et al. Absolute calibration of a spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm[J]. Optical Engineering, 2013, 52(3): 033601. DOI:10.1117/1.OE.52.3.033601
16 Song W H, Wu F, Hou X, et al. Optimized absolute testing method of shift-rotation[J]. Applied Optics, 2013, 52(28): 7028–7032. DOI:10.1364/AO.52.007028
17 Song W H, Wu F, Hou X. Method to test rotationally asymmetric surface deviation with high accuracy[J]. Applied Optics, 2012, 51(22): 5567–5572. DOI:10.1364/AO.51.005567
18 Song W H. Absolute testing of spherical surface with shift-rotation method[D]. Beijing: University of Chinese Academy of Sciences, 2014.
19 Quan H Y. Uncertainty evaluation for interferometric testing of absolute surface figure error[D]. Beijing: University of Chinese Academy of Sciences, 2017.
20 Liu F W, Wang J, Wu Y Q, et al. Simultaneous extraction of phase and phase shift from two interferograms using Lissajous figure and ellipse fitting technology with Hilbert–Huang prefiltering[J]. Journal of Optics, 2016, 18(10): 105604. DOI:10.1088/2040-8978/18/10/105604
21 He Y W, Hou X, Wu F, et al. Analysis of spurious diffraction orders of computer-generated hologram in symmetric aspheric metrology[J]. Optics Express, 2017, 25(17): 20556–20572. DOI:10.1364/OE.25.020556
Get Citation: Hou Xi, Zhang Shuai, Hu Xiaochuan, et al. The research progress of surface interferometric measurement with higher accuracy[J]. Opto-Electronic Engineering, 2020, 47(8): 200209.
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