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Deformable mirror technologies at Institute of Optics and Electronics, Chinese Academy of Sciences
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摘要:
变形反射镜是自适应光学系统的核心部件，也是开展自适应光学技术研究的首要研究对象。本文首先介绍了中国科学院光电技术研究所从事自适应光学特别是变形反射镜技术研究的历史背景，简述了光电所变形反射镜技术早期的发展脉络。然后介绍了光电所研制的变形反射镜在我国历代惯性约束聚变系统中的应用情况，也介绍了在天文光学观测领域典型的多单元变形镜技术及应用成果，随后还介绍了应用于生物医学等领域的紧凑型变形反射镜的发展情况和研究现状。最后介绍了光电所在变形反射镜技术新方向的研究情况。
Abstract:Deformable mirror is the core component of the adaptive optics system and the primary research object for the research of adaptive optics technology. In this review, the research history of adaptive optics technology, especially the deformable mirror technologies of IOE is reviewed and the early development of our deformable mirror technology is briefly described. The application of the deformable mirror in the inertial confinement fusion (ICF) system of China is introduced and the typical multi-channel deformable mirror technology and application results in the field of astronomical optical observation is also described. Then we introduce the application of compact deformable mirror in biomedical research. At last, some new research directions of deformable mirror technology are revealed.
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Key words:
- deformable mirror /
- adaptive optics /
- wavefront
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Overview: Deformable mirror is a particular optical device which is different from general optical mirror which requires high-quality and stable surface shape, it is precisely to compensate for other aberrations in the optical system by dynamically changing its surface shape. According to the requirements of the adaptive optics system, the surface shape of the deformable mirror needs to achieve precise with nanometer-level resolution and controllable dynamic changes with millisecond-level response speed, which is very technically difficult. There are many adaptive optics research teams, but relatively few of them have the ability of manufacturing practical deformable mirrors, mainly in the United States, Europe, and Russia. The Institute of Optics and Electronics, Chinese Academy of Sciences (IOE) in China is the earliest team engaged in the research of engineered adaptive optics technology, and has become the world's largest adaptive optics research team. In terms of deformable mirror technology, IOE has carried out synchronization technology research since the beginning of adaptive optics technology research in 1979. It has been more than 40 years and has achieved many remarkable results. The deformable mirror developed by IOE covers many types of structures, with diameters ranging from several millimeters to hundreds of millimeters, and the number of actuator ranges a few to thousands. They are widely used in Chinese inertial confinement fusion system, photoelectric imaging telescope system, and human eye retinal imaging systems, satellite-to-space laser communication system, etc.
This review firstly introduces the historical background of the research on adaptive optics, especially deformable mirror technology by the Institute of Optics and Electronics, Chinese Academy of Sciences, and briefly describes the early development of our deformable mirror technology, including the first deformable mirror and the first set of adaptive optics system. Then it introduces the application of the deformable mirror developed by IOE in the Chinese inertial confinement fusion system, especially the development of the large-diameter detachable deformable mirror used in the 'Shen Guang Ⅲ' facility in recent years. It also introduces the typical multi-element deformable mirror technology and application results in the field of astronomical optical observation. Two different technological routes have been formed in the development of thousand-elements deformable mirrors, which fully guarantees the development needs of China's future large-aperture telescopes. Afterwards, the development and research status of compact deformable mirrors used in biomedicine and other fields are introduced, and finally, the research situation of new directions of deformable mirror technology of our institute was introduced.
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图 6 大口径可拆卸变形镜应用场景
Figure 6. Large aperture DMs with replaceable actuators in application site
图 8 测试中的913单元变形镜(a)及其自校正面形(b)
Figure 8. 913-element DM being tested (a) and its flattened surface map (b)
图 10 拟合Zernike像差的干涉条纹图
Figure 10. Interference fringes of Zernike aberration produced by 913-element DM
图 12 1085单元高密度变形镜实物(a)及检测结果(b)
Figure 12. 1085-element high density DM (a) and its flattened surface map (b)
图 14 人眼视网膜成像系统使用的9单元、35单元双压电片变形镜
Figure 14. Bimorph DMs used in human retinal imaging systems
图 16 变形次镜的原始面形(a)及自校正后的面形(b)
Figure 16. The initial (a) and flattened (b) surface maps of 73-element SDM
图 17 轻质空间能动镜样镜(a)及其自校正面形(b)
Figure 17. Space-based light-weight adaptive primary mirror prototype (a) and its flattened surface map (b)
表 1 大口径变形镜技术指标对比
Table 1. Specification of different large aperture DMs
LLNL实验室NIF 1代 LLNL实验室NIF 2代 光电所 单元数 39 39 39、45、77 通光口径/mm 400×400 365×365 380×380，368×330，453×400 初始面形RMS/μm —— —— ＜0.1 闭环校正面形RMS/μm 0.031 0.031 ＜0.027 驱动器行程/μm 4 4 ＞6 可校正Zernike模式项数 16 16 20 损伤阈值/(J/cm2) —— —— ≥18 反射率/% ≥99.5 ≥99.5 ≥99.5 
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