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Wang J W, Li K, Cheng M, et al. Research progress and applications of dynamically tunable metasurfaces[J]. Opto-Electron Eng, 2023, 50(8): 230141. doi: 10.12086/oee.2023.230141
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Research progress and applications of dynamically tunable metasurfaces
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Abstract
Metasurfaces can manipulate the physical parameters of electromagnetic waves, including polarization, amplitude, and phase. The development of micro-nanofabrication technology further promotes the application prospects of metasurfaces in fields such as display, imaging, sensing, anti-counterfeiting, and optical modulation. However, most metasurfaces lack dynamic modulation, which restricts their scope of application. In recent years, the research on dynamic metasurfaces has made some progress. This review mainly introduces several mechanisms for dynamic metasurfaces, including electrical, thermal, optical, mechanical, and chemical modulations, and summarizes the research progress in the dynamic metasurfaces. In addition, this review also outlines the applications of dynamic metasurfaces in fields such as imaging, display, and optical modulations, and highlights their significance and prospects. Finally, this review summarizes the main problems and future development directions of currently tunable metasurfaces.-
Keywords:
- metasurface /
- structural color /
- hologram /
- imaging /
- display /
- dynamic modulation
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References
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Overview
Researchers have witnessed significant progress for metasurfaces in various domains of flat optics, including displays, holograms, beam steering, structural colors, and other planar optical applications. The progress is also accompanied by a growing trend towards device integration and industrialization. However, most optical metasurfaces lack the function of dynamic modulation, which further limits their potential applications. In recent years, numerous efforts have been made for dynamic control of metasurfaces. This review article primarily focuses on elucidating the working mechanisms for the current dynamic modulation methods, namely electrical, thermal, optical, mechanical, and chemical modulations.
Electrically tunable metasurfaces primarily utilize materials that exhibit electrical response, such as liquid crystals, two-dimensional materials, and electrochromic materials, to change the refractive index and the dimensions of structural units, thereby achieving responsive tuning. By combining metasurfaces with thermally responsive materials such as semiconductors, transparent conductive oxides, and phase-change materials, dynamic thermal tuning of metasurfaces can be realized based on mechanisms such as thermo-optic effects, carrier modulation, and phase change. Optical pumping allows for modulation at picosecond and even femtosecond timescales. Optically tunable metasurfaces can also rely on photothermal effects and the phase change of materials. The photothermal effect induced by high-energy lasers could enable to locally heat the material, leading to a phase change and modulation of the refractive index. This tuning of the refractive index gives rise to the adjusted functionality of the metasurfaces. Mechanical tuning involves dynamically controlling metasurfaces by changing the geometric shape of meta-atoms and/or the spacing between adjacent meta-atoms using mechanical force as an external excitation. This can be achieved through two approaches, namely microelectromechanical systems (MEMS) and flexible substrates. Chemical tuning involves altering the composition of materials constituting meta-atoms and changing the chemical properties of the surrounding medium. These changes in the chemical properties can cause variations in material optical parameters, such as refractive index and polarization, resulting in the tuning of the functionality of the metasurfaces.
Furthermore, this review article provides an overview of the applications of dynamic metasurfaces in imaging, displays, and light field modulation, shedding light on their significance and future prospects. In metalens-based imaging, the adjustable focal length undoubtedly adds more channels to imaging, hence greatly expanding the application range. Due to its compatibility with traditional electrical devices, electrically tunable metasurfaces are considered as one of the most promising pathways to achieve interactive holographic displays. Furthermore, the dynamic display of metasurface-based structural colors holds great potential for super-resolution display applications. Moreover, dynamic beam control plays an important role in various fields such as laser radar, optical communication, laser processing, and 3D printing.
In summary, the development of dynamically tunable metasurface devices aims to achieve fast response speeds, user-friendly tuning mechanisms, easy integration, and multiple functions in one device.
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Wang J W, Li K, Cheng M, et al. Research progress and applications of dynamically tunable metasurfaces[J]. Opto-Electron Eng, 2023, 50(8): 230141. doi: 10.12086/oee.2023.230141
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Figure 1.
Typical working mechanisms of dynamically tunable metasurfaces
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Figure 2.
Electrically tunable metasurfaces with different active materials. (a) Liquid crystal integration[48]; (b) Electrochromic material integration[57]; (c) Graphene material integration[50]; (d) Integration of phase change material as the sandwich layer[61]
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Figure 3.
Thermally tunable metasurfaces with different active materials. (a) Schematic diagram of an electrothermally tunable silicon-based nanophotonic phased array[63]; (b) Thermally tunable reflectance spectrum based on a heavily doped InSb substrate and InSb nanostructures[66]; (c) VO2-based electrothermally tunable metasurface: (i) schematic diagram and (ii) the shift of its resonant peak[68]; (d) GST-based thermally tunable metasurface: (i) the reflection modulation caused by the phase change and (ii) schematic diagram of the device[70]; (e) LC-based thermally tunable metasurface: (i) schematic diagram of the device and (ii) the transmittance modulation at different temperatures[74]
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Figure 4.
Optically tunable metasurfaces with different active materials. (a) Schematic diagram of the optically controlled THz device based on Si and Al SRR structure[78]; (b) Schematic diagram of a III-V semiconductor device with reflection modulated by ultrafast laser pump[79]; (c) Schematic diagram of a CdO:In device with optically controlled fast reflection modulation[82]; (d) The transmittance spectrum modulation of a VO2-based metasuface modulated by the THz wave, and its schematic diagram[83]; (e) Schematic diagram of the erasable metasurface modulated by the femotosecond laser direct writing[84]; (f) Schematic diagram of the polarization modulation of an optically controlled metasurface based on azo ethyl red[87]
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Figure 5.
Mechanically tunable metasurfaces with different active materials. (a) Tunable metasurfaces for achieving dynamic polarization control and holography: (i) structural configuration, (ii) simulated amplitude and (iii) radiation phase spectra at varied cantilever angles[89]; (b) Birefringent reconfigurable metasurfaces in the visible range: (i) device structure and (ii) the modulation of delay and transmittance for TM and TE waves at 633 nm wavelength under different voltages[90]; (c) Optical metasurface holograms based on a flexible substrate: (i) schematic configuration, optical holograms at (ii) unstretched and (iii) stretched states[95]
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Figure 6.
Chemically tunable metasurfaces with different active materials. (a) Reconfigurable metasurface holograms based on Mg nanobrick: (i) dynamic modulation principle and (ii) different holographic images after hydrogenation and dehydrogenation reaction[110]; (b) Optical metasurface holograms based on liquid crystals that are used for volatile gas detection: (i) different images are produced when the left and right circularly polarized light is incident on the metasurface hologram and (ii) the schematic diagram showing the change LC molecular orientation upon contacting volatile gas[115]
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Figure 7.
Imaging applications of several typical dynamically tunable metalenses. (a) Electrically tunable molecular orientation of liquid crystals [38]; (b) Microfluidically controlled ratio between metal and dielectric of the material [117]; (c) Optically controlled deformation of thin films with the nanostructures [118]; (d) Temperature controlled phase change of GST [119]; (e) MEMS-controllable gap between two substrates with metasurface nanostructures [58]; (f) Mechanically controlled geometries of nanostructures on the PDMS substrate [106]
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Figure 8.
Dynamically tunable displays. (a) Electrcially reprogrammable metasurface holograms[128]. The metasurface in the middle is formed by an array of meta-atoms, with each having a diode welded between the two metallic loops and independently controlled by a DC voltage; (b) Liquid crystal tunable metasurface holograms and captured images in the far field at different applied voltages[129]; (c) Schematic diagram of a hologram on a stretchable substrate[95]. Holograms are switched and enlarged when the substrate is stretched; (d) Thermally tunable meta-holograms using a vanadium dioxide integrated metasurface[135]; (e) Polymer-dispersed liquid crystal-based metasurfaces for optical encryption[139]; (f) Principle of dynamic bifunctional metasurfaces[140]
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Figure 9.
Dynamically tunable beam shaping. (a) Schematic diagram of a tunable metasurface with adjustable gate electrodes[141]. The structure consists of a quartz substrate, a gold back plane, a thin ITO film covered by a thin alumina film, and a gold stripe nanoantenna array on the top. Appling voltages between the stripe antenna and the bottom gold will result in charge accumulation at the transparent oxide near the aluminum oxide; (b) Illustration of the active metasurface array composed of electrically tunable channels, with each channel composed of 11 individually addressable plasmonic nanoresonators[142]. The incident beam from the right side is reflected by the metasurface array, and the direction of the reflected beam is steered by adjusting the top and bottom gates, Vt and Vb, respectively; (c) 3D depth image produced using the metasurface SLM[142]; (d) Working principle diagram of dynamic beam switching by liquid crystal tunable dielectric metasurfaces[75]; (e) Schematic diagram of mirror-like light reflection of MEMS-metasurfaces under three driving conditions: pre-drive, anomalous reflection, and focusing[59]; (f) Experimental results of beam deflection using the phase-change metasurface and its SEM image[72]
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