Citation: | Zhouquan Cao, Xiaozhu Xie, Weifang Chen, et al. Research progress of pressure detection and applications in liquid-assisted laser machining[J]. Opto-Electronic Engineering, 2017, 44(4): 381-392. doi: 10.3969/j.issn.1003-501X.2017.04.001 |
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Abstract:Liquid-assisted laser machining (LALM) is a composite manufacturing technology. During liquid-assisted laser machining, the liquid has the functions of cooling and cleaning on the processing area. It makes the heat affected area of the work piece become smaller. The thermal stress is reduced, and the processing incision is smooth and cleaning. So the liquid-assisted laser machining has unique advantages in the processing of heat sensitive materials, high harden-brittle materials and materials of high precision requirements. Due to the addition of liquid in the laser processing, the laser interacts with the machined and the added working liquid. Some researchers have found that the pressure in the process of liquid-assisted laser machining is produced through the study of the experiments and simulation. The existence of pressure results in the complexity of the laser processing even the processing mechanism would be changed. Then the process is difficult to be controlled. Therefore the process of liquid-assisted laser machining should be detected. In order to better master and control this technology, many researchers have studied the existence of pressure in the process. And it has become a research hotspot in the field of laser composite processing. At present, most of the numerical simulation and experimental studies on the pulsation, shock wave, micro-jets and acoustic radiation of single bubble generated by single pulse laser are carried out. However, multi-bubble is usually produced in the process of liquid-assisted laser machining, which makes the phenomenon and the mechanism of laser processing become more complex. These complex phenomenon and mechanisms should be further explored and studied by researchers.
In this paper, the research status of pressure of shock wave and high speed micro-jet in liquid assisted laser machining has been reviewed. The mechanism of pressure generation and the basic characteristics of pressure are briefly resumed in liquid-assisted laser machining, the effects of laser energy, liquid viscosity, liquid surface tension, liquid gas content and the distance of laser focus on solid surface are summarized. And the detection methods of the impact pressure, such as shock wave and micro-jet are mainly introduced in the process of liquid assisted laser machining. And the characteristics of the detection methods, such as photography technology, optical deflection measurement method, hydrophone detection method and high frequency piezoelectric sensor detection method are summarized. Many researchers usually use two or more detection methods to study the distribution of the pressure field, the direction of the shock wave and the micro-jets, and the variation of pressure. Finally, the applications of liquid-assisted laser machining in micro-nano manufacturing, biomedicine and surface treatment are introduced and the prospects of the technology are summarized.
The three modes of micro-jet formation[11]. (a) The jet formed by a hemispherical cavity attached to the wall. (b) The jet formed by a cavity entering a gradient pressure region. (c) The jet formed by cavity near the wall.
Bubble high-speed photography images near the wall[16].
Flow distribution during laser-induced backside wet etching sapphire substratees[24].
Detection diagram of the probe beam deflection [27].
A typical signal of the probe beam deflection [15].
Underwater pressure signal generated by laserinduced shockwave in the water[32].
Transfer relation of power acoustic density with laser energy [32].
Transfer relation of power acoustic density with distance [32].
Pressure signal induced by single-pulse laser in the water.
Pressure signal by multi-pulse laser-induced backside wet etching sapphire substrates.
Cross-sectional SEM pictures of groove structures on silica glass [39]. (a) Vertical injection. (b) Oblique injection.
(a) Samples produced by LIBWE [40]. (b) Micro-fluidic channels [40].
Sapphire molded parts [42].
Cross-sectional SEM pictures of micro trench [43].
Typical experimental setup for laser ablation in liquids [44].
High-resolution TEM images of the FeO [45].
ZnO nano-material's AFM images under different output energy by liquid laser ablation [46]. (a) The laser output energy is 70 mJ and the particle size is about 8 nm. (b) The laser output energy is 60 mJ and the particle size is about 15 nm. (c) The laser output energy is 50 mJ and the particle size is about 40 nm.
Array of 4 bubbles interacting with red blood cells [49]. (a) Expansion of the bubbles. (b) Collapse of the array and deformation of the cells.
Schematic view of the WLSC system [62].