Optofluidic refractometric sensor based on quasi-bound states in the continuum in all-dielectric metasurface

Hu Weidong; Du Xiang; Liu Siyu; Huang Wanxia; Shi Fenghua; Shi Jianping; Li Guangyuan

doi:10.12086/oee.2023.230124

Article navigation > Opto-Electronic Engineering > 2023 Vol. 50 > No. 9 > 230124

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Hu W D, Du X, Liu S Y, et al. Optofluidic refractometric sensor based on quasi-bound states in the continuum in all-dielectric metasurface[J]. Opto-Electron Eng, 2023, 50(9): 230124. doi: 10.12086/oee.2023.230124

Citation:

Hu W D, Du X, Liu S Y, et al. Optofluidic refractometric sensor based on quasi-bound states in the continuum in all-dielectric metasurface[J]. Opto-Electron Eng, 2023, 50(9): 230124. doi: 10.12086/oee.2023.230124

Optofluidic refractometric sensor based on quasi-bound states in the continuum in all-dielectric metasurface

1.
College of Physics and Electronic Information, Anhui Normal University, Wuhu, Anhui 241000, China
2.
Anhui Province Key Laboratory of Photo-electronic Materials Science and Technology, Wuhu, Anhui 241000, China
3.
Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen, Guangdong 518055, China
4.
Shenzhen College of Advanced Technology, University of Chinese Academy of Sciences, Shenzhen, Guangdong 518055, China

Fund Project: National Natural Science Foundation of China (61775002, 62275261), and Anhui Provincial Natural Science Foundation (2108085MA23, 808235830016)

More Information

^*Corresponding authors: jps51062@mail.ahnu.edu.cn; gy.li@siat.ac.cn

Received Date 26 May 2023

Revised Date 27 July 2023

Accepted Date 28 July 2023

Available Online 27 September 2023

Published Date 03 November 2023

Abstract

Abstract

The quasi-bound state in the continuum (quasi-BIC) is a special resonant mode in a metasurface with a very high quality factor that can greatly enhance the light-matter interaction and has important applications in fluorescence enhancement, nanolaser, optical sensing, and nonlinear optics. In this paper, we study the application of quasi-BIC dielectric metasurface for refractive index sensing based on the theory generated by our previous quasi-BIC. The basic structure of the sensing device is given, the preparation of the sample optofluidic structure is completed by using electron beam lithography combined with injection molding process, and the performance is initially tested. The results showed that the metasurface has two high-Q quasi-BIC resonance peaks (1.523 µm and 1.570 µm, with quality factors of 3069 and 4071, respectively), thanks to the new strategy of quasi-BIC generation. The test experiments with four refractive index solutions (n=1.450/1.462/1.470/1.480, respectively) as samples showed that both resonance peaks could complete the refractive index detection with the sensitivity of 452 nm/RIU and 428 nm/RIU, respectively, and the performance evaluation indexes FOM were 376.7 and 372, respectively, which are better than the existing literature. The linearity between resonance wavelength and refractive index is good, showing the potential of quasi-BIC metasurface in refractive index sensing.
- metasurface /
- quasi-bound states in the continuum /
- optofluidic refractometric sensor /
- surface lattice resonance

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References

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Overview

Overview

The bound state in the continuum (BIC) is a special type of optical resonance state that lies in the continuum spectrum of the radiative state, yet remains perfectly localized due to symmetry protection and other topological protection. Since the BIC is completely uncoupled from spatial light, it is necessary in most applications to convert the symmetry-protected BIC and incidental BIC into a quasi-BIC (qBIC) with a high quality factor (Q-factor) by breaking the symmetry and adjusting the system parameters so that it can be excited by the external optical field and can radiate to the far field. The delocalized qBIC inherits the advantages of strong resonance of surface lattice resonance, low absorption loss, and great field enhancement over a large area outside the high refractive nanostructure. For sensing applications based on qBIC all-dielectric metasurfaces, the key performance parameters-sensing sensitivity and performance figure of merit (FOM)-can be effectively improved by high Q factor and great field enhancement in a large range of the object to be sensed. Therefore, we explored a sensor based on delocalized quasi-bound state in the continuum and designed an optofluidic sensor capable of detecting fluids with different refractive indices on an all-dielectric metasurface, which is encapsulated in an optofluidic chamber that provides a large interaction volume with the substance and can be fed with different liquids, gases, and other specific biomarkers through optofluidic channels for different samples delivery to the chip surface is greatly facilitated. By injecting liquids with different refractive indices into the optofluidic chamber of the dielectric metasurface, the device can be used as an optical refractive index sensor by monitoring the refractive index change caused by different liquids, and the structure has been experimentally achieved with a sensitivity of 452 nm/RIU and a FOM above 376.6, demonstrating a good refractive index sensing performance. The sensing performance of our sensor obtained in the experiment is superior to that of other sensors based on qBIC. The superior sensing performance is attributed to the significant field enhancement on the large volume outside the silicon nanopillar, as well as to the high quality factor. It is worth emphasizing that our sensor scheme offers advantages in material selection (transparency and miniaturization) and large sensing area, which is necessary in many cases in the field of biochemical sensing. The many advantages offered by the optofluidic sensors based on delocalized quasi-bound states in the continuum developed in this paper determine that the sensors we fabricated are very versatile and can operate in different spectral ranges. Moreover, the advantages of the optofluidic sensor designed in this paper can be applied to a variety of applications, such as biochemical reaction monitoring, photocatalysis, and trace molecule detection.