Femtosecond laser micromachining optical devices

Dong Bin; Zhang Juan; Wang Dawei; Zhang Yiyuan; Zhang Leran; Li Rui; Xin Chen; Liu Shunli; Zhang Zihang; Wu Hao; Jiang Shaojun; Zhu Suwan; Liu Bingrui; Wu Dong

doi:10.12086/oee.2023.220073

Article navigation > Opto-Electronic Engineering > 2023 Vol. 50 > No. 3 > 220073

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Dong B, Zhang J, Wang D W, et al. Femtosecond laser micromachining optical devices[J]. Opto-Electron Eng, 2023, 50(3): 220073. doi: 10.12086/oee.2023.220073

Citation:

Dong B, Zhang J, Wang D W, et al. Femtosecond laser micromachining optical devices[J]. Opto-Electron Eng, 2023, 50(3): 220073. doi: 10.12086/oee.2023.220073

Femtosecond laser micromachining optical devices

1.
CAS Key Laboratory of Mechanical Behavior and Design of Materials, Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, Anhui 230026, China
2.
Department of Clinical Laboratory, the First Affiliated Hospital of USTC, Division of Life Sciences and Medicine, University of Science and Technology of China, Hefei, Anhui 230001, China

Fund Project: National Natural Science Foundation of China (61927814, 52122511, 91963127, 52075516, U20A20290, 52175396) and Major Scientific and Technological Projects in Anhui Province (201903a05020005)

More Information

Corresponding authors: brliu@ustc.edu.cn; dongwu@ustc.edu.cn

Received Date 05 May 2022

Revised Date 25 June 2022

Accepted Date 07 July 2022

Available Online 16 March 2023

Published Date 25 March 2023

Abstract

Abstract

Miniaturization, integration, and flexible deformation are the future development trends of optical devices. Meanwhile, optical systems based on integrated micro-optical devices stand out for their low power consumption, fast response, and high information storage capacity. However, current high-precision micro/nano processing methods, such as FIB (Focused Ion Beam) and semiconductor lithography, are far too complex and in lack of flexibility. Femtosecond laser, as a non-contact, high-precision, high-intensity tool for "cold" processing, is particularly favored in micro/nano processing. This review first elucidated the background and mechanism of femtosecond laser micromachining used in optical device. After that, we discussed a number of methods employed to improve the resolution of femtosecond micromachining. Then we listed various advanced processing means based on femtosecond laser and systematically summarized recent representative research developments of femtosecond laser micromachining used in microlens, gratings, optical waveguides, and photonic crystals. Finally, we concluded the challenges and the directions for further development of femtosecond laser machining in the field of micro-optical devices.
- femtosecond laser /
- high-precision /
- micro/nano structure /
- optical device

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References

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Overview

Overview

Currently, the development of semiconductor technology based on electrons has reached its physical limit, and the further reduced size of semiconductor devices will bring about the problems such as excessive power consumption. To solve the above-mentioned problems, information technology based on photons stands out for its fast response time, high storage capacity, strong parallel processing capability, and low power consumption. However, traditional optical devices are generally large in size, so the optical system composed of such devices is quite bulky and in lack of flexibility, which greatly increases the difficulty of optical system integration. The development of micro-optics theory makes the integration of optical devices possible. Optical devices on multiple scales have shown the performance no less than that of traditional optical devices, which not only substantially promotes the miniaturization of optical system but also puts forward higher requirements for the micromachining precision.

Laser, as a non-contact, high-energy, non-polluting, and automatic processing tool, holds various applications in material processing, wide-bandwidth communication, optical devices, data storage and other important industrial fields, and has been widely concerned by industry insider. Compared with traditional long-pulse or continuous laser processing technology, femtosecond laser exhibits various advantages such as ultrashort pulse width, ultrahigh peak power, and ultralow thermal effect, thus making itself a more advanced micro/nano processing tool.

Because of the threshold effect of two-photon polymerization (TPP) and the Gaussian distribution of femtosecond laser after being focused by the objective lens, TPP can theoretically achieve three-dimensional resolution beyond the diffraction limit if the light intensity at the center of the focus is just slightly greater than that of the two-photon ionization threshold. Based on the above-mentioned theory, femtosecond laser can actually fabricate arbitrary micro/nano 3D structures in the circumstances of point-by-point scanning. Other than TPP, the interaction between electrons and ion subsystems during the ultrashort-pulse laser processing of metal or semiconductor is mostly analyzed by the Double-Temperature Equation (DTE). Based on the DTE, femtosecond laser has been employed to drill holes or achieve arbitrary patterning on metal surface. When ultrashort-pulse laser interacts with dielectric materials, precise reduction of material can be achieved through "avalanche ionization" triggered by multi-photon ionization or tunneling ionization. Based on the above-mentioned theory, femtosecond laser can actually process any material in practice.

Therefore, in this review, the principle and advantages of femtosecond laser as well as its application in the micro/nano processing of optical device are discussed in detail. This review is divided into five sections. The first section introduces the mechanism and processing properties of femtosecond laser. The second section discusses a variety of methods to improve the resolution of femtosecond laser micromachining. The third section focuses on the femtosecond laser processing technology, and the fourth section describes the femtosecond laser's application in the processing of optical devices, including microlens, optical waveguide, grating, and photonic crystals. Finally, this review makes a summary and discusses the prospect of femtosecond laser micromachining used in optical devices.