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Hu S B, Liu J C, Yu S, et al. Multiline parallel precision coherent length measurement of frequency modulation continuous wave LiDAR[J]. Opto-Electron Eng, 2024, 51(3): 230285. doi: 10.12086/oee.2024.230285
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Multiline parallel precision coherent length measurement of frequency modulation continuous wave LiDAR
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Abstract
For large complex electromechanical systems such as aeronautics and astronautics, the demand for length measurement has also evolved from one-dimensional displacement measurement to multi-objective, flexible and extensible multiline parallel measurement. The frequency-modulated continuous-wave lidar length measurement technology has the advantages of anti-interference, high precision and no cooperation. In this paper, a multiline parallel coherent precision length measurement method based on frequency modulation continuous wave laser lidar is studied. To solve the problem of fiber dispersion and auxiliary fiber drift in the traditional length measurement system, a three-channel Mach-Zehnder interferometry system containing a hydrogen cyanide gas absorption cell is proposed. On this basis, the precision length multiline parallel measurement is realized based on the optical switch structure. The experimental results of precision guide rail length measurement show that the proposed method is less than 25 μm in the length range of 3.6 m. The four-way parallel length measurement is realized. The absolute error of the multi-channel measurement results is not more than 30 μm compared with the measurement results of a commercial laser interferometer. -
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References
[1] 叶声华, 王仲, 曲兴华. 精密测试技术展望[J]. 中国机械工程, 2000, 11(3): 262−263. doi: 10.3321/j.issn:1004-132X.2000.03.007 Ye S H, Wang Z, Qu X H. Review and prospect of precision inspection[J]. China Mech Eng, 2000, 11(3): 262−263. doi: 10.3321/j.issn:1004-132X.2000.03.007 [2] 周济. 智能制造−"中国制造2025"的主攻方向[J]. 中国机械工程, 2015, 26(17): 2273−2284. doi: 10.3969/j.issn.1004-132X.2015.17.001 Zhou J. Intelligent manufacturing - main direction of "Made in China 2025"[J]. China Mech Eng, 2015, 26(17): 2273−2284. doi: 10.3969/j.issn.1004-132X.2015.17.001 [3] 叶声华, 邾继贵, 张滋黎, 等. 大空间坐标尺寸测量研究的现状与发展[J]. 计量学报, 2008, 29(4A): 1−6. Ye S H, Zhu J G, Zhang Z L, et al. Status and development of large-scale coordinate measurement research[J]. Acta Metrol Sin, 2008, 29(4A): 1−6. [4] 李超林, 刘俊辰, 张福民, 等. 频率调制连续波激光雷达测量技术的非线性校正综述[J]. 光电工程, 2022, 49(7): 210438. doi: 10.12086/oee.2022.210438 Li C L, Liu J C, Zhang F M, et al. Review of nonlinearity correction of frequency modulated continuous wave LiDAR measurement technology[J]. Opto-Electron Eng, 2022, 49(7): 210438. doi: 10.12086/oee.2022.210438 [5] 阳琴, 陈孝林, 曾诚, 等. 基于DPMZM的微波光子倍频激光雷达仿真分析[J]. 激光技术, 2023, 47(6): 729−735. doi: 10.7510/jgjs.issn.1001-3806.2023.06.001 Yang Q, Chen X L, Zeng C, et al. Simulation and analysis of LiDAR based on DPMZM and microwave photonic frequency multiplication[J]. Laser Technol, 2023, 47(6): 729−735. doi: 10.7510/jgjs.issn.1001-3806.2023.06.001 [6] Yüksel K, Wuilpart M, Mégret P. Analysis and suppression of nonlinear frequency modulation in an optical frequency-domain reflectometer[J]. Opt Express, 2009, 17(7): 5845−5851. doi: 10.1364/OE.17.005845 [7] Moore E D, McLeod R R. Correction of sampling errors due to laser tuning rate fluctuations in swept-wavelength interferometry[J]. Opt Express, 2008, 16(17): 13139−13149. doi: 10.1364/OE.16.013139 [8] Mateo A B, Barber Z W. Precision and accuracy testing of FMCW ladar-based length metrology[J]. Appl Opt, 2015, 54(19): 6019−6024. doi: 10.1364/AO.54.006019 [9] Yu Z H, Lu C, Liu G D. FMCW LiDAR with an FM nonlinear kernel function for dynamic-distance measurement[J]. Opt Express, 2022, 30(11): 19582−19596. doi: 10.1364/OE.458235 [10] Schmalzried S, Schmitz H, Zimmermann M. A flexible and, robust 3D coordinate measurement system based on white light interferometry for calibration of industrial systems[C]//Proceedings of the 11th International Symposium on Measurement and Quality Control, 2013. [11] Hughes B, Campbell M A, Lewis A J, et al. Development of a high-accuracy multi-sensor, multi-target coordinate metrology system using frequency scanning interferometry and multilateration[J]. Proc SPIE, 2017, 10332: 1033202. doi: 10.1117/12.2273644 -
Overview
For large complex electromechanical systems such as aeronautics and astronautics, the demand for length measurement has also evolved from one-dimensional displacement measurement to multi-objective, flexible and extensible multiline parallel measurement. The demand for large-size measurements in various industries, especially the manufacturing industry, is increasing day by day and tends to be diversified.
Frequency-modulated continuous-wave lidar measurement is an absolute ranging method that modulates the frequency of the laser, generates a beat frequency through the local oscillator signal of the frequency-modulated laser and the echo signal reflected from the target being measured, and extracts the interference beat frequency signal to obtain the measured distance. Frequency-modulated continuous-wave lidar combines the advantages of traditional radar and laser interferometry, with its non-contact, large measurement range, high resolution and strong anti-interference ability. It plays a vital role in the fields of large-scale space precision measurement, micro-measurement, and biometrics. Compared with the pulse ranging method, it has higher ranging accuracy; compared with the interferometric laser ranging, it can achieve absolute distance measurement, and the system measurement structure is simple. As a high-precision spatial large-scale absolute distance measurement method, frequency-modulated continuous-wave laser length measurement technology can meet the needs of a new generation of measurement scenarios and has many advantages such as anti-interference, high accuracy, and no cooperation. This paper researches multiline parallel coherent precision length measurement methods based on frequency-modulated continuous-wave lasers. Because of the problems of fiber dispersion and auxiliary fiber drift in the traditional length measurement system, which lead to reduced length measurement accuracy, a three-optical path containing a hydrogen cyanide gas absorption cell is proposed. The Mach-Zehnder interferometry system, on this basis, realizes precision length multiline parallel measurement based on the optical switch structure. The experimental results of precision guide rail length measurement show that the proposed method is less than 25 μm in the length range of 3.6 m. The four-way parallel length measurement is realized. The absolute error of the multi-channel measurement results is not more than 30 μm compared with the measurement results of a commercial laser interferometer.
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Hu S B, Liu J C, Yu S, et al. Multiline parallel precision coherent length measurement of frequency modulation continuous wave LiDAR[J]. Opto-Electron Eng, 2024, 51(3): 230285. doi: 10.12086/oee.2024.230285
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Figure 1.
The basic optical diagram of FMCW laser ranging
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Figure 2.
HCN gas cell signal diagram
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Figure 3.
Schematic diagram of FMCW ranging system based on HCN gas cell
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Figure 4.
Schematic diagram of HCN absorption peak phase fitting
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Figure 5.
HCN combined with resampling multiline ranging system
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Figure 6.
Error comparison of three measurement methods
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Figure 7.
Differential error bar with a step of 10 mm
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Figure 8.
Signal comparison diagram. (a) Before resampling and filtering；(b) After Resampling and filtering
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Figure 9.
Comparison chart of the results of three measurement methods
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Figure 10.
The standard deviation of four-way measurement at different positions
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Figure 11.
Four-channel measurement differential error bar
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