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Luan M L, Zheng J X, Sun X C, et al. Liquid-assisted laser fabrication of hard materials and applications[J]. Opto-Electron Eng, 2023, 50(3): 220328. doi: 10.12086/oee.2023.220328
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Liquid-assisted laser fabrication of hard materials and applications
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Abstract
Due to the stable mechanical and chemical properties, excellent photoelectric properties, and other advantages, hard and brittle materials have been widely used in aerospace, the photoelectric industry, and other fields. Laser fabrication is an ideal technology for hard and brittle materials processing due to its high precision, high energy, and non-contact properties. In order to achieve the removal of hard and brittle materials, high laser energy is usually required, resulting in low structural accuracy and poor surface quality. This review introduces the advances of liquid-assisted laser fabrication technology in the processing of hard and brittle materials, introduces the principles of three liquid-assisted laser fabrication technologies, and compares their advantages and disadvantages. The effects of different processing technologies, types of auxiliary liquids, and processing parameters on the quality of different materials were summarized in detail. The main applications of liquid-assisted laser fabrication technology were summarized, and the existing problems and potential development of this technology were discussed. -
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References
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Overview
With the development of industry, laser fabrication has become one of the important technologies for welding, cutting, surface processing, and other advanced manufacturing areas. At the same time, the pursuit of structures miniaturization, devices integration, and high precision has put forward more stringent requirements for laser fabrication technologies. Due to the advantages of stable mechanical and chemical properties and unique photoelectric properties, hard and brittle materials have been widely used in aerospace, the photoelectric industry, et al. Laser fabrication is an ideal technology for hard and brittle materials processing due to its high precision, high energy, and non-contact properties. In order to achieve the removal of hard and brittle materials, high laser energy is usually required, resulting in low fabrication accuracy and poor surface quality. As an improved laser processing method, liquid-assisted laser fabrication can effectively improve fabrication accuracy and surface quality. The processing characteristics and material removal principles of three different liquid-assisted laser processing technologies are summarized in this review. According to the different functions of the medium through which the laser penetrates and the kinds of liquid, liquid-assisted laser fabrication technology can be divided into Laser ablation in liquid (LAL), laser-induced backside wet etching (LIBWE), and etching-assisted laser modification (EALM). The auxiliary liquid of Laser ablation in liquid is mostly water, which mainly plays the role of cooling and removing debris. The auxiliary liquids used by laser-induced backside wet etching include organic solvents, acid-base solutions, inorganic salts, and other liquids, which play different roles according to different liquids. The etching-assisted laser modification mainly uses an acid or alkaline solution as an auxiliary liquid to remove laser-modified materials. Different methods and auxiliary liquids have different mechanisms in the methods. Therefore, almost any material can be processed by choosing suitable methods and auxiliary liquids, including photosensitive glass, silicon crystal, sapphire, and other transparent hard brittle materials. Here, we summarize the fabrication technologies and fabrication parameters for different materials. The development and applications of liquid-assisted laser fabrication technologies in the fields of micro-optical components, microfluidic devices, and drilling and cutting are introduced. Finally, the challenges of the technology are discussed.
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Luan M L, Zheng J X, Sun X C, et al. Liquid-assisted laser fabrication of hard materials and applications[J]. Opto-Electron Eng, 2023, 50(3): 220328. doi: 10.12086/oee.2023.220328
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Outline of the review about liquid-assisted laser fabrication
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Figure 2.
(a) Schematic diagram of liquid phase laser processing; (b) Generation, expansion, collapse, and persistent bubble generation based on cavitation bubbles generated by liquid phase laser ablation [11]; (c) Preparation of tail concentric circle macrostructure based on underwater sustained bubble-assisted femtosecond laser ablation technology[18]; (d) Preparation of porous crack structure based on femtosecond laser impact shot peening liquid ablation technology with different angles and morphology display[19]
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Figure 3.
(a) Schematic diagram of laser induced back wet etching optical path system based on femtosecond laser[24] ; (b) Comparison of the morphologies of the holes prepared by laser-induced wet back etching under different environments[25]; (c) Shadow diagram of the hydrodynamics of cavitation bubbles produced by laser-induced wet back etching[26]
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Figure 4.
(a) Flow chart of selective etching using the reaction rates of the auxiliary liquid and the material body and modified area[34]; (b) Flow chart for selective etching using an auxiliary liquid reacting only with the modified region[35]
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Figure 5.
(a) Three different micro-nano structures are generated on the silicon surface[55]; (b) Microchannel structures are prepared by internal waves in photosensitive glass[88]; (c) Triangular pits prepared by anisotropic etching on the sapphire surface[89]
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Figure 6.
(a) A single microlens with arbitrary morphology was prepared on the sapphire surface[90]; (b) Preparation of low-light level vortex generators with different morphologies on the diamond surface[91]; (c) The bionic moth-eye anti-reflection structure was prepared uniformly on the surface of the coated sapphire[92]; (d) Highly homogenous artificial compound eye structures prepared on the surface of sulfide[35]
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Figure 7.
(a) Three-layer multi-branch microfluidic system[94]; (b) Auxiliary microchannel system with rotating impeller[94]; (c) A nested system structure of microcavities and microspheres that can control the direction of liquid flow[95]
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Figure 8.
(a) Through hole array prepared by laser-induced micro-jet assisted ablation[19]; (b) Non-taper pores with different morphologies[98]; (c) Microchannel array prepared by laser-induced microjet assisted ablation[19]
- Figure .
