Overview of advanced manufacturing technology of large-aperture aspheric mirror

Liu Fengwei; Wu Yongqian; Chen Qiang; Liu Haitao; Yan Fengtao; Zhang Shiyang; Wan Yongjian; Wu Fan

doi:10.12086/oee.2020.200203

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Liu F W, Wu Y Q, Chen Q, et al. Overview of advanced manufacturing technology of large-aperture aspheric mirror[J]. Opto-Electron Eng, 2020, 47(10): 200203. doi: 10.12086/oee.2020.200203

Citation:

Liu F W, Wu Y Q, Chen Q, et al. Overview of advanced manufacturing technology of large-aperture aspheric mirror[J]. Opto-Electron Eng, 2020, 47(10): 200203. doi: 10.12086/oee.2020.200203

Overview of advanced manufacturing technology of large-aperture aspheric mirror

1.
Advanced Manufacturing Center of Optics, Institute of Optics and Electronics, Chinese Academy of Science, Chengdu, Sichuan 610209, China
2.
Institute of Optics and Electronics, Chinese Academy of Science, Chengdu, Sichuan 610209, China
3.
University of Chinese Academy of Science, Beijing 100049, China

Fund Project: Supported by National Natural Science Foundation of China (61905255)

More Information

Corresponding authors: Wu Yongqian, E-mail:wyq95111@sina.com; Wu Fan, E-mail:wufan@ioe.ac.cn

Received Date 03 June 2020

Revised Date 29 September 2020

Published Date 15 October 2020

Abstract

Abstract

The aspheric surface can correct the system aberration and improve the image quality in the optical imaging system, in addition to that it can simplify the system structure significantly; On the other hand, the resolution of imaging system can be increased by improving the system aperture. Therefore, in the domain of basic scientific research, astronomical cosmological exploration and military defense security the large-aperture aspheric mirrors are all highly required. The manufacturing of large-aperture aspheric mirrors plays a critical role in modern optical engineering. This paper focuses on the advanced manufacturing techniques of large-aperture aspheric mirrors. The optical manufacturing technologies, especially the grinding and polishing techniques of large-aperture aspheric mirrors in the past half century and the surface shape testing methods during the grinding and polishing process, are reviewed. In particular, it summarizes the technical characteristics of advanced (new generation) optical manufacturing, and looks forward to the future manufacturing strategy of large-diameter aspheric mirrors.
- large-aperture aspheric mirror /
- optical manufacturing /
- optical testing

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References

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Overview

Overview

Overview: In optical imaging system, the aspheric surfaces possess outstanding aberration correction capability comparing to traditional spherical surfaces. Using asphere in optic design can simplify the optical system dramatically, which is especially beneficial to many space-based optical systems. Therefore, aspheric optics are playing an increasingly important role in modern optical system. It is known to us the system aperture determines the system's resolution based on Rayleigh criterion, therefore, the system aperture is getting larger and larger to obtain a keener resolution. In this paper we first introduced the rushing needs of large-aperture aspheric mirrors in modern optical engineering, e.g. high-resolution earth observation camera, high-power laser weapon, large ground- or space-based telescope, inertial confinement fusion (ICF), and also modern EUV lithography machine. There's no doubt that the manufacturing of large-aperture aspheric mirror is of great interest in modern optical engineering. Over the past century, lots of manufacturing techniques are developed, and we summarized the optical manufacturing and optical testing techniques of large-aperture aspheric mirror based on our practical optical manufacturing experience in our institute. In optical manufacturing, the grinding and polishing process are of critical importance, therefore we mainly focus on the representative polishing and testing techniques. For optical polishing, we classified the techniques into three generations, the first generation is traditional mechanical polishing which is an indeterministic processing tool; the second generation is computer controlled optical surfacing (CCOS) which is deterministic and already widely used for large-aperture mirror manufacturing in our country; the third generation is called controllable adaptive polishing, e.g. stressed/active lap polishing, bonnet polishing, magnetorheological finishing (MRF) polishing, ion beam figuring (IBF), et al. The controllable adaptive polishing techniques are advanced and are necessary for high accuracy large-aperture aspheric mirrors. Optical testing techniques are also reviewed. They are classified by different principles, e.g. coordinate measurement techniques, geometric light methods and physical optics methods (interferometry). Different methods can serve for different procedures during the grinding and polishing process. Generally speaking, large dynamic range, high accuracy, and also more adaptive testing techniques is the trend of optical testing. But one should bear in mind that the manufacture of large-aperture aspheric mirror is a complex and long process, no testing methods can cover the whole process, typically more than three testing methods are needed to ensure the optical manufacturing. In the third part we summarized the technical characteristics of advanced (new generation) optical manufacturing, and looked forward to the future manufacturing strategy of large-diameter aspheric mirrors.