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Two-dimensional metasurfaces constructed from sub-wavelength size meta-atoms can flexibly control the local distribution of electromagnetic fields, which has attracted extensive attention in recent years. The polarization, phase and amplitude of electromagnetic waves can be controlled with subwavelength resolution by properly designing the nanostructure of the metasurfaces. Compared with 3D metamaterials, 2D metasurfaces can not only greatly alleviate the high resistance losses accumulated in traditional metamaterials, but also avoid the manufacturing requirements of complex 3D nanostructures. In addition, the sub-wavelength thickness of the metasurfaces has significant integration advantages, which makes it possible to develop ultra-compact photonic devices with a variety of optical functions, which is of great significance to micro/nano photonics and integrated photonics. Especially in the field of nonlinear optics, metasurfaces can alleviate or even completely overcome the requirement of phase matching to some extent, thus showing a strong nonlinear optical response. Metal materials exhibit significant ohmic losses in other wavebands except microwave, resulting in a relatively low optical quality factor of traditional plasmonic metasurfaces, which also limits their application in many functional nano-photonic devices. Furthermore, some precious metals (such as gold and silver, etc.) are not only expensive to manufacture, but also incompatible with traditional Complementary Metal Oxide Semiconductor (CMOS) processes. In view of this, dielectric metasurfaces compatible with semiconductor technology have gradually become a research focus. Ferroelectric lithium niobate (LiNbO3) is known as "optical silicon" because of its transparent window from visible to mid-infrared band (0.35-5 μm), relatively high refractive index, excellent electro-optic (EO) and second-order nonlinear optical properties, as well as excellent acoustooptic and piezoelectric properties. These unique properties make lithium niobate one of the most widely used materials in photonics, and it is an ideal substrate material for realizing efficient dielectric metasurfaces.
With the rapid development of lithium-niobate-on-insulator (LNOI) thin film technology and related surface micro-nano manufacturing technology in recent years, a series of high-quality and high-performance photonic functional devices on lithium niobate chip have been realized, such as compact modulators with ultra-high performance, broadband frequency combs, as well as high-efficiency optical frequency converters and single-photon sources. Great progress has been made in nonlinear optical frequency conversion, electro-optic modulation and optical passivity. In this paper, we briefly introduce several micro-nano processing technologies that have the potential to produce high-quality lithium niobate metasurfaces, and summarize the recent research progress in optical frequency conversion, electro-optic modulation, optical passivity and other aspects of lithium niobate metasurfaces, and prospected the potential research directions in the field of micro-nano optics.
The main flow chart of fabrication of photonic structure on the LNOI chip: patterned processing; pattern transfer; post-processing
(a) A schematic of the SHG from the lithium niobate metasurface; (b) Schematic illustration of the process flow of fabrication; (c) SEM image of the fabricated metasurface in which the nanoresonator consists of a truncated pyramid and a residual layer underneath[64]
(a) SEM image of a cylindrical post formed after femtosecond laser ablation; (b) SEM image of the cylindrical post after the FIB milling[70]
Microring fabricated by UV lithography and RIE, followed by sidewall polishing by the CMP. (a) Schematic illustration of the process flow of fabrication; (b) False-color SEM image of the microring; and enlarged SEM image of the sidewall (c) before and (d) after the CMP[75]
(a) A schematic of the SHG from the nonlinear lithium niobate metasurface. Left inset gives a typical SEM image of cross section of the metasurface with D=600 nm. Right inset presents the measured second-order susceptibility of the lithium niobate film used in this study; (b) Spectral dependence of SHG efficiencies from metasurfaces[101]
(a) SPDC from a lithium niobate metasurface: the pump is incident from the substrate side, photon pairs are collected in reflection. Both the pump and the SPDC photons are polarized along the lithium niobate optic axis z; (b) Measured SPDC spectra from quantum optical metasurfaces. Gray stars show the SPDC spectrum from the unpatterned lithium niobate film[112]
(a) Metasurface driven by Au electrodes. The lower left inset shows the SEM image of the metasurface pillar structure. The lower right inset shows a false-color SEM of several metasurfaces (purple) between the electrodes (yellow); (b) Measured transmission (blue) of a metasurface with radius 135 nm and period 500 nm, normalized by the transmission of an unstructured area. The orange line shows the modulation enhancement, defined as the modulation amplitude of the metasurface divided by the modulation amplitude of an unpatterned area, for an AC voltage of 2 Vpp and 180 kHz[65]
(a) Schematic of the LiNbO3 on-chip ridge waveguide integrated with a well-designed gradient metasurface for achieving phase-matching-free second harmonic generation; (b) Conceptual diagram of the metasurface-based phase-matching-free second harmonic generation[88]