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Jiang K, Liang SM, Sun XJ, Ben JW, Qu L et al. Rapid inactivation of human respiratory RNA viruses by deep ultraviolet irradiation from light-emitting diodes on a high-temperature-annealed AlN/Sapphire template. Opto-Electron Adv 6, 230004 (2023). doi: 10.29026/oea.2023.230004
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Article Open Access
Rapid inactivation of human respiratory RNA viruses by deep ultraviolet irradiation from light-emitting diodes on a high-temperature-annealed AlN/Sapphire template
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Abstract
Efficient and eco-friendly disinfection of air-borne human respiratory RNA viruses is pursued in both public environment and portable usage. The AlGaN-based deep ultraviolet (DUV) light-emission diode (LED) has high practical potentials because of its advantages of variable wavelength, rapid sterilization, environmental protection, and miniaturization. Therefore, whether the emission wavelength has effects on the disinfection as well as whether the device is feasible to sterilize various respiratory RNA viruses under portable conditions is crucial. Here, we fabricate AlGaN-based DUV LEDs with different wavelength on high-temperature-annealed (HTA) AlN/Sapphire templates and investigate the inactivation effects for several respiratory RNA viruses. The AlN/AlGaN superlattices are employed between the template and upper n-AlGaN to release the strong compressive stress (SCS), improving the crystal quality and interface roughness. DUV LEDs with the wavelength of 256, 265, and 278 nm, corresponding to the light output power of 6.8, 9.6, and 12.5 mW, are realized, among which the 256 nm-LED shows the most potent inactivation effect in human respiratory RNA viruses, including SARS-CoV-2, influenza A virus (IAV), and human parainfluenza virus (HPIV), at a similar light power density (LPD) of ~0.8 mW/cm2 for 10 s. These results will contribute to the advanced DUV LED application of disinfecting viruses with high potency and broad spectrum in a portable and eco-friendly use.-
Keywords:
- AlGaN /
- DUV LED /
- superlattice /
- SARS-CoV-2 /
- influenza A virus
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References
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Supplementary information for Rapid inactivation of human respiratory RNA viruses by deep ultraviolet irradiation from light-emitting diodes on a high-temperature-annealed AlN/Sapphire template 
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Jiang K, Liang SM, Sun XJ, Ben JW, Qu L et al. Rapid inactivation of human respiratory RNA viruses by deep ultraviolet irradiation from light-emitting diodes on a high-temperature-annealed AlN/Sapphire template. Opto-Electron Adv 6, 230004 (2023). doi: 10.29026/oea.2023.230004
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Figure 1.
Cross-sectional BFDB STEM images (<1-100>) of the n-AlGaN epilayer grown on a HTA AlN/Sapphire template. (a, b) and (c, d) are the images without and with SLs, respectively. (a, c) and (b, d) are taken with g = (0002) and (11-20), respectively. For one sample, the images with different g vectors are taken in the same area. The white arrows in (b) and (d) denote the edge dislocations in the HTA AlN/Sapphire template.
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Figure 2.
Surface and strain states of the n-AlGaN epilayer grown on a HTA AlN/Sapphire template and structure of the SLs. (a, b) and (c, d) are AFM images (5 μm × 5 μm) and XRD RSMs of the (–105) planes for wafers without/with SLs. (e–h) Cross-sectional HAADF STEM image (<11–20>) of an AlN/AlGaN SLs area and corresponding EDS mappings of N, Al, and Ga elements.
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Figure 3.
DUV LED structure grown on a HTA AlN/Sapphire template. (a) Structure diagram of the DUV LED. (b) XRD RSM of the (105) plane of the DUV LED wafer. (c–e) Cross-sectional HAADF STEM images (<11–20>) of the p-AlGaN HIL, MQWs, and EBL (areas 1, 2, and 3 in Fig. 3(a)) of the DUV LED, respectively. (f–h) HAADF STEM image (<11–20>) of the DUV LED (area 4 in Fig. 3(a)) and corresponding EDS mappings of Al and Ga.
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Figure 4.
Performance characterizations of the three DUV LEDs. (a) IV curves. The inset shows the normalized EL spectra at the current of 100 mA. (b) LOP and EQE curves. The inset shows a picture of a typical flip-chip packaged LED. (c) Distance-dependent LPD at the current of 100 mA. The insets show the log-scale graph and measurement geometry.
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Figure 5.
Inactivation effects of the DUV LEDs on IAV and SARS-CoV-2. (a) Inactivation efficiency for IAV with an initial titer of 2.3×104 PFUs in 60 μL. The inset shows the results for a higher initial titer of 2.3×105 PFUs in 60 μL. (b) Irradiation time-dependent viral inactivation effects for IAV from 2 to 12 cm. The inset shows the live viral titer after 10 s at 8 and 12 cm. (c) Viral inactivation effects of the 256 nm-LED for IAV in 10 s at 4 cm. The viral titers determined by the ratio of PFUs (bar chart) and log10 reduction (cyan line) are shown. (d) Live viral titer after 10 s irradiation for IAV at 4 cm on different materials. Values are presented as the means±SDs (n=3, n=number of independent replicates). (e) Inactivation efficiency with an initial titer of 2.3×104 PFUs in 60 μL for SARS-CoV-2. Values are presented as the means±SDs (n=2, n=number of biological replicates). (f) Inactivation effects of the 256 nm-LED for different pSARS-CoV-2 variants. BHK21-hACE2 cells are infected for 24 h with pseudo-SARS-CoV-2 irradiated or not, and then, the luciferase activity is measured to reflect the virus entry efficiency. Time-dependent effects at 4 cm are evaluated by measuring the luciferase activity for individual pSARS-CoV-2. The dotted line represents the detection limit. Values are presented as the means±SDs (n=3, n=number of independent replicates). **p<0.01.
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Figure 6.
Total relative RNA levels in the cell (a) supernatants and (b) lysates infected by a virus suspension irradiated for 10 s at 4 cm or not after 24 h. The relative RNA level is normalized to that of the mock (non-infected) group. Values are presented as the means±SDs (n=3, n=number of independent replicates). **p < 0.01, ***p < 0.001, ****p < 0.0001.
