Du D, Huang Y T, Fan B. Research on flying cutting technology with micro pyramid array structure[J]. Opto-Electron Eng, 2020, 47(8): 190179. doi: 10.12086/oee.2020.190179
Citation: Du D, Huang Y T, Fan B. Research on flying cutting technology with micro pyramid array structure[J]. Opto-Electron Eng, 2020, 47(8): 190179. doi: 10.12086/oee.2020.190179

Research on flying cutting technology with micro pyramid array structure

More Information
  • The fabrication of optical elements with microstructural arrays has attracted more and more attention. Single-point diamond flying cutting technology has been gradually applied to the fabrication of microstructures with the advantages of high efficiency, low cost and high machining accuracy. This paper mainly studies the influence of repeated positioning errors of machine tools and errors introduced by cyclic machining on micro-structure turning effect when flying cutter turning micro-pyramid structure, analyses the conditions of secondary groove generation in V-groove turning, studies the methods of restraining secondary groove generation, and finally verifies through experiments that the generation of secondary groove can be restrained by controlling the turning depth greater than the minimum turning depth.
  • 加载中
  • [1] Laux E, Genet C, Skauli T, et al. Plasmonic photon sorters for spectral and polarimetric imaging[J]. Nature Photonics, 2008, 2(3): 161-164. doi: 10.1038/nphoton.2008.1

    CrossRef Google Scholar

    [2] Chen Q, Cumming D R S. High transmission and low color cross-talk plasmonic color filters using triangular-lattice hole arrays in aluminum films[J]. Optics Express, 2010, 18(13): 14056-14062. doi: 10.1364/OE.18.014056

    CrossRef Google Scholar

    [3] Lee H S, Yoon Y T, Lee S S, et al. Color filter based on a subwavelength patterned metal grating[J]. Optics Express, 2007, 15(23): 15457-15463. doi: 10.1364/OE.15.015457

    CrossRef Google Scholar

    [4] Yamazaki K, Namatsu H. 5-nm-order electron-beam lithography for nanodevice fabrication[J]. Japanese Journal of Applied Physics, 2004, 43(6S): 3767.

    Google Scholar

    [5] Melngailis J. Focused ion beam lithography[J]. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993, 80-81: 1271-1280. doi: 10.1016/0168-583X(93)90781-Z

    CrossRef Google Scholar

    [6] Shao J Y, Ding Y C, Zhai H P, et al. Fabrication of large curvature microlens array using confined laser swelling method[J]. Optics letters, 2013, 38(16): 3044-3046. doi: 10.1364/OL.38.003044

    CrossRef Google Scholar

    [7] Zhang Y L, Chen Q D, Xia H, et al. Designable 3D nanofabrication by femtosecond laser direct writing[J]. Nanotoday, 2010, 5(5): 435-448. doi: 10.1016/j.nantod.2010.08.007

    CrossRef Google Scholar

    [8] Le D, Lee J M, Kim S J, et al. Burr analysis in microgrooving[J]. The International Journal of Advanced Manufacturing Technology, 2010, 50(5-8): 569-577. doi: 10.1007/s00170-010-2516-7

    CrossRef Google Scholar

    [9] Deng Y J, Yi P Y, Peng L F, et al. Experimental investigation on the large-area fabrication of micro-pyramid arrays by roll-to-roll hot embossing on PVC film[J]. Journal of Micromechanics and Microengineering, 2014, 24(4): 045023. doi: 10.1088/0960-1317/24/4/045023

    CrossRef Google Scholar

    [10] Yan J W, Oowada T, Zhou T F, et al. Precision machining of microstructures on electroless-plated NiP surface for molding glass components[J]. Journal of Materials Processing Technology, 2009, 209(10): 4802-4808. doi: 10.1016/j.jmatprotec.2008.12.008

    CrossRef Google Scholar

    [11] Zhu Z W, To S, Zhang S J. Theoretical and experimental investigation on the novel end-fly-cutting-servo diamond machining of hierarchical micro-nanostructures[J]. International Journal of Machine Tools and Manufacture, 2015, 94: 15-25. doi: 10.1016/j.ijmachtools.2015.04.002

    CrossRef Google Scholar

    [12] Chao. Study on fabricating of micro-pyramid array by precision diamond turning[J]. Procceding of SPIE, 2013, 8769: 87691C.

    Google Scholar

    [13] Wu D X, Li G, Wang B, et al. Fabrication of microstructured surfaces by five-axis ultra precision machine tool[J]. Key Engineering Materials, 2014, 625: 187-191. doi: 10.4028/www.scientific.net/KEM.625.187

    CrossRef Google Scholar

  • Overview: Microstructure optical elements are playing an increasingly important role in optical systems, and the corresponding application needs promote the research of microstructural processing technology. The main processing methods of optical microstructures are optical lithography, electron beam direct writing and focused ion beam etching. These methods all have shortcomings in universality and efficiency of processing materials. Especially for the thin film optical microstructures with gradual profile, when the refractive index of the optical materials changes along the normal direction of the structure, the processing method mentioned above is more complicated and difficult to guarantee the accuracy of the preparation. Single-point diamond flying tool turning has attracted wide attention due to its advantages of high efficiency, low cost and high precision. Considering the linkage of machine tool axis, we use end face flying cut by four axis linkage. The principle of flying cutter turning micro-pyramid structure is profiling, and the shape of the cutter is carved on the surface of the workpiece. This ultra-precision turning method requires strict processing conditions, and any small errors introduced by minor changes will affect the final turning results. For example, the repeated positioning errors of machine tools and the vibration interference in the process of machining will affect the turning surface quality. Especially in the processing of micro-structure arrays with micron size, the ultimate impact is the deviation of tool center, which makes unexpected errors on the turning surface. We study the micro-structure size error caused by tool center deviation. By analyzing the influence of tool center offset on the turning results of micro-V groove in the process of cyclic machining, the reason of secondary groove in V groove turning is obtained, and the method of restraining secondary groove is put forward, that is, controlling the depth of single turning is greater than the error of tool center offset. According to the processing conditions and experiments, the maximum deviation error of the tool center can be obtained, which is the minimum turning depth of the fly cutting when turning the micro-structure. To ensure that the turning depth is greater than this value, the generation of sub-grooves can be restrained. The validity of the theoretical analysis is verified by the experiment of turning micro-V groove and micro-pyramid structure with fly cutting. When the single turning depth is less than the deviation error of tool center, the turning results of micro-V groove and micro-pyramid structure are the same as the theoretical analysis.

  • 加载中
通讯作者: 陈斌, bchen63@163.com
  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

  1. 本站搜索
  2. 百度学术搜索
  3. 万方数据库搜索
  4. CNKI搜索

Figures(7)

Tables(1)

Article Metrics

Article views(5855) PDF downloads(1657) Cited by(0)

Access History

Other Articles By Authors

Article Contents

Catalog

    /

    DownLoad:  Full-Size Img  PowerPoint