Citation: |
|
[1] | 曹宇轩, 舒世立, 孙方圆, 等. 中红外半导体激光器合束技术研究进展(特邀)[J]. 红外与激光工程, 2018, 47(10): 1003002. Cao Y X, Shu S L, Sun F Y, et al. Development of beam combining technology in mid-infrared semiconductor lasers(invited)[J]. Infrared Laser Eng, 2018, 47(10): 1003002. |
[2] | Li X H, Liu X M, Gong Y K, et al. A novel erbium/ytterbium co-doped distributed feedback fiber laser with single-polarization and unidirectional output[J]. Laser Phys Lett, 2010, 7(1): 55-59. doi: 10.1002/lapl.200910100 |
[3] | Li X H, Wang Y S, Zhao W, et al. All-fiber dissipative solitons evolution in a compact passively Yb-doped mode-locked fiber laser[J]. J Lightwave Technol, 2012, 30(15): 2502-2507. doi: 10.1109/JLT.2012.2201210 |
[4] | Li X H, Wang Y G, Wang Y S, et al. Yb-doped passively mode-locked fiber laser based on a single wall carbon nanotubes wallpaper absorber[J]. Opt Laser Technol, 2013, 47: 144-147. doi: 10.1016/j.optlastec.2012.08.010 |
[5] | 周睿. 高功率连续运转全固态蓝光、红光激光器研究[D]. 天津: 天津大学, 2006. Zhou R. High-power continuous-wave all-solid-state blue and red laser[D]. Tianjin: Tianjin University, 2006. |
[6] | 高伟男, 许祖彦, 毕勇, 等. 激光显示技术发展的现状和趋势[J]. 中国工程科学, 2020, 22(3): 85-91. Gao W N, Xu Z Y, Bi Y, et al. Present development and tendency of laser display technology[J]. Strateg Study CAE, 2020, 22(3): 85-91. |
[7] | Grupp M, Reinermann N. Copper welding with high-brightness fiber lasers: process stabilization by high dynamic beam deflection[J]. Laser Technik J, 2017, 14(3): 25-29. doi: 10.1002/latj.201700014 |
[8] | Keller C. Processing of highly reflective materials: Improving metal cutting with high power fiber lasers by examination of backreflected light[J]. Laser Technik J, 2017, 14(4): 30-33. doi: 10.1002/latj.201700024 |
[9] | König H, Lell A, Stojetz B, et al. Blue 450nm high power semiconductor continuous wave laser bars exceeding rollover output power of 80W[J]. Proc SPIE, 2018, 10514: 1051402. |
[10] | Sa M S, Finuf M, Fritz R, et al. Blue laser diode (450 nm) systems for welding copper[J]. Proc SPIE, 2018, 10514: 1051407. |
[11] | Feve J P, Finuf M, Fritz R, et al. Scalable blue laser system architecture[J]. Proc SPIE, 2020, 11262: 112620P. |
[12] | http://www.nichia.co.jp/cn/product/laser.html. |
[13] | Zhao P F, Wang Z N, Yu H J, et al. 12-W continuous-wave green output from a 200-μm fiber-coupled diode laser based on TO-Can packaged emitters[J]. Appl Opt, 2018, 57(9): 2263-2267. doi: 10.1364/AO.57.002263 |
[14] | Wu Y L, Dong Z Y, Chen Y Q, et al. Beam shaping for kilowatt fiber-coupled diode lasers by using one-step beam cutting-rotating of prisms[J]. Appl Opt, 2016, 55(34): 9769-9773. doi: 10.1364/AO.55.009769 |
[15] | Unger A, Köhler B, Biesenbach J. High-power visible spectrum diode lasers for display and medical applications: beam sources with tailored beam quality and spectral characteristics[J]. Proc SPIE, 2014, 8965: 896513. |
[16] | Balck A, Baumann M, Malchus J, et al. 700 W blue fiber-coupled diode-laser emitting at 450 nm[J]. Proc SPIE, 2018, 10514: 1051403. |
[17] | Baumann M, Balck A, Malchus J, et al. 1000 W blue fiber-coupled diode-laser emitting at 450 nm[J]. Proc SPIE, 2019, 10900: 1090005. |
[18] | Chin R H, Dogan M, Fulghum S, et al. 1kW fiber-coupled pump-module at 976nm with 50% efficiency[J]. Opt Express, 2017, 25(15): 17695-17700. doi: 10.1364/OE.25.017695 |
[19] | 刘翠翠, 王鑫, 井红旗, 等. 三波长合束单管激光器光纤耦合模块设计[J]. 发光学报, 2018, 39(3): 337-342. Liu C C, Wang X, Jing H Q, et al. Design of fiber-coupled laser diode module based on three-wavelengths multiplexing by ZEMAX[J]. Chin J Lumin, 2018, 39(3): 337-342. |
[20] | Kaifuchi Y, Yamagata Y, Nogawa R, et al. Ultimate high power operation of 9xx-nm single emitter broad stripe laser diodes[J]. Proc SPIE, 2017, 10086: 100860D. |
[21] | Price K, Karlsen S, Leisher P, et al. High-brightness fiber-coupled pump laser development[J]. Proc SPIE, 2010, 7583: 758308. doi: 10.1117/12.842102 |
[22] | Wang Z L, Drovs S, Segref A, et al. Fiber coupled diode laser beam parameter product calculation and rules for optimized design[J]. Proc SPIE, 2011, 7918: 791809. doi: 10.1117/12.875386 |
[23] | Pierer J, Lützelschwab M, Grossmann S, et al. Automated assembly processes of high power single emitter diode lasers for 100W in 105 μm/NA 0.15 fiber module[J]. Proc SPIE, 2011, 7918: 79180I. |
[24] | 李枫, 耿超, 黄冠, 等. 基于光纤耦合的光纤激光阵列像差探测[J]. 光电工程, 2018, 45(4): 78-89. doi: 10.12086/oee.2018.170691 Li F, Geng C, Huang G, et al. Wavefront sensing based on fiber coupling of the fiber laser array[J]. Opto-Electron Eng, 2018, 45(4): 78-89. doi: 10.12086/oee.2018.170691 |
[25] | Zediker M S, Fritz R D, Finuf M J, et al. Laser welding components for electric vehicles with a high-power blue laser system[J]. J Laser Appl, 2020, 32(2): 022038. doi: 10.2351/7.0000054 |
[26] | Feve J P, Finuf M, Fritz R, et al. Scalable blue laser system architecture[J]. Proc SPIE, 2020, 11262: 112620P. |
[27] | 朱洪波, 郝明明, 刘云, 等. 808nm高亮度半导体激光器光纤耦合器件[J]. 光学精密工程, 2012, 20(8): 1684-1690. Zhu H B, Hao M M, Liu Y, et al. 808 nm high brightness module of fiber coupled diode laser[J]. Opt Precision Eng, 2012, 20(8): 1684-1690. |
[28] | 张志军. 大功率半导体激光器合束技术及应用研究[D]. 长春: 中国科学院大学, 2013. Zhang Z J. Research on high-power semiconductor laser beam combiner technology and application[D]. Changchun: University of Chinese Academy of Sciences, 2013. |
[29] | 周泽鹏, 薄报学, 高欣, 等. 基于ZEMAX高功率半导体激光器光纤耦合设计[J]. 发光学报, 2013, 34(9): 1208-1212. Zhou Z P, Bo B X, Gao X, et al. Fiber coupling design of high power semiconductor laser based on ZEMAX[J]. Chin J Lumin, 2013, 34(9): 1208-1212. |
[30] | 虞天成. 单管半导体激光器光纤耦合技术研究[D]. 苏州: 苏州大学, 2015. Yu T C. Design of fiber coupling of single emitters diode laser[D]. Suzhou: Soochow University, 2015. |
[31] | 王智宁. 高亮度半导体绿光激光器单管合束及光纤耦合的研究[D]. 长春: 长春理工大学, 2018. Wang Z N. Research on single emitter beam combination and fiber coupling of high-brightness semiconductor green laser[D]. Changchun: Changchun University of Science and Technology, 2018. |
[32] | 周闯. 绿光半导体激光器单管合束及光纤耦合技术研究[D]. 西安: 西安电子科技大学, 2019. Zhou C. Research on green single emitter diode laser combination and fiber coupling technology[D]. Xi'an: Xidian University, 2019. |
[33] | Pierer J, Lützelschwab M, Grossmann S, et al. Automated assembly processes of high power single emitter diode lasers for 100W in 105 μm/NA 0.15 fiber module[J]. Proc SIPE, 2011, 7918: 79180I. |
[34] | 朱洪波, 刘云, 郝明明, 等. 高效率半导体激光器光纤耦合模块[J]. 发光学报, 2011, 32(11): 1147-1151. Zhu H B, Liu Y, Hao M M, et al. High efficiency module of fiber coupled diode laser[J]. Chin J Lumin, 2011, 32(11): 1147-1151. |
[35] | Unger A, Küster M, Köhler B, et al. High-power fiber-coupled 100W visible spectrum diode lasers for display applications[J]. Proc SPIE, 2013, 8605: 86050K. doi: 10.1117/12.2001837 |
Overview: Blue laser diodes (LDs) having the advantages of compact construction, long operating lifetime, and short-wavelength are extremely attractive for many applications, such as laser display, material processing, etc. To date, it has become one of the favorable lasers in welding copper-based alloy materials because the blue light absorption rate is 5~12 times greater than that of the near-infrared light for such materials. However, the highest output power of commercialized blue LDs is only 5 W. It cannot be used directly in laser welding unless the needed high-power output can be achieved by combining hundreds of such blue LDs. In 2020, NUBURU, an American company, showed 1500 Watts of blue laser output from a 100 μm core, NA=0.22 fiber for the first time. It is the highest level of output brightness of blue diode lasers so far in the world. Some achievements have also been made in China in recent years, and BWT Corporation has developed a blue laser with an output power of 500 W from a 400 μm core fiber with a 0.22 NA. However, the output brightness of laser seems to be insufficient for laser welding.
In this paper, we designed a high brightness blue LD module by using optical design software ZEMAX, where 48 blue LDs with 3.5 W output power were combined into a beam and efficiently coupled into a fiber with 105 μm core, 0.22 NA. Because of the large divergences, collimation was implemented before beam combination. The fast and slow axis collimating lenses with effective focal lengths of 1.65 mm and 16 mm are used. After that, the spot size of the fast and slow axis is 1.5 mm×4 mm, and the divergence half-angle is 0.043°×0.06°. Multiple such beams were spatially combined. To further improve the output power without deteriorating the beam quality, the polarization beam combining technology was used to double the output power. By theoretical analysis of fiber coupling conditions, four arrays constituted by combined beams, which are 6×3, 7×3, 8×3, and 9×3 arranged in fast and slow axis, are obtained. The output power and coupling efficiency of these four arrays are 108.97 W/94.18%, 126.83 W/93.93%, 144.7 W/93.78%, and 157.91 W/91%. The combination of 6×3 completely meets the fiber coupling conditions, and the focused light spot completely falls into the fiber core. But the latter three arrays cannot fully meet the fiber coupling conditions, and the focused light spot cannot entirely fall into the fiber core. If we regarded the coupling loss of 6×3 array as a reference, and the relative losses of the arrays of 7×3, 8×3 and 9×3 are 0.27%, 0.42%, and 3.38%, respectively. It can be seen that the 8×3 array is a better choice because the coupling loss only increases by 0.42%, but the output power increases by 32.7% compared with the 6×3 array. The output brightness is calculated to be 11 MW/(cm2·str). The total optical to optical conversion efficiency is 86.13%. As a result, the output power is further improved by slightly increasing the coupling loss, which provides a technical reference for making high brightness fiber-coupled LD modules in the future.
The far field output characteristics of blue LD.
The light path diagram of fast axis collimation
The light path diagram of slow axis collimation
The spot diagram after collimation
The schematic diagram of spatial beam combination
The schematic diagram of polarization beam combination
The relationship between angle filling factor and coupling condition.(a) Not satisfied; (b) Satisfied
The optical path diagram of fiber coupling
The spot diagrams after space beam combination
The spot size after focusing
The spot size diagram of optical fiber