Research on field calibration method of straightness in five-degree-of-freedom measurement

Su Yuhao; Duan Fajie; Jiang Jiajia; Fu Xiao; Zhang Cong; Liu Wenzheng

doi:10.12086/oee.2020.190451

Article navigation > Opto-Electronic Engineering > 2020 Vol. 47 > No. 9 > 190451

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Su Y H, Duan F J, Jiang J J, et al. Research on field calibration method of straightness in five-degree-of-freedom measurement[J]. Opto-Electron Eng, 2020, 47(9): 190451. doi: 10.12086/oee.2020.190451

Citation:

Su Y H, Duan F J, Jiang J J, et al. Research on field calibration method of straightness in five-degree-of-freedom measurement[J]. Opto-Electron Eng, 2020, 47(9): 190451. doi: 10.12086/oee.2020.190451

Research on field calibration method of straightness in five-degree-of-freedom measurement

State Key Lab of Precision Measuring Technology & Instruments, Tianjin University, Tianjin 300072, China

Fund Project: Supported by National Key R&D Program of China (2017YFF0204800), the Tianjin Natural Science Foundations of China (17JCQNJC01100), Science and Technology on Underwater Information and Control Laboratory (6142218081811), Equipment Pre-Research Field Fund (61405180505, 61400040303), National Natural Science Foundations of China (51775377, 61505140), Young Elite Scientists Sponsorship Program By China Association for Science and Technology (2016QNRC001)

More Information

^*Corresponding author: Jiang Jiajia, E-mail:jiajiajiang@tju.edu.cn

Received Date 30 July 2019

Revised Date 08 November 2019

Published Date 15 September 2020

Abstract

Abstract

The field calibration of straightness is an important method to ensure the accuracy of on-line measurement. Based on the transceiver integrated laser five-degree-of-freedom measurement structure, the field calibration model was established aiming at the Abbe error, and the imaging error of retroreflector caused by the calibration platform. According to the calibration model and the angle measurement results of the five-degree-of-freedom measuring device, a compensation method of straightness calibration errors was proposed. Experimental results showed that the calibration coefficient error was within 0.2% when using the calibration method, and the calibration errors of straightness were effectively reduced. The calibration method made the error of calibration coefficient reduce to less than 0.2%, and effectively improved the accuracy of straightness field calibration.
- five-degree-of-freedom measurement /
- field calibration of straightness /
- Abbe error /
- imaging error of retroreflector

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References

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Overview

Overview

Overview: The multi-degree-of-freedom measurement is one of the important methods to realize the rapid and high-precision measurement of geometric errors of machine tools. Straightness measurement, as an important part in the multi-degree-of-freedom measurement, directly affects the accuracy of error measurement of the machine tools. At present, the straightness measurement based on laser collimation has been widely used in multi-degree-of-freedom measurement systems. When the measuring device is applied in the field, the field calibration can effectively eliminate the system error caused by the installation and adjustment of the measuring device, change of environmental parameters, stress, and abrasion in the field application. But the precision and stability of the calibration platform are uncertain in the field calibration of straightness, so the calibration error caused by the calibration platform cannot be ignored.

In the five-degree-of-freedom measuring structure of laser transceiver, the straightness is measured based on the laser collimation principle, and the inverse reflection characteristics of the retroreflector. QPD1 (quadrant photodiode detector) is used to detect the location of the light spot. When using the laser interferometer to calibrate the straightness, the X-direction output and the Z-direction output of QPD1 need to be calibrated. In the field calibration of straightness, the angle of calibration platform would change. The Abbe error caused by the different measuring points of laser interferometer and straightness would affect the calibration accuracy, and it is determined by the Abbe deviation and the angle change of calibration platform. In addition, when the angle of calibration platform changes, the imaging error of retroreflector is part of the calibration errors according to the principle of parallel plate expansion of retroreflector. The field calibration model was established aiming at the calibration errors caused by the calibration platform. According to the calibration model and the angle measurement results of the five-degree-of-freedom measuring device, a compensation method of straightness calibration error was proposed.

In the calibration experiment, the X-direction output and Z-direction output of QPD1 in the five-degree-of-freedom measuring device was calibrated with laser interferometer. A low-precision calibration platform was used to simulate the field calibration environment, and a high-precision calibration platform with negligible angle change was used for comparison experiment. Experimental results showed that the calibration coefficient error of the X-direction straightness was reduced from 3.5% to less than 0.1% and the calibration coefficient error of the Z-direction straightness was reduced from 4% to less than 0.2%. The Abbe error and the imaging error of retroreflector were eliminated and the calibration accuracy of straightness was effectively improved.