The field calibration of straightness is an important method to ensure the accuracy of on-line measurement. Based on the transceiver integrated laser five-degree-of-freedom measurement structure, the field calibration model was established aiming at the Abbe error, and the imaging error of retroreflector caused by the calibration platform. According to the calibration model and the angle measurement results of the five-degree-of-freedom measuring device, a compensation method of straightness calibration errors was proposed. Experimental results showed that the calibration coefficient error was within 0.2% when using the calibration method, and the calibration errors of straightness were effectively reduced. The calibration method made the error of calibration coefficient reduce to less than 0.2%, and effectively improved the accuracy of straightness field calibration.
Research on field calibration method of straightness in five-degree-of-freedom measurement
First published at:Sep 17, 2020
 Jao M X, Feng Q B, Wang M, et al. Sensing and Measuring with Lasers[M]. Beijing: Science Press, 2014.
焦明星, 冯其波, 王鸣, 等. 激光传感与测量[M]. 北京: 科学出版社, 2014.
 Wang M H, Lou Z F, Huang Y B, et al. Research and application of a measurement system of the straightness and parallelism for guide rail[J]. Modern Machinery, 2018(5): 20–24.
王明海, 娄志峰, 黄余彬, 等. 一种导轨直线度与平行度测量系统的研究与应用[J]. 现代机械, 2018(5): 20–24.
 Jin T, Liu J L, Yang W, et al. High-precision straightness interferometer for linear moving stage[J]. Optics and Precision Engineering, 2018, 26(7): 1570–1577.
金涛, 刘景林, 杨卫, 等. 线性位移台直线度高精密外差干涉测量装置[J]. 光学 精密工程, 2018, 26(7): 1570–1577.
 Xu M, Wang X K, Qian L H. A new method for measurement of straightness of ultra-precise guideway with large distance[J]. Machine Tool & Hydraulics, 2017, 45(10): 140–143.
徐淼, 王新宽, 钱林弘. 一种超精密大行程导轨直线度检测新方法[J]. 机床与液压, 2017, 45(10): 140–143.
 Cao Y P, Liu M J, Liu X L, et al. Development of an instrument for measuring large range 2-D straightness[J]. Opto-Electronic Engineering, 2004, 31(9): 57–60.
曹益平, 刘明健, 刘晓丽, 等. 大尺度二维直线度测量仪的研制[J]. 光电工程, 2004, 31(9): 57–60.
 Huang P S, Ni J. On-line error compensation of coordinate measuring machines[J]. International Journal of Machine Tools and Manufacture, 1995, 35(5): 725–738.
 Fan K C, Chen M J. A 6-degree-of-freedom measurement system for the accuracy of X-Y stages[J]. Precision Engineering, 2000, 24(1): 15–23.
 Kuang C F, Hong E, Ni J. A high-precision five-degree-of-freedom measurement system based on laser collimator and interferometry techniques[J]. Review of Scientific Instruments, 2007, 78(9): 095105.
 Bao C C, Li J K, Feng Q B, et al. Error-compensation model for simultaneous measurement of five degrees of freedom motion errors of a rotary axis[J]. Measurement Science and Technology, 2018, 29(7): 075004.
 Ni J, Huang P S, Wu S M. A multi-degree-of-freedom measuring system for CMM geometric errors[J]. Journal of Manufacturing Science and Engineering, 1992, 114(3): 362–369.
 Kuang C F, Feng Q B, Zhang B, et al. A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module[J]. Sensors and Actuators A: Physical, 2005, 125(1): 100–108.
 Feng Q B, Zhang B, Cui C X, et al. Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide[J]. Optics Express, 2013, 21(22): 25805–25819.
 You F L, Feng Q B, Zhang B. Straightness error measurement based on common-path compensation for laser beam drift[J]. Optics and Precision Engineering, 2011, 19(3): 515–519.
由凤玲, 冯其波, 张斌. 基于共路光线漂移补偿的直线度测量[J]. 光学 精密工程, 2011, 19(3): 515–519.
 Lv Y, Feng Q B, Liu L S, et al. Six-degree-of-freedom measurement method based on multiple collimated beams[J]. Infrared and Laser Engineering, 2014, 43(11): 3597–3602.
吕勇, 冯其波, 刘立双, 等. 基于多准直光的六自由度测量方法[J]. 红外与激光工程, 2014, 43(11): 3597–3602.
 Kuang C F, Feng Q B, Liu B, et al. Measuring straightness method with common path compensation for laser drift[J]. Opto-Electronic Engineering, 2005, 32(4): 32–34, 38.
匡萃方, 冯其波, 刘斌, 等. 一种共路补偿激光漂移的直线度测量方法[J]. 光电工程, 2005, 32(4): 32–34, 38.
 Saito Y, Gao W, Kiyono S. A single lens micro-angle sensor[J]. International Journal of Precision Engineering and Manufacturing, 2007, 8(2): 14–19.
National Key R&D Program of China (2017YFF0204800), the Tianjin Natural Science Foundations of China (17JCQNJC01100), Science and Technology on Underwater Information and Control Laboratory (6142218081811), Equipment Pre-Research Field Fund (61405180505, 61400040303), National Natural Science Foundations of China (51775377, 61505140), Young Elite Scientists Sponsorship Program By China Association for Science and Technology (2016QNRC001)
Get Citation: Su Yuhao, Duan Fajie, Jiang Jiajia, et al. Research on field calibration method of straightness in five-degree-of-freedom measurement[J]. Opto-Electronic Engineering, 2020, 47(9): 190451.