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Zhang YC, Jiang QL, Long MQ, Han RZ, Cao KQ et al. Femtosecond laser-induced periodic structures: mechanisms, techniques, and applications. Opto-Electron Sci 1, 220005 (2022). doi: 10.29026/oes.2022.220005
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Review Open Access
Femtosecond laser-induced periodic structures: mechanisms, techniques, and applications
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Abstract
Over the past two decades, femtosecond laser-induced periodic structures (femtosecond-LIPSs) have become ubiquitous in a variety of materials, including metals, semiconductors, dielectrics, and polymers. Femtosecond-LIPSs have become a useful laser processing method, with broad prospects in adjusting material properties such as structural color, data storage, light absorption, and luminescence. This review discusses the formation mechanism of LIPSs, specifically the LIPS formation processes based on the pump-probe imaging method. The pulse shaping of a femtosecond laser in terms of the time/frequency, polarization, and spatial distribution is an efficient method for fabricating high-quality LIPSs. Various LIPS applications are also briefly introduced. The last part of this paper discusses the LIPS formation mechanism, as well as the high-efficiency and high-quality processing of LIPSs using shaped ultrafast lasers and their applications. -
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References
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Zhang YC, Jiang QL, Long MQ, Han RZ, Cao KQ et al. Femtosecond laser-induced periodic structures: mechanisms, techniques, and applications. Opto-Electron Sci 1, 220005 (2022). doi: 10.29026/oes.2022.220005
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Figure 1.
Scanning electron microscopy (SEM) images of (a) LSFLs on silicon8, and (b) HSFLs on ZnSe induced by 800 nm femtosecond laser. Figure reproduced with permission from: (a) ref.8, Optica Publishing Group, under the Optica Open Access Publishing Agreement; (b) ref.9, American Physical Society.
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Figure 2.
(a) The schematic of light irradiated on a rough surface at an incident angle θ, where ki is the wave-vector component parallel to the surface, and l is the thickness of selvedge region. (b) The efficacy factor η as a function of the normalized LIPS wave vector for silica at different excited state. (c) The efficacy factor η along the positive ky-axis for silica at different excitation levels, with circles marking ky-positions where LIPS formation could be expected. Figure reproduced with permission from: (a) ref.16, American Physical Society; (b, c) ref.22, AIP Publishing.
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Figure 3.
(a) Schematic illustration of SPPs. (b) Dispersion curves of SPPs and light in air. (c) SPP excitation on ZnO surface in the excited state launched by a groove. (d) The SEM image of the nanostructures on the ZnO surface irradiated by 800 nm femtosecond laser, where the LSFLs originated from the nanogroove or the ablation edge, as shown as the red arrows. Figure reproduced with permission from: (b) ref.49, AIP Publishing; (c, d) ref.21, American Chemical Society.
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Figure 4.
(a) SEM image of HSFLs inside fused silica induced by 800 nm femtosecond laser pulses. (b) Nanoplasma growth into plane governed by local field distribution, where Epol and Eeq are the local fields on the polar axis and in the equatorial plane, respectively4, 20. Figure reproduced with permission from: (a) ref.20, American Physical Society.
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Figure 5.
OM images of silicon surface irradiated by a single 800 nm femtosecond pulse of 0.18 J/cm2. The double arrows in (a) show the laser polarization direction. Figure reproduced with permission from ref.52, Optica Publishing Group, under the Optica Open Access Publishing Agreement.
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Figure 6.
Evolution of LSFLs formed on Au film irradiated by a single 800 nm laser pulse with a fluence of 1.96 J/cm2. The laser polarization, E, is perpendicular to the prefabricated nanogroove. Figure reproduced with permission from ref.25, American Physical Society.
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Figure 7.
LSFL periods as a function of laser fluence F. The black squares and error bars show the experimental data, and the red curve shows the theoretical values. Figure reproduced with permission from ref.25, American Physical Society.
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Figure 8.
(a–b) SEM pictures of LSFLs induced by the shaped pulse trains with an interval of 16.2 ps. (c) The cross section of LSFLs. (d) The 2D fast Fourier transform of (b). (e) Spectra of the 2D Fourier transform along the x-axis. Figure reproduced with permission from ref.8, Optica Publishing Group, under the Optica Open Access Publishing Agreement.
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Figure 9.
SEM images of composite LIPSs prepared by three-beam interference. The insets show the polarization combinations of the three laser beams. Figure reproduced with permission from ref.37, under a Creative Commons Attribution 4.0 International License.
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Figure 10.
(a) SEM images of nanosquares , and (b) the cross section of nanogratings . (c) Curvature and separation control of nanogrooves fabricated by 800 nm femtosecond laser with polarization control. (d) SEM and AFM images of curved single nanogroove on silicon surface induced by 800 nm femtosecond laser with orthogonally polarized dual beams. Figure reproduced with permission from: (a, b) ref.136, under Optica Open Access Publishing Agreement; (c) ref.139, under a Creative Commons Attribution 4.0 International License; (d) ref.27, American Chemical Society.
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Figure 11.
Structural colors of “Chinese knot” pattern made up of LSFLs fabricated by a shaped pulse of 16.2 ps on Si surface under different diffraction angles. The inset shows an SEM image of regular LSFLs. Figure reproduced with permission from ref.8, Optica Publishing Group, under the Optica Open Access Publishing Agreement.
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Figure 12.
(a-c) Imaging of anisotropic nanostructures and 5D optical data storage in fused silica153, 155. (a) Image of the slow axis azimuth of voxels, where the pseudo-color represents the slow axis azimuth. (b) SEM image of the nanolamella-like structure after polishing and KOH etching. (c) The enlarged area in the dashed square in (b). (d) The birefringent images of data voxels of different layers in a 100-layer 5D optical data storage in fused silica after removing the background. Insets are enlargements of small region (10 μm × 10 μm). (e) Polar diagram of the measured retardance and azimuth of all voxels in (d). Figure reproduced with permission from: (a-c) ref.153, Optica Publishing Group, under the Optica Open Access Publishing Agreement; (d, e) ref.155, under a Creative Commons Attribution License.
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Figure 13.
(a) SEM image of composite nanostructures on ZnSe crystal. (b) The photoluminescence (PL) spectra of the plane surface and composite nanostructures irradiated by
1200 nm femtosecond laser. Insets (i) and (ii) show PL images of the nanostructures and plane surface, respectively. Figure reproduced with permission from ref.175, AIP Publishing. -
Figure 14.
(a–b) Schematic illustrations of the laser-induced structure in the ITO thin film on the substrate, and the resistivity measured longitudinally (IL) or transversely (IT) along the LIPS direction. (c) Microscopic configuration of the four-point probe measurement with the probes longitudinal (Micro-L) or transverse (Micro-T) aligned with the LIPSs. (d) and (e) are the I-V curves of the anisotropic resistivity surface and the unidirectional resistivity surface measured by the Micro-L or Micro-T method, respectively. Figure reproduced with permission from ref.41, under a Creative Commons Attribution License.
