Silicon-based super-resolution metalens with weak sidelobe

Zhang Kun; Ma Zijie; Zhou Yi; Liang Gaofeng; Wen Zhongquan; Zhang Zhihai; Shang Zhengguo; Chen Gang

doi:10.12086/oee.2022.220258

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Zhang K, Ma Z J, Zhou Y, et al. Silicon-based super-resolution metalens with weak sidelobe[J]. Opto-Electron Eng, 2022, 49(11): 220258. doi: 10.12086/oee.2022.220258

Citation:

Zhang K, Ma Z J, Zhou Y, et al. Silicon-based super-resolution metalens with weak sidelobe[J]. Opto-Electron Eng, 2022, 49(11): 220258. doi: 10.12086/oee.2022.220258

Silicon-based super-resolution metalens with weak sidelobe

1.
College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China
2.
Key Laboratory of Optoelectronic Technology and Systems Ministry of Education, Chongqing University, Chongqing 400044, China

Fund Project: National Natural Science Foundation of China (61927818，61575031), and China National Key Basic Research and Development Program (2013CBA01700).

More Information

Corresponding author: yi_zhou@cqu.edu.cn

Received Date 11 October 2022

Revised Date 01 November 2022

Accepted Date 01 November 2022

Available Online 08 November 2022

Published Date 25 November 2022

Abstract

Abstract

Metasurface is a spatially varying ultrathin nanostructure that has been widely studied and used in optical super-resolution focusing, either in lenses or in systems. However, with the decrease of the focal spot size of the metalens, large sidelobes are inevitably generated, limiting the field of view and potential applications of the lens. In this paper, a method for producing super-resolution metalens with a large numerical aperture (NA=0.944) and weak sidelobe is presented. For a circularly polarized light with the wavelength of λ=632.8 nm, a super-resolution point-focusing with a weak sidelobe is realized based on PB phase regulation of silica-based metasurface. Experimental results show that the FWHM (full-width at half maximum) of our focusing spot is 0.45λ, which is less than the diffraction limit of 0.53λ (the diffraction limit is 0.5λ/NA), and the sidelobe ratio (SR) is 0.07. Our proposed super-resolution metalens bears the potential to realize the miniaturization, lightweight and integration of super-resolution optical devices or systems.
- super-resolution /
- weak sidelobe /
- metasurface /
- metalens

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References

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