Current status of ultra-precision manufacturing of complex curved aluminum reflectors

Due to the unique advantages of complex curved aluminum mirrors, its application in optical systems is becoming more and more widespread. However, the accuracy of optical mirrors that are only processed by ultra-precision turning is limited by the "error reflection" of ultra-precision turning, which can only meet the application requirements of infrared systems, and its further promotion and application have encountered bottlenecks. The combined processing technology of ultra-precision turning, magnetorheological polishing, and computer-controlled surface forming (CCOS), combined with the computational hologram method (CGH) of the complex optical curved surface (CGH) surface shape detection technology, can further improve the surface shape accuracy of the aluminum reflector, to meet the application requirements of visible light systems, and lay the foundation for the promotion and application of complex curved aluminum alloy mirrors.

1 Li X L. Research on the key technology of magnetorheological polishing of complex curved aluminum mirror[D]. Changsha: National University of Defense Technology, 2018: 1–51.

2 Zhang Y. Research on the key technologies of direct optical polishing of metal aluminum mirrors[D]. Changsha: National University of Defense Technology, 2014: 1–59.

3 Zhang D G, Fu Y T. Development and application of aluminum mirrors in optical system[J]. Infrared Technology, 2015, 37(10): 814–823.

张东阁, 傅雨田.铝合金反射镜的发展与应用[J].红外技术, 2015, 37(10): 814–823.

4 Saunders I J, Ploeg L, Dorrepaal M, et al. Fabrication and metrology of freeform aluminum mirrors for the SCUBA-2 instrument[J]. Proceedings of SPIE, 2005, 5869: 586905. DOI:10.1117/12.612998

5 Atad-Ettedgui E, Peacocke T, Montgomery D, et al. Opto-mechanical design of SCUBA-2[J]. Proceedings of SPIE, 2006, 6273: 62732H.

6 Beier M, Hartung J, Peschel T, et al. Development, fabrication, and testing of an anamorphic imaging snap-together freeform telescope[J]. Applied Optics, 2015, 54(12): 3530–3542. DOI:10.1364/AO.54.003530

7 Li R B, Kong L B, Zhang Z H, et al. An overview of ultra-precision diamond machining of microstructured freeform surfaces[J]. Journal of Mechanical Engineering, 2013, 49(19): 144–155.

李荣彬, 孔令豹, 张志辉, 等.微结构自由曲面的超精密单点金刚石切削技术概述[J].机械工程学报, 2013, 49(19): 144–155.

8 Wang G L, Zhu D C, Dai Y F. Machining characteristics and route planning of complex optical surface by using fast tool servo[J]. Journal of Mechanical Engineering, 2011, 47(15): 175–180.

王贵林, 朱登超, 戴一帆.复杂光学表面的快刀伺服加工特性与路径规划[J].机械工程学报, 2011, 47(15): 175–180.

9 Guan C L. Study on the technology of slow tool servo ultra-precision diamond turning for complex optical surface[D]. Changsha: National University of Defense Technology, 2010: 1–132.

10 Kirschstein S, Koch A, Schöneich J, et al. Metal mirror TMA, telescopes of the JSS product line: design and analysis[J]. Proceedings of SPIE, 2005, 5962: 59621M. DOI:10.1117/12.624354

11 Risse S, Gebhardt A, Damm C, et al. Novel TMA telescope based on ultra precise metal mirrors[J]. Proceedings of SPIE, 2008, 7010: 701016. DOI:10.1117/12.789824

12 Deng J Q. Study on the key techniques of ultra-precision polishing of aluminum alloy mirrors[D]. Changsha: National University of Defense Technology, 2017: 1–71.

13 Scheiding S, Damm C, Holota W, et al. Ultra-precisely manufactured mirror assemblies with well-defined reference structures[J]. Proceedings of SPIE, 2010, 7739: 773908. DOI:10.1117/12.856244

14 Risse S, Scheiding S, Gebhardt A, et al. Development and fabrication of a hyperspectral, mirror based IR-telescope with ultra-precise manufacturing and mounting techniques for a snap-together system assembly[J]. Proceedings of SPIE, 2011, 8176: 81761N. DOI:10.1117/12.898025

15 Long B, Xing T W, Liao S. Design of stress-relief support of aluminum mirrors and assembly assisted by SPDT[J]. Opto-Electronic Engineering, 2014, 41(3): 1–6. DOI:10.3969/j.issn.1003-501X.2014.03.001

龙波, 邢廷文, 廖胜.铝镜消应力支撑及SPDT辅助装配设计[J].光电工程, 2014, 41(3): 1–6. DOI:10.3969/j.issn.1003-501X.2014.03.001

16 Liu M, Zhang L Z, Li X, et al. Design of flexure support of space compact reflector subassembly and dynamic analysis[J]. Opto-Electronic Engineering, 2018, 45(5): 170686. DOI:10.12086/oee.2018.170686

柳鸣, 张立中, 李响, 等.空间轻小型反射镜柔性支撑设计与动力学分析[J].光电工程, 2018, 45(5): 170686. DOI:10.12086/oee.2018.170686

17 Ge K G, Li S Y, Hu H. Parameters optimization of surface quality control on magnetorheological finishing for aluminum alloy mirror[J]. Nanotechnology and Precision Engineering, 2017, 15(2): 151–157.

葛坤鹏, 李圣怡, 胡皓.铝合金反射镜磁流变抛光表面质量控制的参数优化[J].纳米技术与精密工程, 2017, 15(2): 151–157.

18 Schaefer J P. Advanced metal mirror processing for tactical ISR systems[J]. Proceedings of SPIE, 2013, 8713: 871306. DOI:10.1117/12.2015496

19 Beier M, Scheiding S, Gebhardt A, et al. Fabrication of high precision metallic freeform mirrors with magnetorheological finishing (MRF)[J]. Proceedings of SPIE, 2013, 8884: 88840S. DOI:10.1117/12.2035986

20 Zhou L. Study on theory and technology in ion beam figuring for optical surfaces[D]. Changsha: National University of Defense Technology, 2008: 1–112.

21 Kinast J, Schlegel R, Kleinbauer K, et al. Manufacturing of aluminum mirrors for cryogenic applications[J]. Proceedings of SPIE, 2018, 10706: 107063G.

22 Schwalm M, Akerstrom A, Barry M, et al. Hardware results for the Wide-field Infrared Survey Explorer (WISE) telescope and scanner[J]. Proceedings of SPIE, 2010, 7731: 77310Y. DOI:10.1117/12.857499

23 Sampath D, Akerstrom A, Barry M, et al. The WISE telescope and scanner: design choices and hardware results[J]. Proceedings of SPIE, 2010, 7796: 779609. DOI:10.1117/12.864347

24 Pan L, Gong H, Fang F Z. Ultra-precision polishing process of large free-form surface aluminum miror[J]. Nanotechnology and Precision Engineering, 2015, 13(2): 108–112.

潘龙, 宫虎, 房丰洲.大尺寸自由曲面铝反射镜超精密抛光工艺[J].纳米技术与精密工程, 2015, 13(2): 108–112.

25 Zhang J Z, Zhang X, Tan S L, et al. Design and manufacture of an off-axis aluminum mirror for visible-light imaging[J]. Current Optics and Photonics, 2017, 1(4): 364–371.

26 Zhao T, Hu H, Peng X Q, et al. Study on the surface crystallization mechanism and inhibition method in the CMP process of aluminum alloy mirrors[J]. Applied Optics, 2019, 58(22): 6091–6097. DOI:10.1364/AO.58.006091

27 Li H Y, Walker D, Zheng X, et al. Advanced techniques for robotic polishing of aluminum mirrors[J]. Proceedings of SPIE, 2018, 10692: 106920N.

28 Li H Y, Walker D D, Zheng X, et al. Mid-spatial frequency removal on aluminum free-form mirror[J]. Optics Express, 2019, 27(18): 24885–24899. DOI:10.1364/OE.27.024885

29 Hartung J, Vov Lukowicz H, Kinast J. Theoretical compensation of static deformations of freeform multimirror substrates[J]. Applied Optics, 2018, 57(15): 4020–4031. DOI:10.1364/AO.57.004020

30 Li F Z, Zheng L G, Yan F, et al. Optical testing method and its experiment on freeform surface with computer-generated hologram[J]. Infrared and Laser Engineering, 2012, 41(4): 1052–1056.

黎发志, 郑立功, 闫锋, 等.自由曲面的CGH光学检测方法与实验[J].红外与激光工程, 2012, 41(4): 1052–1056.

31 Gan Z H, Peng X Q, Chen S Y. CGH key technology for inspection and calibration of complex surfaces[J]. China Metrology, 2019, 24(6): 80–85.

甘子豪, 彭小强, 陈善勇.用于复杂曲面检验校准的CGH关键技术[J].中国计量, 2019, 24(6): 80–85.

32 Ma J, Pruss C, Häfner M, et al. Systematic analysis of the measurement of cone angles using high line density computer-generated holograms[J]. Optical Engineering, 2011, 50(5): 055801. DOI:10.1117/1.3575649

33 Poleshchuk A G, Korolkov V P, Nasyrov R K, et al. Computer generated holograms: Fabrication and application for precision optical testing[J]. Proceedings of SPIE, 2008, 7102: 710206. DOI:10.1117/12.797816

34 Scheiding S, Beier M, Zeitner U D, et al. Freeform mirror fabrication and metrology using a high performance test CGH and advanced alignment features[J]. Proceedings of SPIE, 2013, 8613: 86130J. DOI:10.1117/12.2001690

35 Xie Y, Chen Q, Wu F, et al. Concave aspherical surface testing with twin computer-generated holograms[J]. Acta Optica Sinica, 2008, 28(7): 1313–1317.

谢意, 陈强, 伍凡, 等.用双计算全息图检测凹非球面[J].光学学报, 2008, 28(7): 1313–1317.

36 Gan Z H, Peng X Q, Chen S Y, et al. Fringe discretization and manufacturing analysis of a computer-generated hologram in a null test of the freeform surface[J]. Applied Optics, 2018, 57(34): 9913–9921. DOI:10.1364/AO.57.009913

Keywords:

complex curved surface; aluminum mirror; ultra-precision turning; polishing; computer-generated hologram (CGH)

Funds:

Science Challenge Project (TZ2018006) and National Natural Science Foundation of China (51835013)

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Get Citation: Xu Chao, Peng Xiaoqiang, Dai Yifan. Current status of ultra-precision manufacturing of complex curved aluminum reflectors[J]. Opto-Electronic Engineering, 2020, 47(8): 200147.

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