Zhang J Q, Gao Y, Li C, et al. Laser direct writing of flexible antenna sensor for strain and humidity sensing[J]. Opto-Electron Eng, 2022, 49(1): 210316. doi: 10.12086/oee.2022.210316
Citation: Zhang J Q, Gao Y, Li C, et al. Laser direct writing of flexible antenna sensor for strain and humidity sensing[J]. Opto-Electron Eng, 2022, 49(1): 210316. doi: 10.12086/oee.2022.210316

Laser direct writing of flexible antenna sensor for strain and humidity sensing

    Fund Project: National Key Research and Development Program of China ( 2020YFB2008500), National Natural Science Foundation of China (51705154, 51835003, 61804054), and the Open Project Program of Wuhan National Laboratory for Optoelectronics (2020WNLOKF007)
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  • Laser direct writing (LDW) is a highly efficient and scalable technology to fabricate flexible electronic devices. In this work, a type of flexible circle antenna sensor is developed by LDW on polyimide film with good dielectric property in response to strain and humidity. The carbonized polyimide has good conductivity and great adhesion to the substrate, which could be used as the active material for antenna. The carbonized polyimide presents porous stacked carbon structures and has the excellent electrical properties, which facilitate strain sensing and make the antenna have low loss, respectively. The resonance frequency of the LDW-generated antenna sensor changes with the variation of applied strain and environmental humidity. The sensitivities of LDW-generated antenna sensor response to applied strain and humidity are −8.943 kHz/με and −6.45 MHz/RH%, respectively. The flexible antenna sensor prepared by the LDW provides a new possibility for the application of structural health monitoring.
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  • Laser direct writing (LDW) is a highly efficient and scalable method to prepare flexible electronic devices. The LDW can obtain the electronics devices by simple operation processes, which has been applied on energy storage devices, stress/strain sensors, gas sensors etc. During the LDW process, the laser works as a heat source to directly generate porous carbon on flexible substrates. In this study, LDW is developed to fabricate flexible antenna-based sensors on polyimide (PI) film. PI is a type of polymer with imide groups as its characteristic structure, which possesses excellent dielectric properties and is applied as the functional materials in many fields. The carbonized PI has good conductivity and great adhesion to the substrate, which could be used as the active material for antenna. Antenna is the component used to transmit and emit electromagnetic waves, and its performance is mainly determined by its structure and material. The variation of environmental conditions such as humidity and temperature as well as the applied strain will lead to the changes of the resonant frequency, reflection coefficient and other electromagnetic parameters of antenna. Currently, antenna-based sensors are typically fabricated by lithography or printing technology, which is either complicated or time-consuming. The resonance frequency of the LDW-generated antenna sensor changes upon the variation of applied strain and environmental humidity. The carbonized polyimide presents porous and stacked carbon structures. In addition, the electrical properties of carbonized PI are excellent with the resistivity of about 2.4 Ω•cm. The carbonized PI is a good candidate for antenna sensor because of the structures and the electrical properties, which facilitate strain sensing and make the antenna have low loss, respectively. The sensitivities of the devices in response to applied strain and humidity are −8.943 kHz/με and −6.45 MHz/RH%, respectively. In addition, the proposed antenna sensor can resist the temperature interference, and the performance of the antenna sensor hardly changes under different room temperatures from 25 ℃ to 55 ℃. Furthermore, in order to demonstrate the stability of the LDW-generated antenna sensor, we measured the performance of antenna sensor after 1 month and 4 months. The sensitivity and the resonance frequency of antenna sensor have almost no change. As for the repeatability of LDW-generated antenna, we repeated the fabrication processes under the same laser power and laser speed, the experiment results show that the antenna sensors have the excellent repeatability because the sensitivity and the resonance frequency of antenna sensors are almost identical. Overall, the flexible antenna sensor prepared by the LDW provides a new possibility for the application of structural health monitoring.

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