Design of short-range LiDAR receiver based on MEMS mirror

Wan Suisui; Pang Yajun; Xue Ruixiang; Bai Zhenxu

doi:10.12086/oee.2024.230287

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Wan S S, Pang Y J, Xue R X, et al. Design of short-range LiDAR receiver based on MEMS mirror[J]. Opto-Electron Eng, 2024, 51(3): 230287. doi: 10.12086/oee.2024.230287

Citation:

Wan S S, Pang Y J, Xue R X, et al. Design of short-range LiDAR receiver based on MEMS mirror[J]. Opto-Electron Eng, 2024, 51(3): 230287. doi: 10.12086/oee.2024.230287

Design of short-range LiDAR receiver based on MEMS mirror

1.
Center for Advanced Laser Technology, Hebei University of Technology, Tianjin 300401, China
2.
Hebei Key Laboratory of Advanced Laser Technology and Equipment, Tianjin 300401, China

Fund Project: Project supported by National Natural Science Foundation of China (61905063), and Natural Science Foundation of Hebei Province (F2020202055).

More Information

Corresponding author: yjpang@hebut.edu.cn

Received Date 22 November 2023

Revised Date 22 February 2024

Accepted Date 22 February 2024

Published Date 05 April 2024

Abstract

Abstract

To address the ineffective reception of larger scanning field echoes by the small photosensitive area of the indium gallium arsenide InGaAs detector in the 1550 nm wavelength band, a receiver device suitable for near-range wide field-of-view applications has been designed. The optical system at the receiving end utilizes an afocal telecentric structure as the receiving antenna, achieving a reception field-of-view of 36° at a photosensitive area of 1 mm. The relative illuminance exceeds 95%, demonstrating excellent light collection and transmission characteristics. Additionally, the receiver circuit adopts a T-network amplification structure combined with a moment identification circuit, utilizing the TDC7200 to achieve high-precision time measurements. The flight time measurement accuracy is less than 120 ps within a range of 200 ns, and the experimental results demonstrate ranging accuracy better than 2 ns within an 8 m distance, meeting the requirements for near-range detection.
- microelectromechanical systems /
- large field of view /
- optical design /
- short-range detection

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References

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Overview

Overview

Compared to detection methods such as cameras and millimeter-wave radar, LiDAR (light detection and ranging) utilizes a highly collimated laser beam to obtain target distance, azimuth, shape, and motion information, providing superior three-dimensional perception capabilities. In the early days, LiDAR was primarily used in military, surveying, environmental monitoring, and other fields, given its large size and high cost. However, LiDAR has gradually integrated into the consumer market and played an increasingly crucial role in autonomous driving and intelligent perception, becoming a hot research topic in recent years. The primary functions of LiDAR can be divided into scanning imaging modules. As weight, size, and power consumption become crucial for platforms such as automobiles and drones, traditional mechanical LiDAR systems are evolving toward solid-state scanning approaches. Among various scanning devices, MEMS (micro-electro-mechanical systems) mirrors have become a hot direction in LiDAR scanning due to their small size, low power consumption, and high angular resolution. With the advancement of LiDAR technology, the scanning field of view of MEMS devices continues to increase, resulting in increasingly stringent requirements for matching the emission and reception fields of view.

The influence of MEMS deflection angle on the received power was derived based on the laser radar equation in this study. Detailed design specifications for the lidar system were analyzed, along with the achievable detection distance range. A suitable receiving scheme for MEMS-based short-range laser radar was proposed, where a single-piece non-spherical mirror was used for beam collimation at the transmitting end, and a small sensitive area InGaAs detector operating at 1550 nm was employed at the receiving end to address the problem of inefficient echo reception for larger scanning fields of the MEMS system. A receiver device suitable for near-range wide field-of-view applications has been designed. The optical system at the receiving end utilizes an afocal telecentric structure as the receiving antenna, achieving a reception field-of-view of 36° at a photosensitive area of 1 mm. The relative illuminance exceeds 95%, demonstrating excellent light collection and transmission characteristics. Additionally, the receiver circuit adopts a T-network amplification structure combined with a moment identification circuit, utilizing the TDC7200 to achieve high-precision time measurements. The flight time measurement accuracy is less than 120 ps within a range of 200 ns, and the overall experimental results demonstrate ranging accuracy better than 2 ns within an 8 m distance, meeting the requirements for near-range detection.