Lithium niobate metasurfaces: preparation and photonics applications

Cui Xueqing; Xie Ranran; Liu Hongliang; Jia Yuechen; Chen Feng

doi:10.12086/oee.2022.220093

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Cui X Q, Xie R R, Liu H L, et al. Lithium niobate metasurfaces: preparation and photonics applications[J]. Opto-Electron Eng, 2022, 49(10): 220093. doi: 10.12086/oee.2022.220093

Citation:

Cui X Q, Xie R R, Liu H L, et al. Lithium niobate metasurfaces: preparation and photonics applications[J]. Opto-Electron Eng, 2022, 49(10): 220093. doi: 10.12086/oee.2022.220093

Lithium niobate metasurfaces: preparation and photonics applications

1.
School of Physics, State Key Laboratory of Crystal Materials, Shandong University, Jinan, Shandong 250100, China
2.
Tianjin Key Laboratory of Micro-scale Optical Information Science and Technology, Institute of Modern Optics, Nankai University, Tianjin 300350, China

Fund Project: National Key Research and Development Program of China (2019YFA0705000), National Natural Science Foundation of China (12134009), Shandong Provincial Natural Science Foundation (ZR2021ZD02, 2022HWYQ-047), Taishan Scholar Foundation of Shandong Province (tsqn201909041, tspd20210303), and “Qilu Young Scholar Program” of Shandong University, China.

More Information

^*Corresponding author: yuechen.jia@sdu.edu.cn

Received Date 24 May 2022

Revised Date 18 August 2022

Accepted Date 25 August 2022

Available Online 30 September 2022

Published Date 25 October 2022

Abstract

Abstract

As derivatives of 3D metamaterials, artificial metasurface structures with sub-wavelength thicknesses can flexibly manipulate light-matter interactions in a compact manner, which is beneficial for the fabrication of multi-functional and ultracompact photonic devices. Therefore, metasurface structures are of great significance for micro-nano photonics and integrated photonics. The ferroelectric crystal lithium niobate is regarded as one of the most promising multifunctional integrated photonic platforms due to its wide transparent window spanning from the visible to the mid-infrared band as well as large nonlinear optical and electro-optic coefficients. In recent years, research on integrated photonics devices based on lithium-niobate-on-insulator (LNOI) thin films has also been developed rapidly. In this paper, several micro-nano processing technologies that have the potential to prepare high-quality lithium niobate metasurfaces are summarized. At the same time, the research progress of lithium niobate metasurface structures in recent years is introduced, and its future research directions are prospected.
- metasurface /
- lithium-niobate /
- micro-nanofabrication /
- nonlinear optics

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References

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Overview

Overview

Two-dimensional metasurfaces constructed from sub-wavelength size meta-atoms can flexibly control the local distribution of electromagnetic fields, which has attracted extensive attention in recent years. The polarization, phase and amplitude of electromagnetic waves can be controlled with subwavelength resolution by properly designing the nanostructure of the metasurfaces. Compared with 3D metamaterials, 2D metasurfaces can not only greatly alleviate the high resistance losses accumulated in traditional metamaterials, but also avoid the manufacturing requirements of complex 3D nanostructures. In addition, the sub-wavelength thickness of the metasurfaces has significant integration advantages, which makes it possible to develop ultra-compact photonic devices with a variety of optical functions, which is of great significance to micro/nano photonics and integrated photonics. Especially in the field of nonlinear optics, metasurfaces can alleviate or even completely overcome the requirement of phase matching to some extent, thus showing a strong nonlinear optical response. Metal materials exhibit significant ohmic losses in other wavebands except microwave, resulting in a relatively low optical quality factor of traditional plasmonic metasurfaces, which also limits their application in many functional nano-photonic devices. Furthermore, some precious metals (such as gold and silver, etc.) are not only expensive to manufacture, but also incompatible with traditional Complementary Metal Oxide Semiconductor (CMOS) processes. In view of this, dielectric metasurfaces compatible with semiconductor technology have gradually become a research focus. Ferroelectric lithium niobate (LiNbO₃) is known as "optical silicon" because of its transparent window from visible to mid-infrared band (0.35-5 μm), relatively high refractive index, excellent electro-optic (EO) and second-order nonlinear optical properties, as well as excellent acoustooptic and piezoelectric properties. These unique properties make lithium niobate one of the most widely used materials in photonics, and it is an ideal substrate material for realizing efficient dielectric metasurfaces.

With the rapid development of lithium-niobate-on-insulator (LNOI) thin film technology and related surface micro-nano manufacturing technology in recent years, a series of high-quality and high-performance photonic functional devices on lithium niobate chip have been realized, such as compact modulators with ultra-high performance, broadband frequency combs, as well as high-efficiency optical frequency converters and single-photon sources. Great progress has been made in nonlinear optical frequency conversion, electro-optic modulation and optical passivity. In this paper, we briefly introduce several micro-nano processing technologies that have the potential to produce high-quality lithium niobate metasurfaces, and summarize the recent research progress in optical frequency conversion, electro-optic modulation, optical passivity and other aspects of lithium niobate metasurfaces, and prospected the potential research directions in the field of micro-nano optics.