Research progress of laser direct writing fabrication of metal and carbon micro/nano structures and devices

Zhou Weiping; Bai Shi; Xie Zuwu; Liu Mingwei; Hu Anming

doi:10.12086/oee.2022.210330

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Zhou W P, Bai S, Xie Z W, et al. Research progress of laser direct writing fabrication of metal and carbon micro/nano structures and devices[J]. Opto-Electron Eng, 2022, 49(1): 210330. doi: 10.12086/oee.2022.210330

Citation:

Zhou W P, Bai S, Xie Z W, et al. Research progress of laser direct writing fabrication of metal and carbon micro/nano structures and devices[J]. Opto-Electron Eng, 2022, 49(1): 210330. doi: 10.12086/oee.2022.210330

Research progress of laser direct writing fabrication of metal and carbon micro/nano structures and devices

1.
Key Laboratory of Intelligent Sensors and Advanced Sensing Materials of Hunan Province, School of Physics and Electronic Science, Hunan University of Science and Technology, Xiangtan, Hunan 411201, China
2.
Advanced Laser Processing Research Team, RIKEN Center for Advanced Photonics, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan
3.
Advanced Manufacturing & NanoEngineering Lab, 578 Violet Street, Waterloo, ON N2V 2V6, Canada

Fund Project: Scientific Research Fund of Hunan Provincial Education Department, China (19C0763) and PhD Research Startup Foundation of Hunan University of Science and Technology (E52060)

More Information

^*Corresponding author: wphsci@uestc.edu.cn

Received Date 17 October 2021

Revised Date 05 January 2022

Published Date 25 January 2022

Abstract

Abstract

As a low-cost, high-efficiency, and high-precision processing technology, laser direct writing can be applied to rapidly prototype two-dimensional or three-dimensional micro/nano-structures with almost arbitrary degrees of freedoms. This is of great significance to the fabrication of optoelectronics and semiconductor micro-nano structures and devices. Metal micro/nano-structures have a wide range of applications in electronics and photonics. This article reviews the research progress of laser direct writing of metal micro/nano-structures, including the preparation of micro/nano-structures and devices using gold, silver, copper and their composite materials. Subsequently, the research progress of laser direct writing on surface-enhanced Raman spectroscopy microfluidic chip is reviewed. With increase of requirements for environmental protection, functional carbon materials are extensively used in many fields. Compared with the traditional thermal carbonization method, the laser direct writing process can realize the fabrication of fine patterned micro/nano-structures on the surface. This article reviews the research progress of laser in-situ reduction of graphene oxide, laser carbonized wood, leaves and other wood materials. By reviewing the research of our research group and other related research results, this article can provide reference for the research and application of laser direct writing of metal and carbon material for micro/nano-structures and devices.
- laser direct writing /
- micro/nano structures and devices /
- metal micro/nano structures /
- carbon materials /
- surface-enhanced Raman spectroscopy

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References

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Overview

Overview

As a low-cost, high-efficiency, and high-precision processing technology, laser direct writing can be applied to rapidly prototype two-dimensional or three-dimensional micro/nano-structures of almost arbitrary degrees of freedoms. This is of great significance to the fabrication of optoelectronics and semiconductor micro/nano-structures and devices. Metal micro/nano-structures have a wide range of applications in electronics and photonics. This article reviews the research on the fabrication of metal micro/nano-structures and device by laser direct writing. Laser direct writing has made progress in the preparation of gold, silver, copper and metal composite based micro/nano-structures and devices. The current research mainly focuses on how to realize the laser direct writing preparation of novel materials and the improvement of performance, such as electrical conductivity. The improvement on laser processing precision mainly relies on the innovation of laser direct writing methods, such as stimulated emission depletion laser direct writing technology. In the preparation of conventional metal micro/nano-structures and devices, laser direct writing technology has shown its unique advantages. Due to the non-contact and high-energy characteristics of laser direct writing, it has significant advantages in the preparation of surface-enhanced Raman scattering (SERS) chips, and is especially suitable for processing materials in cavities or micro-channels inside transparent materials. With the development of flexible electronics and wearable devices, laser direct writing technology has advantages in the preparation of flexible electronic devices due to its ultra-fast processing and low thermal effects. With the improvement of environmental protection requirements, functional carbon materials will be widely used. Compared with the traditional thermal carbonization methods, the laser direct writing process can realize the preparation of fine patterned micro/nano-structures on the surface of material. In addition to graphene oxide or polyamide materials, laser direct writing can directly write patterned graphene on the surface of food, cloth, paper, and even natural coal materials. These studies can further expand the range of material selections for carbon-based functional devices. In short, the laser direct writing technology provides an effective method to prepare low-cost, green and environmentally friendly devices.