Cover Story：Lu QB, Wang YN, Wang XX, Yao Y, Wang XW et al. Review of micromachined optical accelerometers: from mg to sub-μg. Opto-Electron Adv 4, 200045 (2021).

Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume and anti-electromagnetic disturbance measurement of acceleration. Recently, Professor Qianbo Lu and Professor Wei Huang from Frontiers Science Center for Flexible Electronics, Northwestern Polytechnical University (FSCFE-NWPU) review the conventional MOEMS accelerometers, dividing them into three categories according to the optical measurement principle. A brief review of the principles, performances, advantages and disadvantages as well as the potential application scenarios is presented by taking typical demonstrations as examples, thereby drawing a big picture of the MOEMS accelerometers, which is of typical characteristics and advances compared with the exceedingly popular MEMS accelerometers. In addition, they give the status and development tendency of MOEMS accelerometers, along with their potential application prospect. Ones can find the requirement analysis, introductions and comparisons of different MOEMS accelerometers in this review. This research is able to serve as an excellent reference for scholars working on MEMS/MOEMS accelerometers.