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Zhu J Q, Wu S Y, Song S C, et al. Femtosecond laser printing of vanadium dioxide based optical meta-structures with tunable spectra engineering [J]. Opto-Electron Eng, 2023, 50(7): 230095. doi: 10.12086/oee.2023.230095
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Femtosecond laser printing of vanadium dioxide based optical meta-structures with tunable spectra engineering
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Abstract
Over the past few years, the field of micro-/nano- photonics has witnessed a surge in research focused on developing innovative optical devices that offer dynamic spectra engineering. Among the materials showing promise in this area, vanadium dioxide (VO2) can actively manipulate its refractive index via a phase transition process, enabling the dynamic manipulation of spectra. In this work, a photosensitive polymer nanocomposite with tunable effective refractive index is prepared by incorporating VO2 nanocrystals into methacrylate monomers, which takes advantages of the phase change characteristics of VO2 and the photopolymerization properties of the monomer. In addition, with the aid of the state-of-the-art femtosecond laser processing technology, highly precise two-dimensional and three-dimensional micro-/nano- optical structures embedded with the phase change capabilities outlined by VO2 are achieved. Fascinatingly, the spectra measurements via Fourier transform infrared spectrometer reveal that when subjected to the critical phase transition temperatures, the printed micro-/nano- structures will undergo a thermally induced phase transition of the VO2 nanocrystals embedded within them. Consequently, there is a discernible alteration in the effective refractive index of the optically functionalized structure, inspiring the dynamic manipulation of the short-band spectra. -
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References
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Overview
Optically functionalized meta-structures exhibit salient advantages in controlling and manipulating light-matter interactions at the micro-/nano- scale. These structures could enable a wide range of processes such as spectral engineering, phase manipulation, polarization control, filtering, modulation, optical angular momentum generation, and polarization conversion. The spectral properties of these artificial meta-structures emerge from optical resonances, which strongly relies on the size, shape, and arrangement of the metallic or dielectric meta-structures. By tailoring these parameters, it is possible to efficiently manipulate the spectra and achieve tunable spectra, especially in the near-infrared and visible range. Integrating or embedding materials or structures with tunable optical properties could be a better approach to overcome the limitation of being stuck in a fixed morphological nanostructure. As a Mott transition material, vanadium dioxide (VO2) can directly change its refractive index due to the insulating-metallic transition (IMT) at ~68 °C, which has been proved by applying temperature, electrical fields, or light triggers in the visible, infrared, and other spectral regions. By utilizing the meta-structure of vanadium dioxide, the regulation of the effective refractive index of micro-/nano- optical devices can be realized. However, the traditional electron beam lithography and focused ion beam machining are more suitable for the fabrication of 2D meta-structures, which greatly limits the device design and the spectra engineering. Compared with these processing technologies, femtosecond laser direct writing technology that utilizes focused high-intensity photon beam for processing and has the advantages such as freeform fabrication, non-conductive substrate and non-contact, is expected to meet the requirements of micro-/nano- fabrication of the VO2-based meta-structures.
In this paper, we demonstrate a feasible approach for fabricating meta-structures with flexibly manipulated effective refractive indices by incorporating VO2 nanoparticles in a matrix of acrylate resin. This approach involves tailoring the phase transition of VO2-based photosensitized nanocomposites. Through the implementation of this effective-refractive-index tailorable photosensitized nanocomposite, the direct printing of meta-structures can be achieved in a single attempt without the post-heat treatment. Therefore, it avoids the undesired structural shrinking and poor adhesion between the sample and the substrate that may occur in the traditional VO2 deposition methods like atomic layered deposition. By cross-linking polymerization reaction of the photosensitized nanocomposites, the VO2 nanocrystals are embedded into the potopolymerized structures. As a result, the optical response of the as-fabricated meat-structures could be dynamically tunable through the thermotropic phase transition of the VO2 nanocrystals in the nanocomposites. In addition, the broadband amplitude modulation of ~33% is observed in the three-dimensional hierarchical meta-structures. This strategy holds immense promise for future versatile utilization of the nanocrystal-based photosensitive nanocomposites to achieve numerous functionalities in meta-structures via femtosecond laser printing technique.
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Zhu J Q, Wu S Y, Song S C, et al. Femtosecond laser printing of vanadium dioxide based optical meta-structures with tunable spectra engineering [J]. Opto-Electron Eng, 2023, 50(7): 230095. doi: 10.12086/oee.2023.230095
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Figure 1.
(a) Schematic diagram of the principles and steps of inorganic modification and organic modification of VO2 nanocrystal particles; (b-d) A single transmission electron microscope (TEM) picture of VO2 nanocrystalline particles, (b) modified with aluminum oxide, (c) modified with titanium dioxide, (d) modified with silicon dioxide, and there is Al2O3 appearing as amorphous flocculent around the VO2 lattice in (b). The scales are all 5 nm; (e) The comparison of dispersion characteristics of VO2 nanocrystals before and after modification in water and dichloromethane solutions, where the left picture is without surface modification, the middle picture shows the dispersion properties after organic modification, and the right picture shows the dispersion properties after inorganic modification and organic modification; (f) SEM image of the photosensitive composite material with 20 wt% VO2. The scale is 1 μm; (g) Calculated refractive index curves of 10 wt%, 20 wt%, 30 wt%, 40 wt% VO2 nanocrystalline photosensitive composite materials before and after the phase transition with the rise of the temperature, where the left picture shows the data of the real part of the refractive index, and the picture on the right shows the data of the imaginary part of the refractive index. The solid line of dielectric represents the medium state before the phase transition with the rise of the temperature, and the metallic dotted line is the metalloid state after the phase transition with the rise of the temperature
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Figure 2.
(a) Schematic diagram of the optical path of the femtosecond laser direct writing fabrication system. Among them, M is the mirror, L is the lens, Pinhole is the filter hole, Gx and Gy are the galvanometer system, BS is the beam splitter, and Objective is the objective lens; (b) XOZ surface optical field distribution of the laser focus spot; (c) Schematic diagram of the photonic device spectrum test device, which uses a ring-shaped ceramic heating plate connected to a DC power supply to heat the photonic device and uses an infrared temperature gun to test the temperature of photonic devices
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Figure 3.
(a) SEM images of the single-line structures processed at different laser powers and scanning speeds, where the VO2 concentration is 20 wt%; (b) Laser threshold power of the processed single-line structures at different scanning speeds based on 20 wt% VO2 photosensitive composite materials. The laser threshold power is a function of the scanning speed; (c) The line width of the processed single-line structures changes with the power, where the scanning speed is 20 μm/s, the VO2 concentration is 20 wt%, and the embedded figure is the laser power versus the polymerization rate
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Figure 4.
(a) Schematic diagram of the three-dimensional layer stacking structure model; (b-d) The three-dimensional layer stacking structure processed based on 20 wt% VO2 photosensitive composite material, where (b) is the optical microscope picture, (c) is the SEM picture, and (d) is the SEM oblique view; (e) Schematic diagram of the spiral icosahedral structure model; (f-h) Spiral icosahedral structure processed based on 20 wt% VO2 photosensitive composite material, where (f) is the optical microscope image, (g) is the SEM image, and (h) is the SEM enlarged image
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Figure 5.
(a) Pure photoresist-type one-dimensional grating; (b) Reflection spectra of pure photoresist-type one-dimensional grating device before and after heating, where the upper figure is the test data, and the lower figure is the simulated data; (c) 20 wt% VO2 type one-dimensional grating; (d) Reflection spectrum of 20 wt% VO2 type one-dimensional grating device before and after heating, where the upper figure is the test data, and the lower figure is the simulated data; (e) Distribution of the z component of the magnetic field in the XOZ plane of a single periodic 20 wt% VO2 grating, where the upper picture shows the light source wavelength of 2.9 μm, and the lower picture shows the light source wavelength of 4.2 μm, the white dotted line is the cross-sectional profile of a single periodic grating structure; (f) 20 wt% VO2 type woodpile structure; (g) Transmission spectra of pure photoresist woodpile structure before and after heating; (h) Transmission spectra of 20 wt% VO2 type woodpile structure before and after heating, where the black line is 25 ℃, and the red line is 75 ℃
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