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Luan M L, Zheng J X, Sun X C, et al. Liquid-assisted laser fabrication of hard materials and applications[J]. Opto-Electron Eng, 2023, 50(3): 220328. doi: 10.12086/oee.2023.220328
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Liquid-assisted laser fabrication of hard materials and applications
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Abstract
Due to the stable mechanical and chemical properties, excellent photoelectric properties, and other advantages, hard and brittle materials have been widely used in aerospace, the photoelectric industry, and other fields. Laser fabrication is an ideal technology for hard and brittle materials processing due to its high precision, high energy, and non-contact properties. In order to achieve the removal of hard and brittle materials, high laser energy is usually required, resulting in low structural accuracy and poor surface quality. This review introduces the advances of liquid-assisted laser fabrication technology in the processing of hard and brittle materials, introduces the principles of three liquid-assisted laser fabrication technologies, and compares their advantages and disadvantages. The effects of different processing technologies, types of auxiliary liquids, and processing parameters on the quality of different materials were summarized in detail. The main applications of liquid-assisted laser fabrication technology were summarized, and the existing problems and potential development of this technology were discussed. -
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References
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Luan M L, Zheng J X, Sun X C, et al. Liquid-assisted laser fabrication of hard materials and applications[J]. Opto-Electron Eng, 2023, 50(3): 220328. doi: 10.12086/oee.2023.220328
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Figure 1.
Outline of the review about liquid-assisted laser fabrication
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Figure 2.
(a) Schematic diagram of liquid phase laser processing; (b) Generation, expansion, collapse, and persistent bubble generation based on cavitation bubbles generated by liquid phase laser ablation [11]; (c) Preparation of tail concentric circle macrostructure based on underwater sustained bubble-assisted femtosecond laser ablation technology[18]; (d) Preparation of porous crack structure based on femtosecond laser impact shot peening liquid ablation technology with different angles and morphology display[19]
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Figure 3.
(a) Schematic diagram of laser induced back wet etching optical path system based on femtosecond laser[24] ; (b) Comparison of the morphologies of the holes prepared by laser-induced wet back etching under different environments[25]; (c) Shadow diagram of the hydrodynamics of cavitation bubbles produced by laser-induced wet back etching[26]
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Figure 4.
(a) Flow chart of selective etching using the reaction rates of the auxiliary liquid and the material body and modified area[34]; (b) Flow chart for selective etching using an auxiliary liquid reacting only with the modified region[35]
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Figure 5.
(a) Three different micro-nano structures are generated on the silicon surface[55]; (b) Microchannel structures are prepared by internal waves in photosensitive glass[88]; (c) Triangular pits prepared by anisotropic etching on the sapphire surface[89]
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Figure 6.
(a) A single microlens with arbitrary morphology was prepared on the sapphire surface[90]; (b) Preparation of low-light level vortex generators with different morphologies on the diamond surface[91]; (c) The bionic moth-eye anti-reflection structure was prepared uniformly on the surface of the coated sapphire[92]; (d) Highly homogenous artificial compound eye structures prepared on the surface of sulfide[35]
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Figure 7.
(a) Three-layer multi-branch microfluidic system[94]; (b) Auxiliary microchannel system with rotating impeller[94]; (c) A nested system structure of microcavities and microspheres that can control the direction of liquid flow[95]
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Figure 8.
(a) Through hole array prepared by laser-induced micro-jet assisted ablation[19]; (b) Non-taper pores with different morphologies[98]; (c) Microchannel array prepared by laser-induced microjet assisted ablation[19]
