Citation: | Yang S, Li Y, Zhang W X, et al. Optical system design of wedge beam splitter splitting mid-wave infrared Fizeau interferometer[J]. Opto-Electron Eng, 2023, 50(5): 230014. doi: 10.12086/oee.2023.230014 |
[1] | Lamare M. Interferometer for testing infrared materials and optical systems[J]. Proc SPIE, 1978, 136: 43−51. doi: 10.1117/12.956137 |
[2] | 王之昊, 张文喜, 伍洲, 等. 激光测振仪中最小均方误差前向预测器的研究[J]. 光电工程, 2022, 49(5): 210391. doi: 10.12086/oee.2022.210391 Wang Z H, Zhang W X, Wu Z, et al. Research on the forward predictor of minimum mean square error in laser vibrometer[J]. Opto-Electron Eng, 2022, 49(5): 210391. doi: 10.12086/oee.2022.210391 |
[3] | Malacara D. Optical Shop Testing[M]. 3rd ed. Hoboken: Wiley-Interscience, 2007: 17–19. |
[4] | Furuya A. Design of infrared interferometer[J]. Proc SPIE, 1990, 1320: 478−482. doi: 10.1117/12.22355 |
[5] | 陈进榜, 陈磊, 王青, 等. 大孔径移相式CO2激光干涉仪[J]. 中国激光, 1998, 25(1): 31−36. doi: 10.3321/j.issn:0258-7025.1998.01.008 Chen J B, Chen L, Wang Q, et al. A large aperture phase-shifting CO2 laser interferometer[J]. Chin J Lasers, 1998, 25(1): 31−36. doi: 10.3321/j.issn:0258-7025.1998.01.008 |
[6] | Wu Y Q, Zhang Y D, Wu F, et al. Far-infrared Fizeau interferometer for large aspheric mirror[J]. Proc SPIE, 2008, 7064: 70640S. doi: 10.1117/12.794415 |
[7] | Yoder P, Vukobratovich D. Opto-Mechanical Systems Design[M]. 4th ed. Boca Raton: CRC Press, 2015: 131–132. |
[8] | 王生钊. 光学薄膜及其技术应用研究[M]. 北京: 中国水利水电出版社, 2020. Wang S Z. Optical Thin Film and Its Technical Application Research[M]. Beijing: China Water Resources and Hydropower Press, 2020. |
[9] | 阙立志. 3~13μm宽带红外分束镜研究[J]. 红外技术, 2011, 33(12): 695−698. doi: 10.3969/j.issn.1001-8891.2011.12.004 Que L Z. Study of a 3 μm to 13 μm wideband infrared beamsplitter[J]. Infrared Technol, 2011, 33(12): 695−698. doi: 10.3969/j.issn.1001-8891.2011.12.004 |
[10] | Polavarapu P L, Chen G C, Weibel S. Development, justification, and applications of a mid-infrared polarization-division interferometer[J]. Appl Spectrosc, 1994, 48(10): 1224−1235. doi: 10.1366/0003702944027381 |
[11] | 朱波. 移相式斐索中波红外干涉仪关键技术及应用研究[D]. 南京: 南京理工大学, 2014. Zhu B. Key technologies and applications of phase-shifted Fesol mid-wave infrared interferometer[D]. Nanjing: Nanjing University of Science and Technology, 2014. |
[12] | Selberg L A. Interferometer accuracy and precision[J]. Proc SPIE, 1991, 1400: 24−32. doi: 10.1117/12.26110 |
[13] | 刘满林, 杨旺, 许伟才. 干涉仪成像畸变引起测量误差的校正方法[J]. 光学 精密工程, 2011, 19(10): 2349−2354. doi: 10.3788/OPE.20111910.2349 Liu M L, Yang W, Xu W C. Calibration of measuring error caused by interferometric imaging distortion[J]. Opt Precis Eng, 2011, 19(10): 2349−2354. doi: 10.3788/OPE.20111910.2349 |
[14] | 李景镇. 光学手册[M]. 西安: 陕西科学技术出版社, 1986: 865–867. Li J Z. Optical Manual[M]. Xi’an: Shaanxi Science and Technology Press, 1986: 865–867. |
[15] | 李金鹏, 王鑫蕊, 杨永兴, 等. 一种用于可见-红外光同步成像系统的楔板型分束镜: CN213182178U[P]. 2021-05-11. Li J P, Wang X R, Yang Y X, et al. A wedge plate type beam splitter for visible-infrared simultaneous imaging system: CN213182178U[P]. 2021-05-11. |
[16] | Howard J W. Formulas for the coma and astigmatism of wedge prisms used in converging light[J]. Appl Opt, 1985, 24(23): 4265−4268. doi: 10.1364/AO.24.004265 |
[17] | 蔡志华. 基于单光楔补偿拼接检测大口径凸非球面反射镜技术的研究[D]. 长春: 中国科学院大学(中国科学院长春光学精密机械与物理研究所), 2021. https://doi.org/10.27522/d.cnki.gkcgs.2021.000075. Cai Z H. Research on the technology of testing large convex aspherical mirror by single wedge compensation stitching method[D]. Changchun: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2021. https://doi.org/10.27522/d.cnki.gkcgs.2021.000075. |
The mid-wave infrared interferometer is an important precision instrument for measuring the refractive index uniformity of infrared materials, wave aberration of infrared optical systems, and spherical surface shape. Its optical system design has certain difficulties. In the spectroscopy scheme, it is difficult to realize spectroscopy by using the glued cubic beam splitter, and it is easy to introduce aberration mainly by image dispersion in the interferometric spectroscopy system by using the flat beam splitter. To investigate the design difficulties of the optical system of the mid-wave infrared Fizeau interferometer and the limitations of the spectroscopic scheme, this paper proposes the design of the mid-wave infrared Fizeau interferometer based on optical wedge spectroscopy. The use of optical wedge spectroscopy can effectively correct the image scattering aberration introduced by flat beam splitter spectroscopy in the interferometric imaging wavefront, which can improve the quality of the interferometric imaging wavefront, reduce the return error of the interferometric system, and improve the accuracy of measurement. This paper focuses on the effect of the collimator, wedge tilt angle, wedge angle, and other parameters on the optimized wavefront of the interference optical system. According to the above analysis, the optical system design of the mid-wave infrared Fizeau interferometer was completed. The twice reflective folding collimated optical path is used to ensure a well collimated wavefront of the interferometer by controlling the angular aberration design of the single plano-convex aspherical collimator, and the imaging aberration and normalized field-of-view imaging wavefront of the interferometric optical path are strictly controlled to reduce the return error of the interferometric system and improve the interferometric accuracy. At the working wavelength of 3.39 μm, ZnSe, and CaF2 materials are used, the collimator of the interferometer is a single plano-convex aspheric structure, and the imaging mirror is composed of two separate spherical mirrors. Through the Montecarlo simulation tolerance analysis, the collimation wavefront PV of the collimator within 0.1° field of view is better than λ⁄4, and the normalized angular aberration of the exit aperture is better than 3.01×10−5 rad. The normalized field of view imaging wavefront PV of the interferometric optical path is better than λ/5, the MTF value is better than 0.38 at 25 lp/mm, and the maximum imaging distortion of the interferometric system is smaller than 0.1%. The interferometric system return error is smaller than λ/50 at 0° field of view placed on the standard surface and the surface under test is tilted within 0.05°. The mid-wave infrared Fizeau interferometer based on optical wedge spectroscopy provides a new idea for the design of optical systems for mid-wave infrared interferometers.
Schematic design of the wedge splitting mediumwave infrared Fizeau interferometer
Return error of the interference system. (a) Return error diagram of the reflective collimating optical interference system; (b) Return error of the reflective and transmissive collimating optical path interference system
Schematic diagram of the optical path of the wedge beam splitter wavefront simulation
Optimal wedge beam splitter angle
Wavefront PV curve of the plate beam splitter and wedge beam splitter interference system at different tilt angles of the beam splitter T
Wavefront PV curve of the wedge beam splitter interference system. (a) Relationship between wavefront PV of wedge beam splitter interferometric system and collimator F#; (b) Relationship between wavefront PV of wedge beam splitter interferometric system and tilt angle of wedge beam splitter T
Relationship curve between the optimal wedge beam splitter angle
Illumination path of the wedge splitting medium wave infrared Fizeau interferometer
Design results of the collimator. (a) PV of collimated wavefront for the collimator at 0° field of view; (b) PV of collimated wavefront for the collimator at 0.1° field of view; (c) Angular aberration of the normalized exit aperture for the collimator at 0° field of view
Monte carlo simulation tolerance analysis of the collimator
Image quality evaluation of the interferometer imaging optical path. (a) Imaging wavefront PV of the normalized field; (b) MTF curve; (c) Distortion curve
Monte carlo simulation tolerance analysis of the interferometer imaging optical path
Stray light analysis diagram of the wedge beam splitter. (a) Schematic diagram of stray light introduced by reflection fromthe front and rear surfaces of the wedge beam splitter; (b) Light traces at the aperture diaphragm surface
Retrace error of wedge splitting medium wave infrared Fizeau interferometer