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Wang H X, He Y L, Zhu H W, et al. Research progress and prospects of metasurface polarization devices[J]. Opto-Electron Eng, 2024, 51(8): 240095. doi: 10.12086/oee.2024.240095
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Research progress and prospects of metasurface polarization devices
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Abstract
Polarization, as one of the basic characteristics of light, is widely utilized in communication, imaging, optical encryption, and other fields. However, traditional polarization devices face numerous problems such as large size and low integration. Due to their unique light field manipulation mechanisms, subwavelength-scale metasurfaces offer innovative solutions for miniaturization and cost reduction of polarization devices. This paper reviews recent advances in metasurface-based polarization devices and fabrication techniques. Starting from the phase manipulation mechanisms of metasurfaces, the article briefly introduces methods for controlling the transmission phase, geometric phase, generalized geometric phase, and resonance phase. The focus is summarizing various metasurface polarization devices and their fabrication, including polarization conversion, polarization beam splitting, vector vortex beam generators, high-order Poincaré sphere optical encryption, polarization multi-channel holography, and polarization detection. Finally, we discuss potential development trends and application prospects in this field.-
Keywords:
- polarization device /
- metasurface /
- polarization detection /
- multifunction /
- phase regulation
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References
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Overview
Polarization devices are significant optical components in polarized optical systems such as optical information processing, optical measurement, polarization detection, and communication. Traditional polarizers rely on the birefringence effect of natural crystals or the polarization selectivity of multilayer film structures, which requires accumulated optical path differences to achieve phase control. The inherent characteristics of the former necessitate significant thickness to separate the two polarization states, while the latter, as an alternative, significantly reduces thickness but involves a complex manufacturing process and offers high extinction ratios only within narrow bands and at small incident angles. These defects greatly restrict the development and application of these polarizers. Metasurface, as a novel type of optical field modulator, is generally composed of sub-wavelength meta-atom arrays. It can introduce phase discontinuities and enable precise control of the polarization state of incident light. Metasurface polarization devices meet the quality of the optical field and have the advantages of small size, lightweight, high design freedom, and tunable bandwidth, unveiling fascinating approaches to develop the next-generation on-chip polarization devices. In this paper, the basic process of designing metasurface polarization devices is discussed. Furthermore, four different meta-atom polarization modulation methods are introduced. As the basic units of metasurfaces, the polarization characteristics of meta-atoms are crucial for designing metasurfaces with specific polarization responses. Besides, common homogeneous polarization states and more complex types such as radial vector beams and azimuthal vector beams are introduced, which have unique advantages and application value in fields such as optical communication and microscopy imaging. Then, the research progress of different polarization devices is discussed in detail. Finally, the metasurface fabrication technologies are discussed. Overall, this review presents the principle, development, and fabrication in an all-around way, focusing on the various applications of metasurface polarizers in planar optical devices, and puts forward the existing problems and possible solutions in the design and processing of metasurface polarization devices.
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Wang H X, He Y L, Zhu H W, et al. Research progress and prospects of metasurface polarization devices[J]. Opto-Electron Eng, 2024, 51(8): 240095. doi: 10.12086/oee.2024.240095
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Figure 1.
(a) Schematic image of the Poincaré sphere; (b) Representation of LP and CP on a Poincaré sphere
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Figure 2.
Schematic image of the PB phase
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Figure 3.
(a) Schematic image of the traditional Snell’s law; (b) Schematic image of generalized refraction law; (c) Schematic image of generalized reflection law
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Figure 4.
(a) Schematic image of plasma metasurface polarization conversion[67]; (b) Plasma metasurface polarization converter cell structure and calculated reflection coefficient and phase curve[67]; (c) Calculated degree of linear polarization (DoLPs) and angle of linear polarization (AoLPs) of the four designed nano structures as a function of the rotation angle of θ[67]; (d) SEM image of the fabricated metasurface polarization conversion[67]
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Figure 5.
(a) Schematic (left) and SEM (right) image of the designed metasurface consisting of TiO2 nanopillars on a fused-silica substrate[72]; (b) Schematic of the LP polarization manipulation (left), which employs only the propagation phase. The transmission coefficient and phase shift (right)[72]; (c) Schematic of the CP polarization manipulation (left) achieved by combining propagation and PB phases. The conversion efficiency and phase shift (right)[72]; (d) Experimental setup for full-Stokes polarimetry[72]; (e) The experimental and simulated intensity distributions of the metasurface and corresponding reconstructed Stokes parameters for the selected six basis polarization states on a Poincaré sphere[72]
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Figure 6.
(a) Schematic illustration of the the on-axis broadband achromatic focusing optical vortex generator (BAFOV) generation with polarization-dependent functions[82]; (b) SEM images of the fabricated polarization-controlled BAFOV[82]; (c) Schematic illustration of the characterizing system for the measurement of fabricated metadevices[82]; (d) Performance of the BAFOV generator[82]
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Figure 7.
(a) Schematic of Meta-VCSELs[84]; (b) The achievable polarization states on the Poincaré sphere in this example by operating the anisotropic meta-atoms as nano half-waveplates[84]; (c) Generations of vector vortex beams[84]
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Figure 8.
(a) Schematic of phase control of spin decoupling on chiral metasurfaces[93]; (b) Conceptual illustration of generating multi-channel perfect HDPBs via cascaded chiral metasurfaces[93]; (c) Optical encryption demonstration based on cascaded metasurfaces[93]
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Figure 9.
(a) Schematic illustrations of polarization multiplexed holograms based on dielectric metasurfaces[98]; (b) The experimental setup for the observation of the holographic images[98]; (c) Simulated and experimental results for the multichannel vectorial holography[98]
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Figure 10.
(a) Schematic image and SEM of matrix gratings for arbitrary parallel polarization analysis[104]; (b) Schematic image of the measurement of the arbitrary state Stokes polarization state[104]; (c) The polarization contrast of each order is shown[104]
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Figure 11.
(a) Schematic of setup for near-infrared full-Stokes detection[106]; (b) CP filter with the Z-shaped pattern, which transmits RCP light (green) and blocks LCP light (blue)[106]; (c) Scanning electron microscope (SEM) image[106]; (d) Schematic of the measurement setup for CP filter characterization[106]; (e) Transmission spectra and corresponding circular dichroism (CD) of CP light (top) and transmission spectra and extinction ratio of TM and TE polarized light (down)[106]
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Figure 12.
(a) Schematic of CMOS integrated full Stokes polarimetric imager with dual operation wavelength[111]; (b) A schematic of the customized experimental setup for generating arbitrary polarization states for full Stokes polarization detection[111]; (c) Measured transmission and LPER of fabricated vertically coupled double-layered gratings (VCDG) (left) and measured transmission and CPER of the chiral metasurface at 530~700 nm and 480~530 nm, respectively (right)[111]; (d) The angle of polarization (AOP), the degree of linear polarization (DOLP), and the degree of circular polarization (DOCP) detection error distributions of all metasurface polarization filter array pixels for the specific polarization state at normal incidence and oblique incidence of red color (left) and green color (right)[111]; (e) Image of full Stokes polarimetric CMOS imaging sensor[111]
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Figure 13.
Fabrication technologies for metasurfaces. (a) Schematic of EBL[120]; (b) Schematic of FIB[120]; (c) Schematic of LDW; (d) Schematic of LDW processing system[121]; (e) Schematic of NIL
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