Yang S, Li Y, Zhang W X, et al. Optical system design of wedge beam splitter splitting mid-wave infrared Fizeau interferometer[J]. Opto-Electron Eng, 2023, 50(5): 230014. doi: 10.12086/oee.2023.230014
Citation: Yang S, Li Y, Zhang W X, et al. Optical system design of wedge beam splitter splitting mid-wave infrared Fizeau interferometer[J]. Opto-Electron Eng, 2023, 50(5): 230014. doi: 10.12086/oee.2023.230014

Optical system design of wedge beam splitter splitting mid-wave infrared Fizeau interferometer

    Fund Project: Strategic Priority Research Program of China Academy of Sciences (XDC07040300)
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  • To solve the problem of beam splitting limitation of cemented cubic beam splitters in the mid-wave infrared band, the optical design scheme of mid-wave infrared Fizeau interferometers based on wedge splitting is proposed. At the working wavelength of 3.39 μm, to reduce the return error of the interference system and improve the measurement accuracy, a two-reflection folding collimating optical path structure is adopted, which not only ensures a good collimating wavefront, but also optimizes the design of the optical wedge to take into account the wavefront quality of the interference imaging. ZnSe and CaF2 materials are used, the collimator of the interferometer is a single plano-convex aspheric structure, and the imaging lens is composed of two separate spherical mirrors. Through the Montecarlo simulation tolerance analysis, the collimator wavefront PV of the collimator within 0.1° field of view is better than λ/4. The normalized field of view imaging wavefront PV of the interferometric optical path is better than λ/5; The interferometric system return error is smaller than λ/50 at 0° field of view placed on the standard surface and the surface under test is tilted within 0.05°.
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  • [1] Lamare M. Interferometer for testing infrared materials and optical systems[J]. Proc SPIE, 1978, 136: 43−51. doi: 10.1117/12.956137

    CrossRef Google Scholar

    [2] 王之昊, 张文喜, 伍洲, 等. 激光测振仪中最小均方误差前向预测器的研究[J]. 光电工程, 2022, 49(5): 210391. doi: 10.12086/oee.2022.210391

    CrossRef Google Scholar

    Wang Z H, Zhang W X, Wu Z, et al. Research on the forward predictor of minimum mean square error in laser vibrometer[J]. Opto-Electron Eng, 2022, 49(5): 210391. doi: 10.12086/oee.2022.210391

    CrossRef Google Scholar

    [3] Malacara D. Optical Shop Testing[M]. 3rd ed. Hoboken: Wiley-Interscience, 2007: 17–19.

    Google Scholar

    [4] Furuya A. Design of infrared interferometer[J]. Proc SPIE, 1990, 1320: 478−482. doi: 10.1117/12.22355

    CrossRef Google Scholar

    [5] 陈进榜, 陈磊, 王青, 等. 大孔径移相式CO2激光干涉仪[J]. 中国激光, 1998, 25(1): 31−36. doi: 10.3321/j.issn:0258-7025.1998.01.008

    CrossRef Google Scholar

    Chen J B, Chen L, Wang Q, et al. A large aperture phase-shifting CO2 laser interferometer[J]. Chin J Lasers, 1998, 25(1): 31−36. doi: 10.3321/j.issn:0258-7025.1998.01.008

    CrossRef Google Scholar

    [6] Wu Y Q, Zhang Y D, Wu F, et al. Far-infrared Fizeau interferometer for large aspheric mirror[J]. Proc SPIE, 2008, 7064: 70640S. doi: 10.1117/12.794415

    CrossRef Google Scholar

    [7] Yoder P, Vukobratovich D. Opto-Mechanical Systems Design[M]. 4th ed. Boca Raton: CRC Press, 2015: 131–132.

    Google Scholar

    [8] 王生钊. 光学薄膜及其技术应用研究[M]. 北京: 中国水利水电出版社, 2020.

    Google Scholar

    Wang S Z. Optical Thin Film and Its Technical Application Research[M]. Beijing: China Water Resources and Hydropower Press, 2020.

    Google Scholar

    [9] 阙立志. 3~13μm宽带红外分束镜研究[J]. 红外技术, 2011, 33(12): 695−698. doi: 10.3969/j.issn.1001-8891.2011.12.004

    CrossRef Google Scholar

    Que L Z. Study of a 3 μm to 13 μm wideband infrared beamsplitter[J]. Infrared Technol, 2011, 33(12): 695−698. doi: 10.3969/j.issn.1001-8891.2011.12.004

    CrossRef Google Scholar

    [10] Polavarapu P L, Chen G C, Weibel S. Development, justification, and applications of a mid-infrared polarization-division interferometer[J]. Appl Spectrosc, 1994, 48(10): 1224−1235. doi: 10.1366/0003702944027381

    CrossRef Google Scholar

    [11] 朱波. 移相式斐索中波红外干涉仪关键技术及应用研究[D]. 南京: 南京理工大学, 2014.

    Google Scholar

    Zhu B. Key technologies and applications of phase-shifted Fesol mid-wave infrared interferometer[D]. Nanjing: Nanjing University of Science and Technology, 2014.

    Google Scholar

    [12] Selberg L A. Interferometer accuracy and precision[J]. Proc SPIE, 1991, 1400: 24−32. doi: 10.1117/12.26110

    CrossRef Google Scholar

    [13] 刘满林, 杨旺, 许伟才. 干涉仪成像畸变引起测量误差的校正方法[J]. 光学 精密工程, 2011, 19(10): 2349−2354. doi: 10.3788/OPE.20111910.2349

    CrossRef Google Scholar

    Liu M L, Yang W, Xu W C. Calibration of measuring error caused by interferometric imaging distortion[J]. Opt Precis Eng, 2011, 19(10): 2349−2354. doi: 10.3788/OPE.20111910.2349

    CrossRef Google Scholar

    [14] 李景镇. 光学手册[M]. 西安: 陕西科学技术出版社, 1986: 865–867.

    Google Scholar

    Li J Z. Optical Manual[M]. Xi’an: Shaanxi Science and Technology Press, 1986: 865–867.

    Google Scholar

    [15] 李金鹏, 王鑫蕊, 杨永兴, 等. 一种用于可见-红外光同步成像系统的楔板型分束镜: CN213182178U[P]. 2021-05-11.

    Google Scholar

    Li J P, Wang X R, Yang Y X, et al. A wedge plate type beam splitter for visible-infrared simultaneous imaging system: CN213182178U[P]. 2021-05-11.

    Google Scholar

    [16] Howard J W. Formulas for the coma and astigmatism of wedge prisms used in converging light[J]. Appl Opt, 1985, 24(23): 4265−4268. doi: 10.1364/AO.24.004265

    CrossRef Google Scholar

    [17] 蔡志华. 基于单光楔补偿拼接检测大口径凸非球面反射镜技术的研究[D]. 长春: 中国科学院大学(中国科学院长春光学精密机械与物理研究所), 2021. https://doi.org/10.27522/d.cnki.gkcgs.2021.000075.

    Google Scholar

    Cai Z H. Research on the technology of testing large convex aspherical mirror by single wedge compensation stitching method[D]. Changchun: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2021. https://doi.org/10.27522/d.cnki.gkcgs.2021.000075.

    Google Scholar

  • The mid-wave infrared interferometer is an important precision instrument for measuring the refractive index uniformity of infrared materials, wave aberration of infrared optical systems, and spherical surface shape. Its optical system design has certain difficulties. In the spectroscopy scheme, it is difficult to realize spectroscopy by using the glued cubic beam splitter, and it is easy to introduce aberration mainly by image dispersion in the interferometric spectroscopy system by using the flat beam splitter. To investigate the design difficulties of the optical system of the mid-wave infrared Fizeau interferometer and the limitations of the spectroscopic scheme, this paper proposes the design of the mid-wave infrared Fizeau interferometer based on optical wedge spectroscopy. The use of optical wedge spectroscopy can effectively correct the image scattering aberration introduced by flat beam splitter spectroscopy in the interferometric imaging wavefront, which can improve the quality of the interferometric imaging wavefront, reduce the return error of the interferometric system, and improve the accuracy of measurement. This paper focuses on the effect of the collimator, wedge tilt angle, wedge angle, and other parameters on the optimized wavefront of the interference optical system. According to the above analysis, the optical system design of the mid-wave infrared Fizeau interferometer was completed. The twice reflective folding collimated optical path is used to ensure a well collimated wavefront of the interferometer by controlling the angular aberration design of the single plano-convex aspherical collimator, and the imaging aberration and normalized field-of-view imaging wavefront of the interferometric optical path are strictly controlled to reduce the return error of the interferometric system and improve the interferometric accuracy. At the working wavelength of 3.39 μm, ZnSe, and CaF2 materials are used, the collimator of the interferometer is a single plano-convex aspheric structure, and the imaging mirror is composed of two separate spherical mirrors. Through the Montecarlo simulation tolerance analysis, the collimation wavefront PV of the collimator within 0.1° field of view is better than λ⁄4, and the normalized angular aberration of the exit aperture is better than 3.01×10−5 rad. The normalized field of view imaging wavefront PV of the interferometric optical path is better than λ/5, the MTF value is better than 0.38 at 25 lp/mm, and the maximum imaging distortion of the interferometric system is smaller than 0.1%. The interferometric system return error is smaller than λ/50 at 0° field of view placed on the standard surface and the surface under test is tilted within 0.05°. The mid-wave infrared Fizeau interferometer based on optical wedge spectroscopy provides a new idea for the design of optical systems for mid-wave infrared interferometers.

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