Progress on ultra precision manufacturing technology of large-aperture high-power laser optics

Fan Fei; Xu Xi; Xu Qiao; Wang Jian; Zhong Bo; Xie Ruiqing; Lei Xiangyang; Chen Xianhua; Wang Shengfei; Hou Jing; Deng Wenhui; An Chenhui; Zhou Lian; Zhao Shijie; Liao Defeng; Zhu Yujie

doi:10.12086/oee.2020.200135

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Fan F, Xu X, Xu Q, et al. Progress on ultra precision manufacturing technology of large-aperture high-power laser optics[J]. Opto-Electron Eng, 2020, 47(8): 200135. doi: 10.12086/oee.2020.200135

Citation:

Fan F, Xu X, Xu Q, et al. Progress on ultra precision manufacturing technology of large-aperture high-power laser optics[J]. Opto-Electron Eng, 2020, 47(8): 200135. doi: 10.12086/oee.2020.200135

Progress on ultra precision manufacturing technology of large-aperture high-power laser optics

Research Centre of Laser Fusion, China Academy of Engineering Physics, Mianyang, Sichuan 621900, China

Fund Project: Supported by National Science and Technology Major Project of the Ministry of Science and Technology of China (2017ZX04022001-101)

More Information

^*Corresponding author: Xu Qiao, E-mail: xuqiao@vip.sina.com

Received Date 21 April 2020

Revised Date 20 June 2020

Published Date 01 August 2020

Abstract

Abstract

The construction of high-power solid-state laser facility for inertial confinement fusion requires to precisely control the full-spatial frequency error, and realize efficient mass-manufacturing of large-aperture optics. This review summarizes the recent critical progress in manufacturing of large-aperture optics in high-power laser facility. It also emphasizes the technologies such as single point diamond fly-cutting, and aspheric ultra-precision grinding, as well as deterministic polishing, based on the deterministic ultra-precision process manufacturing method. In addition, the application status of these key technologies in the mass-manufacturing chain was stated specifically.
- high-power laser facility /
- large-aperture optics /
- optical ultra-precision manufacturing technology /
- deterministic polishing

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References

[1]	Campbell J H, Hawley-Fedder R A, Stolz C J, et al. NIF optical materials and fabrication technologies: An overview[J]. Proceedings of SPIE, 2004, 5341: 84–101. doi: 10.1117/12.538471 CrossRef Google Scholar
[2]	许乔, 王健, 马平, 等.先进光学制造技术进展[J].强激光与粒子束, 2013, 25(12): 3098–3105. Google Scholar Xu Q, Wang J, Ma P, et al. Progress of advanced optical manufacturing technology[J]. High Power Laser and Particle Beams, 2013, 25(12): 3098–3105. Google Scholar
[3]	Spaeth M L, Manes K R, Kalantar D H, et al. Description of the NIF laser[J]. Fusion Science and Technology, 2016, 69(1): 25–145. doi: 10.13182/FST15-144 CrossRef Google Scholar
[4]	Fuchs B A, Hed P P, Baker P C. Fine diamond turning of KDP crystals[J]. Applied Optics, 1986, 25(11): 1733–1735. doi: 10.1364/AO.25.001733 CrossRef Google Scholar
[5]	Liang Y C, Chen W Q, Bai Q S, et al. Design and dynamic optimization of an ultraprecision diamond flycutting machine tool for large KDP crystal machining[J]. The International Journal of Advanced Manufacturing Technology, 2013, 69(1–4): 237–244. doi: 10.1007/s00170-013-5020-z CrossRef Google Scholar
[6]	Chen M J, Li M Q, Cheng J, et al. Study on characteristic parameters influencing laser-induced damage threshold of KH₂PO₄ crystal surface machined by single point diamond turning[J]. Journal of Applied Physics, 2011, 110(11): 113103. doi: 10.1063/1.3664692 CrossRef Google Scholar
[7]	An C H, Deng C Y, Miao J G, et al. Investigation on the generation of the waviness errors along feed-direction on flycutting surfaces[J]. The International Journal of Advanced Manufacturing Technology, 2018, 96(1): 1457–1465. Google Scholar
[8]	Yang X, An C H, Wang Z Z, et al. Research on surface topography in ultra-precision flycutting based on the dynamic performance of machine tool spindle[J]. The International Journal of Advanced Manufacturing Technology, 2016, 87(5–8): 1957–1965. doi: 10.1007/s00170-016-8583-7 CrossRef Google Scholar
[9]	Zhang F H, Wang S F, An C H, et al. Full-band error control and crack-free surface fabrication techniques for ultra-precision fly cutting of large-aperture KDP crystals[J]. Frontiers of Mechanical Engineering, 2017, 12(2): 193–202. doi: 10.1007/s11465-017-0448-8 CrossRef Google Scholar
[10]	Wang S F, An C H, Zhang F H, et al. An experimental and theoretical investigation on the brittle ductile transition and cutting force anisotropy in cutting KDP crystal[J]. International Journal of Machine Tools and Manufacture, 2016, 106: 98–108. doi: 10.1016/j.ijmachtools.2016.04.009 CrossRef Google Scholar
[11]	Wang S F, An C H, Zhang F H, et al. Simulation research on the anisotropic cutting mechanism of KDP crystal using a new constitutive model[J]. Machining Science and Technology: An International Journal, 2017, 21(2): 202–222. doi: 10.1080/10910344.2017.1283960 CrossRef Google Scholar
[12]	Guo Y B, Chen B K, Zhang Y, et al. Research on parallel grinding method of non-axisymmetric aspheric lens[J]. Chinese Journal of Mechanical Engineering, 2004, 17(1): 149–151. doi: 10.3901/CJME.2004.01.149 CrossRef Google Scholar
[13]	Shore P, Morantz P, Luo X C, et al. Big OptiX ultra precision grinding/measuring system[J]. Proceedings of SPIE, 2005, 5965: 241–248. Google Scholar
[14]	Suzuki H, Murakam S. An ultraprecision grinding machine for non-axisymmetric aspheric mirrors[J]. Nanotechnology, 1995, 6(4): 152–157. doi: 10.1088/0957-4484/6/4/008 CrossRef Google Scholar
[15]	Zhou L, Wei Q C, Zhao S J, et al. Computer-aided NC programming system for large scale and off-axis aspheric optics in parallel grinding[J]. Proceedings of SPIE, 2019, 10842: 108420V. Google Scholar
[16]	Zhou L, Wei Q C, Zheng N, et al. Dressing technology of arc diamond wheel by roll abrading in aspheric parallel grinding[J]. The International Journal of Advanced Manufacturing Technology, 2019, 105(5): 2699–2706. Google Scholar
[17]	周炼, 谢瑞清, 陈贤华, 等.熔石英磨削砂轮截面轮廓分析与优化[J].金刚石与磨料磨具工程, 2018, 38(1): 59–64. Google Scholar Zhou L, Xie R Q, Chen X H, et al. Analysis and optimization on cross section profile of fused silica grinding wheel[J]. Diamond and Abrasives Engineering, 2018, 38(1): 59–64. Google Scholar
[18]	Zhou L, Zheng N, Chen X H, et al. Crack depth uniformity control techniques for large scale fused silica optics in grinding process[J]. Proceedings of SPIE, 2019, 11068: 1106815. Google Scholar
[19]	Zhou L, Wei Q C, Li J, et al. The effect of diamond wheel wear on surface and sub-surface quality in fused silica optics grinding[J]. IOP Conference Series Materials Science and Engineering, 2019, 677: 022091. doi: 10.1088/1757-899X/677/2/022091 CrossRef Google Scholar
[20]	Walker D D, Brooks D, Freeman R, et al. The first aspheric form and texture results from a production machine embodying the precession process[J]. Proceedings of SPIE, 2001, 4451: 267–276. doi: 10.1117/12.453652 CrossRef Google Scholar
[21]	Pan R, Zhong B, Chen D J, et al. Modification of tool influence function of bonnet polishing based on interfacial friction coefficient[J]. International Journal of Machine Tools and Manufacture, 2018, 124: 43–52. doi: 10.1016/j.ijmachtools.2017.09.003 CrossRef Google Scholar
[22]	Zhong B, Wang C J, Chen X H, et al. Time-varying tool influence function model of bonnet polishing for aspheric surfaces[J]. Applied Optics, 2019, 58(4): 1101–1109. doi: 10.1364/AO.58.001101 CrossRef Google Scholar
[23]	Zhong B, Chen X H, Deng W H, et al. Improving material removal determinacy based on the compensation of tool influence function[J]. Proceedings of SPIE, 2018, 10710: 107102P. Google Scholar
[24]	Zhong B, Huang H Z, Chen X H, et al. Modelling and simulation of Mid-spatial-frequency error generation in CCOS[J]. Journal of the European Optical Society-Rapid Publications, 2018, 14(1): 4. doi: 10.1186/s41476-018-0075-y CrossRef Google Scholar
[25]	Zhong B, Chen X H, Pan R, et al. The effect of tool wear on the removal characteristics in high-efficiency bonnet polishing[J]. The International Journal of Advanced Manufacturing Technology, 2017, 91(9): 3653–3662. Google Scholar
[26]	Zhong B, Huang H Z, Chen X H, et al. Impact of pad conditioning on the bonnet polishing process[J]. The International Journal of Advanced Manufacturing Technology, 2018, 98(1): 539–549. Google Scholar
[27]	Chen X H, Yu H D, Zhong B, et al. Development of key technologies in the fabrication of large aperture off-axis wedge focusing lens[J]. Proceedings of SPIE, 2016, 10255: 102551C. Google Scholar
[28]	Ke X L, Wang C J, Guo Y B, et al. Modeling of tool influence function for high-efficiency polishing[J]. The International Journal of Advanced Manufacturing Technology, 2016, 84(9–12): 2479–2489. Google Scholar
[29]	Pal R K, Garg H, Karar V. Full aperture optical polishing process: overview and challenges[C]//CAD/CAM, Robotics and Factories of the Future, New Delhi, 2016: 461–470. Google Scholar
[30]	Suratwala T I, Feit M D, Steele W A. Toward Deterministic Material removal and surface figure during fused silica pad polishing[J]. Journal of the American Ceramic Society, 2010, 93(5): 1326–1340. Google Scholar
[31]	Xie R Q, Zhao S J, Liao D F, et al. Recent advances in rapid polishing process of large aperture optical flats[J]. Proceedings of SPIE, 2019, 10841: 108410V. Google Scholar
[32]	Xie R Q, Zhao S J, Liao D F, et al. Suppressing surface low and mid-spatial frequency errors of large optics during full-aperture rapid polishing[C]//Optical Fabrication and Testing 2019, OSA Technical Digest, Washington, DC United States, 2019: OM3A.2. Google Scholar
[33]	Xie R Q, Zhao S J, Liao D F, et al. Numerical simulation and experimental study of surface waviness during full aperture rapid planar polishing[J]. The International Journal of Advanced Manufacturing Technology, 2018, 97(9): 3273–3282. Google Scholar
[34]	Xie R Q, Zhao S J, Liao D F, et al. Eﬀects of kinematics and groove parameters on the mid-spatial frequency error of optics induced during full aperture polishing[J]. Precision Engineering, 2019, 57: 176–188. doi: 10.1016/j.precisioneng.2019.04.002 CrossRef Google Scholar
[35]	Xie R Q, Liao D F, Chen J, et al. In-situ shape measurement technology during large aperture optical planar continuous polishing process[J]. Proceedings of SPIE, 2018, 10710: 1071033. Google Scholar
[36]	Liao D F, Xie R Q, Sun R K, et al. Improvement of the surface shape error of the pitch lap to a deterministic continuous polishing process[J]. Journal of Manufacturing Processes, 2018, 36: 565–570. doi: 10.1016/j.jmapro.2018.10.040 CrossRef Google Scholar
[37]	Liao D F, Xie R Q, Zhao S J, et al. Surface shape development of the pitch lap under the loading of the conditioner in continuous polishing process[J]. Journal of the American Ceramic Society, 2019, 102(6): 3129–3140. doi: 10.1111/jace.16178 CrossRef Google Scholar
[38]	Liao D F, Zhang F H, Xie R Q, et al. Deterministic control of material removal distribution to converge surface figure in full-aperture polishing[J]. Journal of Manufacturing Processes, 2020, 53: 144–152. doi: 10.1016/j.jmapro.2020.02.015 CrossRef Google Scholar
[39]	Liao D F, Zhang F H, Xie R Q, et al. Effect of interfacial friction force on material removal in full aperture continuous polishing process[J]. Precision Engineering, 2020, 63: 214–219. doi: 10.1016/j.precisioneng.2020.03.003 CrossRef Google Scholar
[40]	Kim D W, Park W H, An H K, et al. Parametric smoothing model for visco-elastic polishing tools[J]. Optics Express, 2010, 18(21): 22515–22526. doi: 10.1364/OE.18.022515 CrossRef Google Scholar
[41]	Kim D W, Burge J H. Rigid conformal polishing tool using non-linear visco-elastic effect[J]. Optics Express, 2010, 18(3): 2242–2257. doi: 10.1364/OE.18.002242 CrossRef Google Scholar
[42]	Song C, Walker D D, Yu G Y. Misfit of rigid tools and interferometer subapertures on off-axis aspheric mirror segments[J]. Optical Engineering, 2011, 50(7): 073401. doi: 10.1117/1.3597328 CrossRef Google Scholar
[43]	Peng W Q, Li S Y, Guan C L, et al. Ultra-precision optical surface fabricated by hydrodynamic effect polishing combined with magnetorheological finishing[J]. Optik, 2018, 156: 374–383. doi: 10.1016/j.ijleo.2017.11.055 CrossRef Google Scholar
[44]	Hou J, Wang H X, Chen X H, et al. Effect of magnetorheological processing parameters on polishing spots[J]. Proceedings of SPIE, 2018, 10847: 108470P. Google Scholar
[45]	Patel R. Mechanism of chain formation in nanofluid based MR fluids[J]. Journal of Magnetism and Magnetic Materials, 2011, 323(10): 1360–1363. doi: 10.1016/j.jmmm.2010.11.046 CrossRef Google Scholar
[46]	Susan-Resiga D, Bica D, Vékás L. Flow behaviour of extremely bidisperse magnetizable fluids[J]. Journal of Magnetism and Magnetic Materials, 2010, 322(20): 3166–3172. doi: 10.1016/j.jmmm.2010.05.055 CrossRef Google Scholar
[47]	Menapace J A, Ehrmann P E, Bayramian A J, et al. Imprinting high-gradient topographical structures onto optical surfaces using magnetorheological finishing: manufacturing corrective optical elements for high-power laser applications[J]. Applied Optics, 2016, 55(19): 5240–5248. doi: 10.1364/AO.55.005240 CrossRef Google Scholar
[48]	Hou J, Cao M C, Wang H X, et al. Determination of optimized removal functions for imprinting continuous phase plates using fuzzy theory[J]. Applied Optics, 2018, 57(21): 6089–6096. doi: 10.1364/AO.57.006089 CrossRef Google Scholar
[49]	Hou J, Liao D F, Wang H X. Development of multi-pitch tool path in computer-controlled optical surfacing processes[J]. Journal of the European Optical Society-Rapid Publications, 2017, 13(1): 22. doi: 10.1186/s41476-017-0050-z CrossRef Google Scholar

Overview

Overview

Overview: The high-power solid-state laser facility for inertial confinement fusion is the largest optical system with the most complex structure. It requires tens of thousands of large-aperture high-power laser optics, including phosphate neodymium glass amplifier, plane mirrors, aspheric focusing lens, diffraction elements, and nonlinear laser crystals. In order to further improve the beam quality and realize the stable operation under high laser flux, these large-aperture optics are required to precisely control the full-spatial frequency error, and realize efficient mass-manufacturing. This review summarizes the recent critical progress in the field of ultra-precise manufacturing of large-aperture optics for high-power laser facility, especially for the technology and equipment of single point diamond fly-cutting, aspheric ultra-precision grinding, and deterministic polishing. In addition, the application status of these key technologies in the mass-manufacturing flow-line is stated specifically. Moreover, with the continuous improvement of comprehensive performance for high-power laser facility, the typical requirements for ultra-precise manufacturing of high-power laser optics are as follows: 1) The development of advanced optical manufacturing technology will march towards the extreme conditions, such as complex aspheric structures, nano-scale shape control, sub-nanometer ultra-smooth surface, etc. 2) The damage-free machining over optical surfaces is in urgent demand, and it is necessary to break through the traditional polishing mechanism and technology, in order to develop novel principles, methods and technologies to realize near non-defect manufacturing. 3) The efficiency of mass manufacturing of optics needs to be improved, and further improvement of the reliability and stability of equipment, as well as the enhancement of flexible and intelligent manufacturing is of great demand. This will help to establish the fast response ability to support the research and development on modern optical system.